US4364413A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Molar gas-flow controller
Assignee: Lam Research Corp
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Filing: 1981-01-07
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Granted: 1982-12-21
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Expires: 2001-01-07
Abstract
Abstract An apparatus for controlling the volume of flow of a gas. A reference volume has an input conduit connected to the source of gas and an output conduit connected to a utilization device. Valves in the input and output conduits are cyclically controlled to permit pressure in the reference volume to reach a high and then to attain a low. The reference volume pressure is measured twice during each cycle to provide voltages representative of the high and low pressures. Circuit means control the time and duration of operation of the valves to cause the difference between the high and low pressures to equal a predetermined value.
Inventors
- 👤 Richard L. Bersin
- 👤 William H. Clouser
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 03:48
CPC Classifications
G; G05; G05D; G05D7/00; G05D7/06; G05D7/0617; G05D7/0629; G05D7/0635; G01; G01F; G01F1/00; G01F1/05; G01F1/34; G01F3/00; G01F3/36; G01F3/38; Y; Y10; Y10T; Y10T137/00; Y10T137/8593; Y10T137/86389; Y10T137/86445; Y10T137/86461
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
168 words
An apparatus for controlling gas flow, comprising in combination, a reference volume having an input conduit and an output conduit, a source of gas connected to said input conduit, first and second normally closed valves disposed in said input and output conduits, respectively, control means for opening and closing said first and second valves to cause the difference between high and low pressures in said reference volume to equal a predetermined value, said control means comprising, transducer means connected to said reference volume and a reference pressure providing an output voltage representative of the pressure in said reference volume, generator means cyclically providing first, second, third and fourth pulses, first means responsive to said first pulse for opening said first valve for the duration of said first pulse, once each cycle, second means responsive to said third pulse for opening said second valve for the duration of said third pulse once each cycle, third means for closing said second valve when said output voltage equals a predetermined value.
Claim 2
Independent Claim
168 words
An apparatus for controlling gas flow, comprising in combination, a reference volume having an input conduit and an output conduit, a source of gas connected to said input conduit, first and second normally closed valves disposed in said input and output conduits, respectively, control means for opening and closing said first and second valves to cause the difference between high and low pressures in said reference volume to equal a predetermined value, said control means comprising, transducer means connected to said reference volume and a reference pressure providing an output voltage representative of the pressure in said reference volume, generator means cyclically providing first, second, third and fourth pulses, first means responsive to said first pulse for opening said first valve for the duration of said first pulse, once each cycle, second means responsive to said third pulse for opening said second valve for the duration of said third pulse once each cycle, third means for closing said second valve when said output voltage equals a predetermined value.
Claim 3
Dependent Claim
19 words
An apparatus according to claim 1 wherein said transducer means includes, a transducer, an amplifier connected to said transducer.
Claim 4
Dependent Claim
50 words
An apparatus according to claim 2 wherein said third means includes, comparator means connected to said circuit means, to said second means and to a setpoint voltage providing an output to said second means to close said second valve when the output voltage from said amplifier equals said setpoint voltage.
Claim 5
Dependent Claim
59 words
An apparatus according to claim 2 including, circuit means connected to said amplifier providing an output voltage representative of the difference ΔP in gas pressure in said reference volume between the high pressure in said reference volume after the occurrence of said first pulse and the low pressure in said reference volume after the occurrence of said third pulse.
Claim 6
Dependent Claim
31 words
An apparatus according to claim 4 wherein said circuit means comprises, sample-and-hold circuit means responsive to said fourth pulse to store a voltage representative of said pressure difference once each cycle.
Claim 7
Dependent Claim
57 words
An apparatus according to claim 5 wherein said circuit means further includes, clamp circuit means connected between said amplifier and said sample-and-hold circuit means responsive to said second pulse to clamp said amplifier voltage to zero volts so that the voltage representative of said pressure difference ΔP is equal to the pressure stored in said sample-and-hold circuit.
Claim 8
Independent Claim
126 words
An apparatus according to claims 3, 5 or 6 wherein said comparator means includes, a difference integrator connected to receive the output of said sample and hold circuit and said setpoint voltage as inputs for adjusting said setpoint voltage to a value to compensate for pressure loss in said reference volume due to inability of said second valve means to close instantaneously, a differential amplifier connected to said second means having an inverting input connected to said clamp circuit means and a non-inverting input connected to the output of said difference integrator for causing said second valve means to close slightly in advance than called for by the non-adjusted setpoint voltage to compensate for pressure loss due to the non-instantaneous closing of said second valve means.
Claim 9
Dependent Claim
46 words
An apparatus according to claim 7 further including, transducer protection means connected between said amplifier and said first and second means to cause said first valve means to open and said second valve means to close when the pressure across said transducer exceeds a predetermined amount.
Claim 10
Dependent Claim
47 words
An apparatus according to claim 8 further including, enable means connected to said first and second means for causing said first and second means to operate normally during the existence of a signal from said enable means and to shut down during the absence of said signal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-12-20 | 1986-06-21 | 1986-12-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-12-20 | 1990-06-21 | 1990-12-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-12-20 | 1994-06-21 | 1994-12-21 | $7700.00 | Window Closed / Lapsed |