US4359282A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical measuring method and apparatus
Assignee: Ampex Corp
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Filing: 1980-11-17
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Granted: 1982-11-16
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Expires: 2000-11-17
Abstract
Abstract A method and apparatus for measuring vertical surface variations of a specimen is disclosed wherein the specimen is mounted in movable relation to an objective lens assembly, a reticule being arranged at a focal plane of the objective lens assembly, movement between the objective assembly and the specimen necessary for maintaining the reticule in focus upon different surface portions of the specimen providing an indication of vertical spacing between the surface portions. Another embodiment of the invention contemplates a three-dimensional reticule arranged at or adjacent a focal plane of an objective lens assembly for simultaneously focusing portions of the reticule upon different surface portions of the specimen, the reticule being adapted to provide an indication that the vertical spacing between the different surface portions of the specimen is within acceptable limits.
Inventors
- 👤 Marvin C. Garrison
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 00:08
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/24; G01B11/02; G01B11/06; G01B11/0608
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
97 words
An optical gauge for determining if vertical surface dimensions of a specimen are within predetermined limits, comprising an objective means, mounting means supported relative to the objective means for mounting the specimen, means for viewing the specimen through the objective means, and three-dimensional reticule means arranged adjacent a focal plane of the objective means for focusing portions of the reticule means upon first and second vertically spaced apart surface portions of the specimen, the three-dimensional reticule means being adapted to provide an indication of vertical spacing between the first and second surface portions being within acceptable limits.
Claim 2
Dependent Claim
97 words
An optical gauge for determining if vertical surface dimensions of a specimen are within predetermined limits, comprising an objective means, mounting means supported relative to the objective means for mounting the specimen, means for viewing the specimen through the objective means, and three-dimensional reticule means arranged adjacent a focal plane of the objective means for focusing portions of the reticule means upon first and second vertically spaced apart surface portions of the specimen, the three-dimensional reticule means being adapted to provide an indication of vertical spacing between the first and second surface portions being within acceptable limits.
Claim 3
Dependent Claim
14 words
The optical gauge of claim 1 further comprising an illuminator for illuminating the specimen.
Claim 4
Dependent Claim
21 words
The optical gauge of claim 2 wherein the reticule means is arranged at a principal focal plane formed within the illuminator.
Claim 5
Dependent Claim
38 words
The optical gauge of claim 3 further comprising beam splitter means arranged intermediate the objective means and the viewing means, the illuminator being a vertical illuminator arranged in optical alignment with the objective means through the beam splitter.
Claim 6
Dependent Claim
24 words
The optical gauge of claim 1 further comprising an illuminator system including a source of filtered, monochromatic or coherent light for illuminating the specimen.
Claim 7
Dependent Claim
38 words
The optical gauge of claim 1 further comprising means for adjusting position of the mounting means relative to the objective means for focusing a selected portion of the three-dimensional reticule means upon a surface portion of the specimen.
Claim 8
Dependent Claim
28 words
The optical gauge of claim 1 wherein the three-dimensional reticule means includes a plurality of two-dimensional portions arranged in spaced-apart relation along the axis of the focal plane.
Claim 9
Dependent Claim
39 words
The optical gauge of claim 1 wherein the three-dimensional reticule means includes a reticule element slanted relative to the focal plane so that different portions of the reticule element are spaced apart along an axis for the focal plane.
Claim 10
Dependent Claim
89 words
In a method for determining if vertical surface dimensions of a specimen are within predetermined limits, the steps comprising mounting a specimen with relation to an objective means including means for viewing surface portions of the specimen, and arranging a three-dimensional reticule adjacent to a focal plane of the objective means for focusing portions of the reticule upon vertically spaced-apart surface portions of the specimen, the three-dimensional reticule being adapted to provide an indication of the vertical spacing between the first and second surface portions being within acceptable limits.
Claim 11
Dependent Claim
89 words
In a method for determining if vertical surface dimensions of a specimen are within predetermined limits, the steps comprising mounting a specimen with relation to an objective means including means for viewing surface portions of the specimen, and arranging a three-dimensional reticule adjacent to a focal plane of the objective means for focusing portions of the reticule upon vertically spaced-apart surface portions of the specimen, the three-dimensional reticule being adapted to provide an indication of the vertical spacing between the first and second surface portions being within acceptable limits.
Claim 12
Dependent Claim
13 words
The method of claim 9 further comprising an illuminator for illuminating the specimen.
Claim 13
Dependent Claim
20 words
The method of claim 10 wherein the reticule means is arranged at a principal focal plane formed within the illuminator.
Claim 14
Dependent Claim
37 words
The method of claim 11 further comprising beam splitter means arranged intermediate the objective means and the viewing means, the illuminator being a vertical illuminator arranged in optical alignment with the objective means through the beam splitter.
Claim 15
Dependent Claim
23 words
The method of claim 9 further comprising an illuminator system including a source of filtered, monochromatic or coherent light for illuminating the specimen.
Claim 16
Dependent Claim
37 words
The method of claim 9 further comprising means for adjusting position of the mounting means relative to the objective means for focusing a selected portion of the three-dimensional reticule means upon a surface portion of the specimen.
Claim 17
Dependent Claim
26 words
The method of claim 9 wherein the three-reticule means includes a plurality of two-dimensional portions arranged in spaced-apart relation along the axis of the focal plane.
Claim 18
Dependent Claim
39 words
The method of claim 9 wherein the three-dimensional reticule means includes a continuous reticule element slanted relative to the focal plane so that different portions of the reticule element are spaced apart along an axis for the focal plane.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-11-15 | 1986-05-17 | 1986-11-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-11-15 | 1990-05-17 | 1990-11-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-11-15 | 1994-05-17 | 1994-11-16 | $7700.00 | Window Closed / Lapsed |