Method of constructing a hologram on a photoresist detector

Claim 2

In the method of constructing a surface relief hologram on a positive photoresist detector wherein the detector is selectively altered by exposure to object modified and reference coherent beams that are coherent with each other and which intersect at a finite angle at the detector, and thence the detector is developed by etching to remove altered portions of the photoresist, the improvement wherein the step of exposing the photoresist includes setting the relative intensity of the object modified and reference beams with a significant number of peaks in intensity across the object modified beam at the detector being greater than the reference beam intensity at the location of those peaks, and wherein the step of developing the exposed photoresist includes application of an etching solution thereto for a short time to etch a maximum of 0.7 microns into the photoresist surface, whereby a desired depth of etch of the altered material is accomplished while minimizing undesired etching of unaltered material.

Claim 3

The improved method according to claim 1 wherein the step of exposing the photoresist includes setting substantially equal the average intensities of the object modified and reference beams across at least a portion of the detector.

Claim 4

The improved method according to claim 1 wherein the object modified beam is formed by passing an object coherent beam through a transparency and the intensities of the object beam with the transparency removed and of the reference beam are substantially equal across the detector.

Claim 5

The improved method according to claim 1 wherein the developing step etches a maximum of 0.4 microns.

Claim 6

In the method of constructing a surface relief hologram on a positive photoresist detector wherein the detector is selectively altered by exposure to object modified and reference coherent beams that are coherent with each other and which intersect at a finite angle at the detector, and thence the detector is developed by etching to remove altered portions of the photoresist, the improvement wherein the step of exposing the photoresist includes setting the relative intensity of the object modified and reference beams with a substantial portion of peaks in intensity across the object modified beam at the detector being equal to or greater than the reference beam intensity at the location of those peaks, and wherein the step of developing the exposed photoresist includes application of an etching solution thereto for a short time to etch normal into the photoresist surface a maximum of one-half the distance between two overlaying adjacent regions within the photoresist that received the higher intensity exposure of the pattern of interference between beams, whereby a desired depth of etch of the altered material is accomplished while minimizing undesired etching of unaltered material.

Claim 7

In the method of constructing a surface relief hologram on a positive photoresist detector wherein the detector is selectively altered by exposure to object modified and reference coherent beams that are coherent with each other and which intersect at a finite angle at the detector, and thence the detector is developed by etching to remove altered portions of the photoresist, the improvement wherein the step of exposing the photoresist includes setting the relative intensity of the object modified and reference beams with a substantial portion of peaks in intensity across the object modified beam at the detector being equal to or greater than the reference beam intensity at the location of those peaks, and wherein the step of developing the exposed photoresist includes application of an etching solution thereto for a short time to etch normal into the photoresist surface a maximum of one-half the distance between two overlaying adjacent regions within the photoresist that received the higher intensity exposure of the pattern of interference between beams, whereby a desired depth of etch of the altered material is accomplished while minimizing undesired etching of unaltered material.

Claim 8

In the method of constructing a surface relief hologram on a positive photoresist detector wherein the detector is selectively altered by exposure to object modified and reference coherent beams that are coherent with each other and which intersect at a finite angle at the detector, the object modified beam varying in intensity thereacross according to the characteristics of an object therein, and thence the detector is developed by etching to remove altered portions of the photoresist, the improvement wherein the step of exposing the photoresist includes setting the relative intensity of the object modified and reference beams with one or more peaks in intensity across the object modified beam at the detector being significantly greater than the reference beam intensity at the location of said peak, and further wherein the step of developing the exposed photoresist detector includes application of an etching solution thereto for a short time to etch a maximum of substantially 0.7 microns into the photoresist surface.

Claim 9

In the method of constructing a surface relief hologram on a positive photoresist detector wherein the detector is selectively altered by exposure to object modified and reference coherent beams that are coherent with each other and which intersect at a finite angle at the detector, the object modified beam varying in intensity thereacross according to the characteristics of an object therein, and thence the detector is developed by etching to remove altered portions of the photoresist, the improvement wherein the step of exposing the photoresist includes setting the relative intensity of the object modified and reference beams with one or more peaks in intensity across the object modified beam at the detector being significantly greater than the reference beam intensity at the location of said peak, and further wherein the step of developing the exposed photoresist detector includes application of an etching solution thereto for a short time to etch a maximum of substantially 0.7 microns into the photoresist surface.

Claim 10

The improved method according to claim 6 wherein the step of exposing the photoresist includes setting substantially equal the average intensities of the object modified and reference beams across at least a portion of the detector.

Claim 11

The improved method according to claim 6 wherein the object modified beam is formed by passing an object coherent beam through an object transparency and the intensities of the object beam with the transparency removed and of the reference beam are substantially equal across the detector.

Claim 12

The improved method according to any of claims 6 through 8, inclusive, wherein the step of exposing the photoresist detector to the coherent object modified and reference beams comprises maintaining such exposure as long as it is possible to maintain a mechanical vibration-free environment, whereby said photoresist is caused to have an increased differential solubility and thus requires a reduced amount of etching action to form the desired surface relief pattern.

Claim 13

The improved method according to any of claims 6 through 8, inclusive, wherein the developing step etches a maximum of 0.1 microns into the original unexposed photoresist surface.

Claim 14

The improved method according to any of claims 6 through 8, inclusive, wherein any processing of the photoresist hologram subsequent to etching avoids baking the photoresist hologram.