Automatic impedance matching apparatus

Claim 2

Automatic impedance matching apparatus comprising: a matching unit comprising at least two reactors each of which has reactance varying means for varying the reactance thereof; standing wave means for detecting and providing output signals corresponding respectively to the forward wave and to the reflected wave on a transmission line connected to said matching unit; converting means connected to said standing wave means for converting said signals into digital output corresponding to the ratio of the reflected wave to the forward wave; a pair of stepping motors, one motor being connected to the varying means of one of said reactors for controlling the reactance of the latter and the other motor being connected to the varying means of the other of said reactors for varying the reactance of the latter; and control means connected to said motors for selecting a motor to be stepped and for stepping the selected motor in a direction which will change the impedance of said matching unit to a desired value, said control means comprising: comparing means connected to said converting means for comparing the digital output obtained before stepping of a motor with the digital output obtained after the stepping of a motor and for providing an output signal; and selection means connected to said motors and to said comparing means and responsive to said last-mentioned output signal to select a motor to be stepped and for stepping the selected motor in the direction which will change the reactance of the reactor connected to the selected motor to a desired value.

Claim 3

Automatic impedance matching apparatus as set forth in claim 1 wherein said converting means comprises a first converter for providing a first train of pulses corresponding to said forward wave, a second converter for providing a second train of pulses corresponding to said reflected wave, a first counter connected to said first converter for counting the pulses in said first train of pulses, a second counter connected to said second converter for counting the pulses in said second train of pulses and for providing said digital output, and inhibiting means connected to said first counter and to said first and said second converters and operable by said first counter when a predetermined count of pulses is reached to temporarily prevent both converters from providing further trains of pulses whereby the digital output of said second counter represents said ratio of the reflected wave to said forward wave.

Claim 4

Automatic impedance matching apparatus as set forth in claim 2 wherein said comparing means comprises latch means having an input and an output and having its input connected to said second counter for transferring the digital output of said second counter to the output of said latch means and a comparator connected to the input and to the output of said latch means for comparing the digital output of said second counter with the digital output at the output of said latch means and for providing a further digital output dependent upon the comparison of the digital output of said second counter and said digital output at the output of said latch means.

Claim 5

Automatic impedance matching apparatus as set forth in claim 3 wherein said selection means comprises selector means connected to said comparator and responsive to said further digital output for selecting the motor to be stepped and motor direction and stepping means connected to said selector means and responsive to the output of the selector means for stepping the selected motor.

Claim 6

Automatic impedance matching apparatus as set forth in claims 1, 2, 3 or 4 wherein said matching unit has an input and an output and further comprises an inductor and wherein said reactors are variable capacitors, said inductor and one of said capacitors being connected in parallel with said input of said matching unit and the other of said capacitors being connected in series between one end of said inductor and said output of said matching unit.

Claim 7

Radio frequency heating apparatus comprising: a pair of electrodes; a radio frequency generator having an output; a matching unit comprising at least two reactors each of which has reactance varying means for varying the reactance thereof; means connecting said matching unit to said electrodes; means including a transmission line connecting said matching unit to said output of said generator; standing wave means coupled to said transmission line for detecting and providing output signals corresponding respectively to the forward wave and to the reflected wave on said transmission line; converting means connected to said standing wave means for converting said signals into digital output corresponding to the ratio of the reflected wave to the forward wave; a pair of stepping motors, one motor being connected to the varying means of one of said reactors for controlling the reactance of the latter and the other motor being connected to the varying means of the other of said reactors for varying the reactance of the latter; and control means connected to said motors for selecting a motor to be stepped and for stepping the selected motor in a direction which will change the impedance of said matching unit to a desired value, said control means comprising: comparing means connected to said converting means for comparing the digital output obtained before stepping of a motor with the digital output obtained after the stepping of a motor and for providing an output signal; and selection means connected to said motors and to said comparing means and responsive to said last-mentioned output signal to select a motor to be stepped and for stepping the selected motor in the direction which will change the reactance of the reactor connected to the selected motor to a value which will present an impedance to said generator substantially equal to the impedance of said output of said generator.

Claim 8

Radio frequency heating apparatus comprising: a pair of electrodes; a radio frequency generator having an output; a matching unit comprising at least two reactors each of which has reactance varying means for varying the reactance thereof; means connecting said matching unit to said electrodes; means including a transmission line connecting said matching unit to said output of said generator; standing wave means coupled to said transmission line for detecting and providing output signals corresponding respectively to the forward wave and to the reflected wave on said transmission line; converting means connected to said standing wave means for converting said signals into digital output corresponding to the ratio of the reflected wave to the forward wave; a pair of stepping motors, one motor being connected to the varying means of one of said reactors for controlling the reactance of the latter and the other motor being connected to the varying means of the other of said reactors for varying the reactance of the latter; and control means connected to said motors for selecting a motor to be stepped and for stepping the selected motor in a direction which will change the impedance of said matching unit to a desired value, said control means comprising: comparing means connected to said converting means for comparing the digital output obtained before stepping of a motor with the digital output obtained after the stepping of a motor and for providing an output signal; and selection means connected to said motors and to said comparing means and responsive to said last-mentioned output signal to select a motor to be stepped and for stepping the selected motor in the direction which will change the reactance of the reactor connected to the selected motor to a value which will present an impedance to said generator substantially equal to the impedance of said output of said generator.

Claim 9

Radio frequency heating apparatus as set forth in claim 6 wherein said converting means comprises a first converter for providing a first train of pulses corresponding to said forward wave, a second converter for providing a second train of pulses corresponding to said reflected wave, a first counter connected to said first converter for counting the pulses in said first train of pulses, a second counter connected to said second converter for counting the pulses in said second train of pulses and for providing said digital output, and inhibiting means connected to said first counter and to said first and said second converters and operable by said first counter when a predetermined count of pulses is reached to temporarily prevent both converters from providing further trains of pulses whereby the digital output of said second counter represents said ratio of the reflected wave to said forward wave.

Claim 10

Radio frequency heating apparatus as set forth in claim 7 wherein said comparing means comprises latch means having an input and an output and having its input connected to said second counter for transferring the digital output of said second counter to the output of said latch means and a comparator connected to the input and to the output of said latch means for comparing the digital output of said second counter with the digital output at the output of said latch means and for providing a further digital output dependent upon the comparison of the digital output of said second counter and said digital output at the output of said latch means.

Claim 11

Radio frequency heating apparatus as set forth in claim 8 wherein said selection means comprises selector means connected to said comparator and responsive to said further digital output for selecting the motor to be stepped and motor direction and stepping means connected to said selector means and responsive to the output of the selector means for stepping the selected motor.

Claim 12

Radio frequency heating apparatus as set forth in claims 6, 7, 8 or 9 wherein said matching unit has an input connected to said transmission line and an output, said means connecting said matching unit to said electrodes connecting the output of said matching unit to said electrodes, wherein said matching unit further comprises an inductor and wherein said reactors are variable capacitors, said inductor and one of said capacitors being connected in parallel with said input of said matching unit and the other of said capacitors being connected in series between one end of said inductor and said output of said matching unit.