Zinc oxide thin film sensor having improved reducing gas sensitivity

Claim 1

A device for detecting a gaseous reducing species comprising a thin film semiconductor comprising a continuous sputtered zinc oxide material and having a gas-sensing surface comprising discrete microscopic alloy bodies surrounded by the zinc oxide, said film being adapted for measuring the electrical resistance of the zinc oxide across the film, said bodies being composed of an effective palladium and gold alloy for substantially enhancing the sensitivity of the resistance of the zinc oxide to the reducing species.

Claim 2

A device for detecting a gaseous reducing species comprising a thin film semiconductor comprising a continuous sputtered zinc oxide material and having a gas-sensing surface comprising discrete microscopic alloy bodies surrounded by the zinc oxide, said film being adapted for measuring the electrical resistance of the zinc oxide across the film, said bodies being composed of an effective palladium and gold alloy for substantially enhancing the sensitivity of the resistance of the zinc oxide to the reducing species.

Claim 3

A device for sensing a reducing species in a gaseous sample comprising a thin film having a gas-sensing surface and composed of a sputtered oxygen-deficient zinc oxide material, a thin alloy coating on the film surface and consisting of 10 to 90 weight percent gold and the balance palladium, said coating having a thickness between about 15 to 40 A° and comprising microscopic spots separated by exposed zinc oxide in a suitably discontinuous pattern to allow measurement across the film of the electrical resistance of the zinc oxide material, means for maintaining the film at a temperature between 250° and 325° C., and electrode means contacting the film for measuring the electrical resistance across the film, whereby the resistance provides a measure of the reducing gas concentration in the sample.

Claim 4

A device for sensing a reducing species in a gaseous sample comprising a thin film having a gas-sensing surface and composed of a sputtered oxygen-deficient zinc oxide material, a thin alloy coating on the film surface and consisting of 10 to 90 weight percent gold and the balance palladium, said coating having a thickness between about 15 to 40 A° and comprising microscopic spots separated by exposed zinc oxide in a suitably discontinuous pattern to allow measurement across the film of the electrical resistance of the zinc oxide material, means for maintaining the film at a temperature between 250° and 325° C., and electrode means contacting the film for measuring the electrical resistance across the film, whereby the resistance provides a measure of the reducing gas concentration in the sample.

Claim 7

A method for detecting the presence of a reducing species in a gaseous sample comprising measuring the electrical resistance of a thin film semiconductor formed of oxygen-deficient zinc oxide material and having a surface exposed to the sample, said surface also comprising microscopic bodies surrounded by exposed zinc oxide and composed of an effective palladium and gold alloy for sensitizing the resistance of the zinc oxide to the reducing species, said film having a predetermined resistance to a like sample free of reducing species, whereby the presence of reducing species in the sample is indicated by a substantial decrease in the measured resistance below the predetermined value.

Claim 8

A method for detecting the presence of a reducing species in a gaseous sample comprising measuring the electrical resistance of a thin film semiconductor formed of oxygen-deficient zinc oxide material and having a surface exposed to the sample, said surface also comprising microscopic bodies surrounded by exposed zinc oxide and composed of an effective palladium and gold alloy for sensitizing the resistance of the zinc oxide to the reducing species, said film having a predetermined resistance to a like sample free of reducing species, whereby the presence of reducing species in the sample is indicated by a substantial decrease in the measured resistance below the predetermined value.

Claim 9

A method for analyzing a gaseous sample for the presence of a reducing species comprising exposing a surface of a thin film composed of a sputtered and air-heat-treated zinc oxide material to the sample, said surface comprising microscopic palladium-gold alloy spots surrounded by zinc oxide, said alloy comprising between about 30 to 70 weight percent gold and the balance palladium and sensitizing the electrical resistance of the zinc oxide material to the presence of the reducing species, maintaining the film at a temperature between 250° and 325° C., measuring the electrical resistance of the zinc oxide film while exposed to the sample, whereby the measured resistance provides a measure of the reducing species in the sample.

Claim 10

A method for analyzing a gaseous sample for the presence of a reducing species comprising exposing a surface of a thin film composed of a sputtered and air-heat-treated zinc oxide material to the sample, said surface comprising microscopic palladium-gold alloy spots surrounded by zinc oxide, said alloy comprising between about 30 to 70 weight percent gold and the balance palladium and sensitizing the electrical resistance of the zinc oxide material to the presence of the reducing species, maintaining the film at a temperature between 250° and 325° C., measuring the electrical resistance of the zinc oxide film while exposed to the sample, whereby the measured resistance provides a measure of the reducing species in the sample.

Claim 11

A method for analyzing a gaseous sample for a reducing compound selected from the group consisting of hydrogen and alkenes, said method comprising sputtering a zinc oxide material from a zinc oxide target onto an inert substrate to form thereon a continuous thin film that is between about 600 to 10,000 A° thick, flash vapor depositing a palladium-gold alloy onto the zinc oxide film to form a coating between about 15 to 40 A° thick, said coating comprising microscopic alloy spots surrounded by uncoated zinc oxide, said alloy consisting of 30 to 70 weight percent gold and the balance palladium, heat treating the coated film in air for a sufficient time to stabilize the oxygen content of the zinc oxide at an oxygen-to-zinc ratio less than a stoichiometric one, exposing the coated film to said mixture whereupon reducing compound interacts with the alloy and the zinc oxide in a manner that affects the resistance of the zinc oxide film, heating the film to between about 250° and 325° C. while exposed to the sample, measuring the electrical resistance of the zinc oxide material while the film is exposed to the sample, said resistance being measured across a path generally parallel to the coated film surface, and comparing the measured resistance to similar resistance values for known gaseous compositions to determine the concentration of the compound in the mixture.

Claim 12

A method for analyzing a gaseous sample for a reducing compound selected from the group consisting of hydrogen and alkenes, said method comprising sputtering a zinc oxide material from a zinc oxide target onto an inert substrate to form thereon a continuous thin film that is between about 600 to 10,000 A° thick, flash vapor depositing a palladium-gold alloy onto the zinc oxide film to form a coating between about 15 to 40 A° thick, said coating comprising microscopic alloy spots surrounded by uncoated zinc oxide, said alloy consisting of 30 to 70 weight percent gold and the balance palladium, heat treating the coated film in air for a sufficient time to stabilize the oxygen content of the zinc oxide at an oxygen-to-zinc ratio less than a stoichiometric one, exposing the coated film to said mixture whereupon reducing compound interacts with the alloy and the zinc oxide in a manner that affects the resistance of the zinc oxide film, heating the film to between about 250° and 325° C. while exposed to the sample, measuring the electrical resistance of the zinc oxide material while the film is exposed to the sample, said resistance being measured across a path generally parallel to the coated film surface, and comparing the measured resistance to similar resistance values for known gaseous compositions to determine the concentration of the compound in the mixture.