US4377607A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for producing vacuum deposition films
Assignee: Fujifilm Holdings Corp
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Filing: 1981-05-01
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Granted: 1983-03-22
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Expires: 2001-05-01
Abstract
Abstract In a process for producing vacuum deposition films which comprises providing a vacuum deposition film composed of an alloy or an intermetallic compound of two or more components having different vapor pressures at a specified temperature on a base, the improvement which comprises charging the component having the lower vapor pressure at said temperature to an evaporation source in a vacuum evaporation chamber in such an amount that the evaporation amount thereof per unit time does not substantially vary, and carrying out vacuum evaporation while continuously feeding a component having a higher vapor pressure at said temperature into said evaporation source in an amount corresponding to the evaporation amount thereof per unit time.
Inventors
- 👤 Satoshi Yoshida
- 👤 Hideaki Takeuchi
- 👤 Masamichi Shigyo
- 👤 Toshio Iijima
- 👤 Tomoaki Ikeda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:25
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/246; C23C14/06; C23C14/14
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
126 words
In a process for producing vacuum deposition films which comprises providing a vacuum deposition film composed of an alloy or an intermetallic compound of two or more components having different vapor pressures at a specified temperature on a base, the improvement which comprises charging the component having the lower vapor pressure at said temperature to an evaporation source in a vacuum evaporation chamber in such an amount that the evaporation amount thereof per unit time does not substantially vary, and carrying out vacuum evaporation while continuously feeding a component having a higher vapor pressure at said temperature into said evaporation source in an amount such that said components in said evaporation source maintain a definite composition thereby to obtain a definite composition of said deposited film.
Claim 2
Dependent Claim
126 words
In a process for producing vacuum deposition films which comprises providing a vacuum deposition film composed of an alloy or an intermetallic compound of two or more components having different vapor pressures at a specified temperature on a base, the improvement which comprises charging the component having the lower vapor pressure at said temperature to an evaporation source in a vacuum evaporation chamber in such an amount that the evaporation amount thereof per unit time does not substantially vary, and carrying out vacuum evaporation while continuously feeding a component having a higher vapor pressure at said temperature into said evaporation source in an amount such that said components in said evaporation source maintain a definite composition thereby to obtain a definite composition of said deposited film.
Claim 3
Dependent Claim
25 words
The process of claim 1, wherein said base is an indefinite length base and is continuously fed through the evaporation chamber at a constant rate.
Claim 4
Dependent Claim
36 words
The process of claim 1 or 2, wherein upon initiating evaporation a portion of a component having a higher vapor pressure is present together with the component having the lower vapor pressure in said evaporation source.
Claim 5
Dependent Claim
27 words
The process of claim 1 or 2, wherein the component having the lower vapor pressure is iron and the component having the higher vapor pressure is aluminium.
Claim 6
Dependent Claim
52 words
The process of claim 1 or 2, wherein the component having the lower vapor pressure is iron, the component having the higher vapor pressure is aluminium, and the previously charged material consisting of the component having the higher vapor pressure and the component having the lower vapor pressure is an aluminium-iron alloy.
Claim 7
Dependent Claim
27 words
The process of claim 1 or 2, wherein the component having the higher vapor pressure is continuously fed into said evaporation source as a wire or rod.
Claim 8
Dependent Claim
16 words
The process of claim 4, wherein the aluminium is an aluminium wire or an aluminium rod.
References Cited (Backward Citations)
US2382432A
Cited
US2759861A
Cited
US3363998A
Cited
US3415672A
Cited
US3520716A
Cited
GB1235412A
Cited
US3911177A
Cited
US4016305A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-03-21 | 1986-09-20 | 1987-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-03-21 | 1990-09-20 | 1991-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-03-21 | 1994-09-20 | 1995-03-22 | $7700.00 | Window Closed / Lapsed |