US4367281A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fine fabrication process using radiation sensitive resist
Assignee: Tosoh Corp
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Filing: 1981-08-03
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Granted: 1983-01-04
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Expires: 2001-08-03
Abstract
Abstract A fine work process comprises forming a thin film made of a radiation sensitive polymer on a board; irradiating radiation; developing and etching the product. The radiation sensitive polymer comprises at least 10 wt. % of a polymer having repeat units: ##STR1## wherein R and R' respectively represent hydrogen atom or an alkyl group and n is an integer of number of substituent groups.
Inventors
- 👤 Kimio Shibayama
- 👤 Kingo Itaya
- 👤 Teruo Fujimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:01
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
72 words
In a fine fabrication process comprising forming a thin film made of a radiation sensitive polymer on a substrate; imagewise exposing to radiation; developing and etching the product, an improvement characterized in that said radiation sensitive polymer comprises at least 10 wt. % of a polymer having repeat units: ##STR3## wherein R and R' respectively represent hydrogen atom or an alkyl group and n is an integer of number of substituent groups.
Claim 2
Dependent Claim
72 words
In a fine fabrication process comprising forming a thin film made of a radiation sensitive polymer on a substrate; imagewise exposing to radiation; developing and etching the product, an improvement characterized in that said radiation sensitive polymer comprises at least 10 wt. % of a polymer having repeat units: ##STR3## wherein R and R' respectively represent hydrogen atom or an alkyl group and n is an integer of number of substituent groups.
Claim 3
Dependent Claim
18 words
The fine work process according to claim 1 wherein said radiation sensitive polymer is a polymer of 4-vinylbenzyldimethylamine.
Claim 4
Dependent Claim
27 words
The fine work process according to claim 1 wherein said radiation sensitive polymer is obtained by reacting a polystyrene with a chloromethylating agent followed by reacting dimethylamine.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-01-03 | 1986-07-05 | 1987-01-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-01-03 | 1990-07-05 | 1991-01-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-01-03 | 1994-07-05 | 1995-01-04 | $7700.00 | Window Closed / Lapsed |