US4351855A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Noncrucible method of and apparatus for the vapor deposition of material upon a substrate using voltaic arc in vacuum
Assignee: Vapor Technologies Inc
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Filing: 1981-02-24
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Granted: 1982-09-28
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Expires: 2001-02-24
Abstract
Abstract A method of and apparatus for depositing material upon a surface, e.g. to coat the surface or to form compounds containing this material by bonding with the substrate material of the surface, in which an arc is struck between at least one solid electrode and a pool of molten metal to vaporize the molten metal and permit transfer of the metal vapors to the substrate.
Inventors
- 👤 Eduard Pinkhasov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 03:49
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32055; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K3/00; H05K3/38
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
118 words
A method of depositing a material upon a substrate, comprising the steps of: forming a pool of material in a molten state; striking an arc at least in part between said pool and at least one electrode spaced from said pool, thereby vaporizing material from said pool; disposing a substrate in spaced relationship with said arc and in the path of vapor of material formed from said pool to deposit said material from a vapor state on said substrate; and intermittently dipping said electrode into said pool to form a coating of said material on said electrode and vaporizing the coating of said material on said electrode with said arc to form said material in the vapor state.
Claim 2
Independent Claim
118 words
A method of depositing a material upon a substrate, comprising the steps of: forming a pool of material in a molten state; striking an arc at least in part between said pool and at least one electrode spaced from said pool, thereby vaporizing material from said pool; disposing a substrate in spaced relationship with said arc and in the path of vapor of material formed from said pool to deposit said material from a vapor state on said substrate; and intermittently dipping said electrode into said pool to form a coating of said material on said electrode and vaporizing the coating of said material on said electrode with said arc to form said material in the vapor state.
Claim 3
Dependent Claim
25 words
The method defined in claim 1 wherein said pool is formed by melting a body of said material and lies in a concavity formed therein.
Claim 4
Dependent Claim
18 words
The method defined in claim 2 wherein said cavity is formed by melting said body with said arc.
Claim 5
Dependent Claim
24 words
The method defined in claim 1 further comprising evacuating the space between said electrode and said pool and between said arc and said substrate.
Claim 6
Independent Claim
102 words
An apparatus for depositing material upon a substrate, comprising means for holding a pool of molten material to be deposited on said substrate, an electrode spacedly juxtaposed with said pool, a source of electric current connected between said electrode and said pool for striking an arc therebetween, thereby vaporizing material from said pool, and means for positioning a substrate in spaced relationship to said arc whereby vapor of said material is deposited on said substrate, said container being an upwardly open annular crucible and said electrode being a spherical segment disposed above said crucible and striking a traveling arc with said pool.
Claim 7
Independent Claim
102 words
An apparatus for depositing material upon a substrate, comprising means for holding a pool of molten material to be deposited on said substrate, an electrode spacedly juxtaposed with said pool, a source of electric current connected between said electrode and said pool for striking an arc therebetween, thereby vaporizing material from said pool, and means for positioning a substrate in spaced relationship to said arc whereby vapor of said material is deposited on said substrate, said container being an upwardly open annular crucible and said electrode being a spherical segment disposed above said crucible and striking a traveling arc with said pool.
Claim 8
Dependent Claim
24 words
The apparatus defined in claim 5 wherein said container is a concavity formed in a body of said material by melting a portion thereof.
Claim 9
Dependent Claim
61 words
The apparatus defined in claim 5 wherein said electrode and said container are disposed in a portable evacuatable housing formed with a vacuum lock and means for evacuating said housing, an adapter being connectable to said vacuum lock enabling sealing engagement with a substrate to be coated whereby vapor from said housing travels through said adapter to deposit upon said substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-09-27 | 1986-03-29 | 1986-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-09-27 | 1990-03-29 | 1990-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-09-27 | 1994-03-29 | 1994-09-28 | $7700.00 | Window Closed / Lapsed |