US4376580A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Projection aligner with bending mirror
Assignee: Applied Materials Inc
•
Filing: 1981-03-02
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Granted: 1983-03-15
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Expires: 2001-03-02
Abstract
Abstract A projection aligner is provided wherein the image position can be shifted by employing a bending mirror which makes a slight change in the magnification.
Inventors
- 👤 W. Thomas Novak
- 👤 David W. Volmer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:02
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
85 words
In an optical projection device wherein the image of a mask or the like is projected through a narrow slit extending from one side of the mask to the other onto another surface the image moving at right angles to the slit to expose the entire mask, said device including at least one mirror reflecting the image of the mask onto said surface the improvement comprising means for anamorphically distorting said mirror whereby the size of the image lengthwise of said slit can be altered.
Claim 2
Dependent Claim
85 words
In an optical projection device wherein the image of a mask or the like is projected through a narrow slit extending from one side of the mask to the other onto another surface the image moving at right angles to the slit to expose the entire mask, said device including at least one mirror reflecting the image of the mask onto said surface the improvement comprising means for anamorphically distorting said mirror whereby the size of the image lengthwise of said slit can be altered.
Claim 3
Dependent Claim
20 words
The optical projection device of claim 1 wherein the image of the mask is projected onto a sensitized semiconductor wafer.
Claim 4
Dependent Claim
21 words
The device of claim 1 wherein the distortion is applied to the mirror to bend the mirror into a cylindrical shape.
Claim 5
Dependent Claim
20 words
The machine of claim 1 wherein the ratio of the mask size to image size is substantially 1 to 1.
Claim 6
Dependent Claim
36 words
The machine of claim 1 wherein a notched mirror is employed having two spaced attachment points and a force is applied to each of said points to distort said mirror to a concave or convex shape.
Claim 7
Dependent Claim
29 words
The machine of claim 1 wherein said mirror has a generally rectangular form and force is applied to produce a cylinder parallel to the short dimension of said mirror.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-03-14 | 1986-09-13 | 1987-03-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-03-14 | 1990-09-13 | 1991-03-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-03-14 | 1994-09-13 | 1995-03-15 | $7700.00 | Window Closed / Lapsed |