Method for controlling electroless plating bath

Claim 1

A method for controlling the content of an electroless plating bath such that the bath may be used for an extended period of time without remaking, the bath consisting of consumable ingredients including a metal ion and a reducing agent and unconsumable ingredients including a complexing agent, the metal ion being reduced to a metal by the reducing agent, whereby reaction by-products including decomposition products of the reducing agent are produced, the method comprising the steps of: continuously or intermittently measuring the concentration of at least one consumable ingredient in the electroless plating bath; automatically adding to the plating bath a first replenishing composition consisting essentially of the consumable ingredients after detecting that the measured value has reached a predetermined concentration in order to maintain the concentration of the consumable ingredients in the bath at the predetermined concentration; continuously or intermittently measuring at least one of the physical properties of the electroless plating bath including the specific gravity, electrical conductivity and refractive index, to determine the degree of aging of the bath; and automatically discharging a predetermined volume of the plating solution and automatically adding to the plating bath a second replenishing composition containing the unconsumable ingredients in an amount essentially corresponding to the lost amount discharged after detecting that the measured value of the physical property has reached a predetermined value in order to maintain the amount of the reaction by-products in the bath at a predetermined amount without an increasing accumulation of the by-products.

Claim 2

A method for controlling the content of an electroless plating bath such that the bath may be used for an extended period of time without remaking, the bath consisting of consumable ingredients including a metal ion and a reducing agent and unconsumable ingredients including a complexing agent, the metal ion being reduced to a metal by the reducing agent, whereby reaction by-products including decomposition products of the reducing agent are produced, the method comprising the steps of: continuously or intermittently measuring the concentration of at least one consumable ingredient in the electroless plating bath; automatically adding to the plating bath a first replenishing composition consisting essentially of the consumable ingredients after detecting that the measured value has reached a predetermined concentration in order to maintain the concentration of the consumable ingredients in the bath at the predetermined concentration; continuously or intermittently measuring at least one of the physical properties of the electroless plating bath including the specific gravity, electrical conductivity and refractive index, to determine the degree of aging of the bath; and automatically discharging a predetermined volume of the plating solution and automatically adding to the plating bath a second replenishing composition containing the unconsumable ingredients in an amount essentially corresponding to the lost amount discharged after detecting that the measured value of the physical property has reached a predetermined value in order to maintain the amount of the reaction by-products in the bath at a predetermined amount without an increasing accumulation of the by-products.

Claim 6

The method as set forth in claims 1 or 2, wherein the electroless plating bath is selected from the group consisting of electroless nickel plating, electroless cobalt plating, electroless nickel-cobalt alloy plating and electroless copper plating baths.