US4380211A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum evaporation system for deposition of thin films
Assignee: Panasonic Holdings Corp
•
Filing: 1981-09-03
•
Granted: 1983-04-19
•
Expires: 2001-09-03
Abstract
Abstract A blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film-substrate holder and an evaporation source in such a way that the blower, the dust collector and the process chamber constitute a closed circuit.
Inventors
- 👤 Koichi Shinohara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:38
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/56; C23C14/564
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
59 words
A vacuum evaporation system for the deposition of thin films comprising: a blower and dust collector in communication through valve means with an evacuated process chamber in which are disposed at least one set of a film substrate holder and an evaporation source whereby the gases in the evacuated process chamber can be filtered while the vacuum is maintained.
Claim 2
Dependent Claim
59 words
A vacuum evaporation system for the deposition of thin films comprising: a blower and dust collector in communication through valve means with an evacuated process chamber in which are disposed at least one set of a film substrate holder and an evaporation source whereby the gases in the evacuated process chamber can be filtered while the vacuum is maintained.
Claim 3
Dependent Claim
63 words
A vacuum evaporation system for the deposition of thin films comprising: a blower and a dust collector in communication through valve means with an evacuated process chamber in which are disposed at least one set of a film substrate holder and an evaporation source in such a way that said blower, said dust collector and said evacuated process chamber comprise a closed circuit.
Claim 4
Dependent Claim
63 words
A vacuum evaporation system for the deposition of thin films comprising: a blower and a dust collector in communication through valve means with an evacuated process chamber in which are disposed at least one set of a film substrate holder and an evaporation source in such a way that said blower, said dust collector and said evacuated process chamber comprise a closed circuit.
Claim 5
Dependent Claim
35 words
A vacuum evaporation system for the deposition of thin films as set forth in claim 1 or 2 further characterized in that said film substrate holder is a deposition drum which guides a tape-like substrate.
Claim 6
Dependent Claim
40 words
A vacuum evaporation system for the deposition of thin films as set forth in claim 3 further characterized in that said deposition drum is rotated in the direction opposite to the direction of the flow of air from said blower.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-04-18 | 1986-10-18 | 1987-04-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-04-18 | 1990-10-18 | 1991-04-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-04-18 | 1994-10-18 | 1995-04-19 | $7700.00 | Window Closed / Lapsed |