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US4347263A
Expired / Lapsed
US
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Method of applying an antireflective and/or dielectric coating
Assignee: BP Solar International LLC
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Filing: 1981-04-24
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Granted: 1982-08-31
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Expires: 2001-04-24
Abstract
Abstract A method of applying an antireflective and/or dielectric coating for solar energy cells by directing from different sources (1) a vapor comprising a metal halide or metal alkoxide and (2) oxygen to the heated surface of a silicon wafer. The metal is deposited on the silicon in the form of an oxide.
Inventors
- 👤 Daniel L. Whitehouse
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:48
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/30; H10F77/306; H10F77/311; H10F77/315; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/405; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
78 words
A method of applying an antireflective coating to the surface of a photovoltaic cell, said surface being adapted to absorb light impinging thereon, comprising heating said surface to a temperature above approximately 325° C., and directing to said surface from separate sources (a) a vapor comprising a metal compound selected from the group consisting of a metal halide or metal alkoxide, and (b) oxygen, so that an antireflective layer of the respective oxide is deposited on said surface.
Claim 2
Independent Claim
78 words
A method of applying an antireflective coating to the surface of a photovoltaic cell, said surface being adapted to absorb light impinging thereon, comprising heating said surface to a temperature above approximately 325° C., and directing to said surface from separate sources (a) a vapor comprising a metal compound selected from the group consisting of a metal halide or metal alkoxide, and (b) oxygen, so that an antireflective layer of the respective oxide is deposited on said surface.
Claim 3
Dependent Claim
16 words
A method as claimed in claim 1, in which said metal compound is a metal halide.
Claim 4
Dependent Claim
32 words
A method as claimed in claim 2, in which said metal halide is selected from the group consisting of tantalum chloride, niobium chloride, titanium tetrachloride, zirconium chloride, yttrium chloride and hafnium chloride.
Claim 5
Dependent Claim
16 words
A method as claimed in claim 1, in which said photovoltaic cell is formed from silicon.
Claim 6
Dependent Claim
26 words
A method as claimed in claim 1, in which said wafer is heated to a temperature in the range of approximately 325° C. to 450° C.
Claim 7
Dependent Claim
19 words
A method as claimed in claim 1, in which the metal compound vapor is mixed with a transport gas.
Claim 8
Dependent Claim
16 words
A method as claimed in claim 6, in which said transport gas is an inert gas.
Claim 9
Dependent Claim
14 words
A method as claimed in claim 7, in which said inert gas is nitrogen.
Claim 10
Dependent Claim
16 words
A method as claimed in claim 6, in which said transport gas is a reducing gas.
Claim 11
Dependent Claim
25 words
A method as claimed in claim 9, in which said reducing gas is selected from the group consisting of forming gas, and methanol and nitrogen.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-08-30 | 1986-03-01 | 1986-08-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-08-30 | 1990-03-01 | 1990-08-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-08-30 | 1994-03-01 | 1994-08-31 | $7700.00 | Window Closed / Lapsed |