US4377564A
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Method of producing silicon
Assignee: Licentia Patent Verwaltungs GmbH
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Filing: 1981-04-13
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Granted: 1983-03-22
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Expires: 2001-04-13
Abstract
Abstract A method of producing silicon comprising producing a plasma in a gas flow laden with at least one silicon compound so that the silicon compound is reduced or decomposed to silicon and transporting the silicon which may have reacted with other material if present in the plasma and reaction products out of the plasma in the gas flow.
Inventors
- 👤 Reinhard Dahlberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 04:11
CPC Classifications
C; C30; C30B; C30B29/00; C30B29/02; C30B29/06; B; B01; B01J; B01J12/00; B01J12/002; C01; C01B; C01B32/00; C01B32/90; C01B32/914; C01B32/956; C01B32/963; C01B32/984; C01B33/00; C01B33/02; C01B33/06; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/513; C30B25/00; C30B25/02; C30B25/18; H; H05; H05H; H05H1/00; H05H1/24; H05H1/26; H05H1/32; H05H1/34; H05H1/3405; H05H1/3484; H05H1/42; H10; H10F; H10F71/00; H10F71/121; C01P; C01P2002/00; C01P2002/50; C01P2002/52; C01P2002/54; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/547; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
52 words
A method for producing silicon comprising: providing a stream of gas; generating a plasma in said stream of gas; inserting a portion of a molded element containing silicon oxide into said plasma; reducing said silicon oxide to silicon in said plasma; and transporting the resulting silicon away in said stream of gas.
Claim 2
Independent Claim
52 words
A method for producing silicon comprising: providing a stream of gas; generating a plasma in said stream of gas; inserting a portion of a molded element containing silicon oxide into said plasma; reducing said silicon oxide to silicon in said plasma; and transporting the resulting silicon away in said stream of gas.
Claim 3
Dependent Claim
18 words
A method as defined in claim 1, wherein said plasma is produced by direct or alternating electric current.
Claim 4
Dependent Claim
24 words
A method as defined in claim 1, wherein said plasma is produced in said gas flow by absorption of intensive electromagnetic or ionizing radiation.
Claim 5
Dependent Claim
19 words
A method as defined in claim 1, wherein the silicon produced in said plasma is deposited on a substrate.
Claim 6
Dependent Claim
20 words
A method as defined in claim 1, wherein a plasma spray system with gas-stabilized plasma is used to produce silicon.
Claim 7
Dependent Claim
17 words
A method as defined in claim 1, wherein a plasma spray system with water-stabilized plasma is used.
Claim 8
Dependent Claim
38 words
A method as defined in claim 1, wherein said gas flow comprises a gas selected from the group consisting of hydrogen, inert gas, nitrogen, halogen, hydrocarbon, carbon monoxide, water vapour or a mixture or compound of these gases.
Claim 9
Dependent Claim
28 words
A method as defined in claim 1, wherein said gas flow is laden additionally with a doping material from the third or fifth group of the Periodic System.
Claim 10
Dependent Claim
20 words
A method as defined in claim 1, wherein said stream of gas is laden additionally with particles of silicon powder.
Claim 11
Dependent Claim
20 words
A method as defined in claim 1, wherein said stream of gas is laden additionally with particles of carbon powder.
Claim 12
Dependent Claim
18 words
A method as defined in claim 1, wherein said silicon is deposited on to a monocrystalline silicon surface.
Claim 13
Dependent Claim
17 words
A method as defined in claim 1 wherein said silicon is deposited on a metallically conductive surface.
Claim 14
Dependent Claim
21 words
A method as defined in claim 12 wherein the metallically conductive surface comprises a metal surface or a metallically conductive layer.
Claim 15
Dependent Claim
17 words
A method as defined in claim 1, wherein said silicon is deposited on to an insulator surface.
Claim 16
Dependent Claim
24 words
A method as defined in claim 1, wherein said silicon is deposited on to a liquid surface which does not react chemically with silicon.
Claim 17
Dependent Claim
21 words
A method as defined in claim 15, wherein said liquid is selected from liquid MgCl 2 or lead at 750° C.
Claim 18
Dependent Claim
36 words
A method according to claim 1, wherein said silicon is precipitated on to a heated carrier coated with a thin fluid film which does not react with silicon, e.g. an NaF film, or a tin film.
Claim 19
Dependent Claim
19 words
A method as defined in claim 17, wherein said heated carrier comprises graphite or ceramics heates to 1,000° C.
Claim 20
Dependent Claim
16 words
A method as defined in claim 17, wherein said thin fluid film comprises NaF or tin.
Claim 21
Dependent Claim
20 words
A method as defined in claim 1, wherein the silicon is deposited or precipitated in an atmosphere free of oxygen.
Claim 22
Dependent Claim
40 words
A method as defined in claim 1, wherein said stream of gas flows with the silicon into a chamber which is at reduced pressure or a vacuum; and said silicon is deposited or precipitated in said reduced pressure or vaccum.
Claim 23
Dependent Claim
17 words
A method as defined in claim 1, wherein said silicon is produced in monocrystalline or polycrystalline form.
Claim 24
Dependent Claim
19 words
A method as defined in claim 1, wherein said silicon is produced in monocrystalline or polycrystalline plates or layers.
Claim 25
Dependent Claim
22 words
A method as defined in claim 1, wherein said silicon is produced in a form suitable for use in producing solar cells.
Claim 26
Dependent Claim
17 words
A method as defined in claim 1, wherein said silicon is provided with p-regions, n-regions and p/n-junctions.
Claim 27
Dependent Claim
15 words
A method as defined in claim 1, wherein said silicon is produced in powder form.
Claim 28
Dependent Claim
26 words
A method as defined in claim 1, wherein a plasma arc of a gas-stabilized plasma injection system or plasma welding system is used as said plasma.
Claim 29
Dependent Claim
22 words
A method as defined in claim 1, wherein a plasma arc of a water-stabilized plasma injection system is used as said plasma.
Claim 30
Dependent Claim
25 words
A method as defined in claim 1, wherein a plasma injection system with two electrodes is used with at least one electrode manufactured from silicon.
Claim 31
Dependent Claim
40 words
A method as defined in claim 1, wherein a plasma injection system with electrodes comprising doped silicon is used and the silicon produced by reduction in said plasma and the silicon of said electrodes have the same type of conductivity.
Claim 32
Dependent Claim
24 words
A method as defined in claim 30, wherein the material vaporizing from said electrodes is used to dope the silicon produced in said plasma.
Claim 33
Dependent Claim
62 words
A method as defined in claim 1, wherein said moulded element is a quartz rod or a quartz filament or a quartz tube and said moulded element is introduced into the high-temperature region of said plasma to melt away the inserted end of said moulded element continuously and to vaporize said inserted end and to reduce said inserted end to form silicon.
Claim 34
Dependent Claim
26 words
A method as defined in claim 1, wherein said moulded element is a rod or tube produced from pressed or sintered SiO or SiO 2 powder.
Claim 35
Dependent Claim
26 words
A method as defined in claim 1, wherein said moulded element introduced is produced from a powdered mixture of carbon or a carbon compound and quartz.
Claim 36
Dependent Claim
43 words
A method as defined in claim 1, wherein a small quantity of an element or a compound of an element from the third or fifth group of the Periodic System is added to the silicon oxide for the purpose of doping the silicon.
Claim 37
Dependent Claim
18 words
A method as defined in claim 1, wherein the plasma is produced in a non-oxidizing stream of gas.
Claim 38
Dependent Claim
38 words
A method as defined in claim 36, wherein said stream of gas comprises one or more gases selected from the group consisting of inert gas, hydrogen, nitrogen, carbon monoxide, hydrocarbon, hydrogen halides, ammonia, hydrogen sulphides and water vapour.
Claim 39
Dependent Claim
26 words
A method as defined in claim 1, wherein said gas flow with said plasma is enveloped by a covering layer of burning or nonburning buffer gas.
Claim 40
Dependent Claim
20 words
A method as defined in claim 38 wherein the buffer gas comprises hydrocarbon gas, hydrogen gas, inert gas or nitrogen.
Claim 41
Dependent Claim
24 words
A method as defined in claim 1, wherein said stream of gas is located with said plasma in a chamber having an oxygen-free atmosphere.
Claim 42
Dependent Claim
20 words
A method as defined in claim 1, wherein said stream of gas with said plasma flows into reduced pressure chamber.
Claim 43
Dependent Claim
33 words
A method as defined in claim 1, wherein the silicon produced with the aid of said plasma is precipitated on to a substrate in the form of a polycrystalline or monocrystalline silicon layer.
Claim 44
Dependent Claim
18 words
A method as defined in claim 1, wherein the silicon produced is used to produce silicon solar cells.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-03-21 | 1986-09-20 | 1987-03-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-03-21 | 1990-09-20 | 1991-03-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-03-21 | 1994-09-20 | 1995-03-22 | $7700.00 | Window Closed / Lapsed |