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US4371598A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for fabricating aligned patterns on the opposed surfaces of a transparent substrate

Assignee: Motorola Solutions Inc
•
Filing: 1981-07-06
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Granted: 1983-02-01
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Expires: 2001-07-06
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Abstract

Abstract A method is provided for fabricating substantially vertically aligned patterns of material on the opposed surfaces of a transparent substrate by employing a single external mask.

Inventors

  • 👤 John W. Medernach
  • 👤 Ivan A. Novak
  • 👤 Harry D. Bush

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 14:30
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/0073; H05K3/0082; G; G02; G02F; G02F1/00; G02F1/01; G02F1/03; G02F1/055; G02F1/0551; G03; G03F; G03F7/00; G03F7/20; G03F7/2022; G03F7/26; H05K2201/00; H05K2201/01; H05K2201/0104; H05K2201/0108; H05K2203/00; H05K2203/15; H05K2203/1572

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 166 words
A method for fabricating selected aligned metallic electrode patterns on the upper and lower surfaces of a substantially transparent substrate comprising the steps of: A. Situating an opaque metallic electrode material having a selected pattern on the upper surface of said substrate; B. Coating the lower surface of said substrate with photoresist; C. Exposing the upper surface of said substrate to collimated light so as to expose through said substrate the portions of the photoresist on the lower surface which remained unshielded by said opaque metallic electrode material on said upper surface; D. Removing the portions of the photoresist on said lower surface which was unexposed to light through the substrate; E. Coating said lower surface with a layer of selected metallic electrode material, and F. Removing the remaining portions of photoresist on said lower surface to form a selected pattern of selected metallic electrode material on said lower surface substantially vertically aligned with the selected pattern of opaque metallic electrode material on said upper surface.
Claim 2
Independent Claim 166 words
A method for fabricating selected aligned metallic electrode patterns on the upper and lower surfaces of a substantially transparent substrate comprising the steps of: A. Situating an opaque metallic electrode material having a selected pattern on the upper surface of said substrate; B. Coating the lower surface of said substrate with photoresist; C. Exposing the upper surface of said substrate to collimated light so as to expose through said substrate the portions of the photoresist on the lower surface which remained unshielded by said opaque metallic electrode material on said upper surface; D. Removing the portions of the photoresist on said lower surface which was unexposed to light through the substrate; E. Coating said lower surface with a layer of selected metallic electrode material, and F. Removing the remaining portions of photoresist on said lower surface to form a selected pattern of selected metallic electrode material on said lower surface substantially vertically aligned with the selected pattern of opaque metallic electrode material on said upper surface.
Claim 3
Dependent Claim 27 words
The method of claim 1 wherein in said step A a selected pattern of metallic electrode material is situated on the upper surface of a PLZT substrate.
Claim 4
Dependent Claim 23 words
The method of claim 1 wherein in said step B the lower surface of said substrate is coated with a negative working photoresist.
Claim 5
Dependent Claim 22 words
The method of claim 1 wherein in said step C the upper surface of said substrate is exposed to collimated ultraviolet light.

References Cited (Backward Citations)

US3240601A Cited
US3313626A Cited
US3447924A Cited
US3760471A Cited
US4254210A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1986-01-31 1986-08-02 1987-02-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1990-01-31 1990-08-02 1991-02-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1994-01-31 1994-08-02 1995-02-01 $7700.00 Window Closed / Lapsed

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