US4370195A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Removal of plasma etching residues
Assignee: RCA Corp
•
Filing: 1982-03-25
•
Granted: 1983-01-25
•
Expires: 2002-03-25
Abstract
Abstract An improvement in the etching of aluminum utilizing a carbon-containing etchant gas is provided whereby the residues remaining after etching are treated in a nitrogen glow discharge for a time effective in removing them or rendering them susceptible to removal by conventional means.
Inventors
- 👤 Bernard Halon
- 👤 John L. Vossen, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:38
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/27; H10P70/273; C; C23; C23F; C23F4/00; Y; Y10; Y10S; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
69 words
In a process of plasma etching aluminum or an alloy thereof with an etchant gas comprised of at least one carbon-containing gas, wherein etching produces residues which are not susceptible to removal by oxygen plasma or organic solvents, the improvement comprising treating said residues with a nitrogen glow discharge for a time effective to remove the residues or render them susceptible to removal by oxygen plasma or organic solvents.
Claim 2
Dependent Claim
69 words
In a process of plasma etching aluminum or an alloy thereof with an etchant gas comprised of at least one carbon-containing gas, wherein etching produces residues which are not susceptible to removal by oxygen plasma or organic solvents, the improvement comprising treating said residues with a nitrogen glow discharge for a time effective to remove the residues or render them susceptible to removal by oxygen plasma or organic solvents.
Claim 3
Dependent Claim
19 words
A process in accordance with claim 1, wherein said etchant gas is a mixture of carbon tetrachloride and helium.
Claim 4
Dependent Claim
19 words
A process in accordance with claim 1, wherein said etchant gas is a mixture of boron trichloride and trichloromethane.
Claim 5
Dependent Claim
20 words
A process in accordance with claim 1, wherein the nitrogen glow discharge is carried out for at least forty minutes.
Claim 6
Dependent Claim
23 words
A process in accordance with claim 4, wherein the nitrogen glow discharge is carried out for from about 40 to about 60 minutes.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-01-24 | 1986-07-26 | 1987-01-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-01-24 | 1990-07-26 | 1991-01-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-01-24 | 1994-07-26 | 1995-01-25 | $7700.00 | Window Closed / Lapsed |