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US4352784A Expired / Lapsed US ⏱️ 0.0 years remaining

Double crucible Czochralski crystal growth apparatus

Assignee: AT&T Inc
•
Filing: 1979-05-25
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Granted: 1982-10-05
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Expires: 1999-05-25
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Abstract

Abstract An apparatus useful for double crucible Czochralski crystal growth comprises an inner crucible fixed within an outer crucible wherein the inner crucible contains an extra volume or reservoir of semiconductor melt when flow of semiconductor melt from the outer crucible into the inner crucible through means interconnecting the crucibles ceases.

Inventors

  • 👤 Wen Lin

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 19:20
CPC Classifications
C; C30; C30B; C30B15/00; C30B15/10; C30B15/12; Y; Y10; Y10T; Y10T117/00; Y10T117/10; Y10T117/1024; Y10T117/1032; Y10T117/1052

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 76 words
An apparatus for growing a single crystal from a melt comprising an inner crucible and an outer crucible, said inner crucible placed concentrically inside and at least a top portion thereof spaced from the walls of said outer crucible, means for allowing the flow of melt from said outer crucible to said inner crucible, said inner crucible having a reservoir for holding melt in said inner crucible after flow of melt from said outer crucible ceases.
Claim 2
Independent Claim 76 words
An apparatus for growing a single crystal from a melt comprising an inner crucible and an outer crucible, said inner crucible placed concentrically inside and at least a top portion thereof spaced from the walls of said outer crucible, means for allowing the flow of melt from said outer crucible to said inner crucible, said inner crucible having a reservoir for holding melt in said inner crucible after flow of melt from said outer crucible ceases.
Claim 3
Dependent Claim 28 words
The apparatus recited in claim 1 wherein said means for allowing flow of melt from one crucible to the other is an orifice which is capillary in size.
Claim 4
Dependent Claim 12 words
The apparatus recited in claim 1 including means for heating said crucibles.
Claim 5
Dependent Claim 61 words
The apparatus recited in claim 1 wherein said inner crucible extends below the bottom of said outer crucible and wherein said means for providing flow of melt from said outer crucible to said inner crucible is at least one orifice located in the wall of said inner crucible adjacent and above where said wall meets the bottom of said outer crucible.
Claim 6
Independent Claim 135 words
An apparatus for growing single crystals from a melt comprising an inner crucible and an outer crucible, said inner crucible placed essentially concentrically inside said outer crucible and at least a top portion thereof spaced from the walls of said outer crucible, means for allowing the flow of melt from said outer crucible to said inner crucible, said inner crucible having a reservoir for holding melt in said inner crucible after flow of melt from said outer crucible ceases and wherein the lower portion of the wall of said inner crucible extends outwardly to meet the wall of said outer crucible such that the bottom of said outer crucible is formed by said lower portion of the wall of said inner crucible and wherein said inner crucible extends below the bottom of said outer crucible.
Claim 7
Independent Claim 135 words
An apparatus for growing single crystals from a melt comprising an inner crucible and an outer crucible, said inner crucible placed essentially concentrically inside said outer crucible and at least a top portion thereof spaced from the walls of said outer crucible, means for allowing the flow of melt from said outer crucible to said inner crucible, said inner crucible having a reservoir for holding melt in said inner crucible after flow of melt from said outer crucible ceases and wherein the lower portion of the wall of said inner crucible extends outwardly to meet the wall of said outer crucible such that the bottom of said outer crucible is formed by said lower portion of the wall of said inner crucible and wherein said inner crucible extends below the bottom of said outer crucible.

References Cited (Backward Citations)

US3025191A Cited
US2892739A Cited
US3206286A Cited
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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-10-04 1986-04-05 1986-10-05 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-10-04 1990-04-05 1990-10-05 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-10-04 1994-04-05 1994-10-05 $7700.00 Window Closed / Lapsed

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