US4340968A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rare-gas hydrogen-halide excimer laser with hydrogen additive
Assignee: National Research Council Canada
•
Filing: 1980-06-09
•
Granted: 1982-07-20
•
Expires: 2000-06-09
Abstract
Abstract A rare-gas hydrogen-halide laser is improved by including or adding a predetermined quantity of a hydrogen donor additive to its gas mixture. The closed-off operation lifetime of lasers such as XeCl, KrCl, or XeBr are tripled by adding up to 0.05% hydrogen to the laser gas mixture.
Inventors
- 👤 Clive Willis
- 👤 Terrence J. McKee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 06:25
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
21 words
In a rare-gas hydrogen-halide excimer laser the gas mixture including: two rare gases, a hydrogen halide, and a hydrogen donor additive.
Claim 2
Dependent Claim
21 words
In a rare-gas hydrogen-halide excimer laser the gas mixture including: two rare gases, a hydrogen halide, and a hydrogen donor additive.
Claim 3
Dependent Claim
23 words
A gas mixture as claimed in claim 1 wherein the quantity of hydrogen donor additive is in the order of up to 0.05%.
Claim 4
Dependent Claim
16 words
A gas mixture as claimed in claim 1 or 2 wherein the hydrgen halide is HCl.
Claim 5
Dependent Claim
23 words
A gas mixture as claimed in claim 1 or 2 wherein the hydrogen halide is HCl and the hydrogen donor additive is hydrogen.
Claim 6
Dependent Claim
30 words
A gas mixture as claimed in claim 1 or 2 wherein one rare gas is helium, the other rare gas is Xe or Kr and the hydrogen halide is HCl.
Claim 7
Dependent Claim
37 words
A gas mixture as claimed in claim 1 or 2 wherein one rare gas is He, the other rare gas is Xe or Kr and the hydrogen halide is HCl, and the hydrogen donor additive is hydrogen.
Claim 8
Dependent Claim
17 words
A gas mixture as claimed in claim 1 or 2 wherein the hydrogen donor additive is hydrogen.
Claim 9
Dependent Claim
27 words
A gas mixture as claimed in claim 1 wherein the gas mixture is Xe/HCl/He/H 2 in a ratio in the order of 22 torr/1.8 torr/2200 torr/1 torr.
Claim 10
Dependent Claim
27 words
A gas mixture as claimed in claim 1 wherein the gas mixture is Kr/HCl/He/H 2 in a ratio in the order of 110 torr/1.8 torr/2150 torr/0.4 torr.
Claim 11
Independent Claim
29 words
A method of extending the operating lifetime of the gas mixture is a rare-gas hydrogen-halide excimer laser comprising: adding a hydrogen donor additive to the excimer laser gas mixture.
Claim 12
Independent Claim
29 words
A method of extending the operating lifetime of the gas mixture is a rare-gas hydrogen-halide excimer laser comprising: adding a hydrogen donor additive to the excimer laser gas mixture.
Claim 13
Independent Claim
31 words
A method of extending the operating lifetime of the gas mixture in an excimer laser having a gas mixture of Xe/HCl/He comprising: adding a hydrogen donor additive to the gas mixture.
Claim 14
Independent Claim
31 words
A method of extending the operating lifetime of the gas mixture in an excimer laser having a gas mixture of Xe/HCl/He comprising: adding a hydrogen donor additive to the gas mixture.
Claim 15
Independent Claim
30 words
A method of extending the operating lifetime of the gas mixture in an excimer laser having a gas mixture of Kr/HCl/He comprising adding hydrogen donor additive to the gas mixture.
Claim 16
Independent Claim
30 words
A method of extending the operating lifetime of the gas mixture in an excimer laser having a gas mixture of Kr/HCl/He comprising adding hydrogen donor additive to the gas mixture.
Claim 17
Independent Claim
17 words
A method as claimed in claims 10, 11 or 12 wherein the hydrogen donor additive is hydrogen.
Claim 18
Independent Claim
25 words
A method as claimed in claims 10, 11 or 12 wherein the hydrogen donor additive is hydrogen in a quantity in the order of 0.05%.
Claim 19
Dependent Claim
42 words
A rare-gas hydrogen-halide excimer laser the improvement comprising: a gas mixture including two rare gases, a hydrogen halide, and a hydrogen donor additive in a resonant cavity; means for preionizing the gas mixture; and discharge electrode means for exciting the gas mixture.
Claim 20
Dependent Claim
42 words
A rare-gas hydrogen-halide excimer laser the improvement comprising: a gas mixture including two rare gases, a hydrogen halide, and a hydrogen donor additive in a resonant cavity; means for preionizing the gas mixture; and discharge electrode means for exciting the gas mixture.
Claim 21
Dependent Claim
17 words
A rare-gas hydrogen-halide excimer laser as claimed in claim 15 wherein the hydrogen donor additive is hydrogen.
Claim 22
Dependent Claim
16 words
A rare-gas hydrogen-halide excimer laser as claimed in claim 16 wherein the hydrogen halide is HCl.
Claim 23
Dependent Claim
33 words
A rare-gas hydrogen-halide excimer laser as claimed in claim 17 wherein one of the rare gases is He and the other rare gas is selected from the group consisting of Xe or Kr.
Claim 24
Dependent Claim
30 words
A rare-gas hydrogen-halide excimer laser as claimed in claims 16, 17 or 18 wherein the quantity of hydrogen is in the order of up to 0.05% of the gas mixture.
Claim 25
Dependent Claim
27 words
A rare-gas hydrogen-halide excimer laser as claimed in claims 17 or 18 wherein the quantity of hydrogen is less than half the quantity of the hydrogen halide.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-07-19 | 1986-01-18 | 1986-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-07-19 | 1990-01-18 | 1990-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-07-19 | 1994-01-18 | 1994-07-20 | $7700.00 | Window Closed / Lapsed |