US4338392A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Class of E-beam resists based on conducting organic charge transfer salts
Assignee: International Business Machines Corp
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Filing: 1981-07-28
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Granted: 1982-07-06
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Expires: 2001-07-28
Abstract
Abstract Novel E-beam resists and process for their use are described. These resists are conducting organic charge transfer salts. Films of these materials can be deposited by solvent casting or by sublimation. The deposited film can be made to produce a positive or negative resist image depending on the E-beam energy and exposure time. Exposure of this material to an E-beam produces patterns having differential electrical, optical and solvation properties.
Inventors
- 👤 Edward M. Engler
- 👤 John D. Kuptsis
- 👤 Robert G. Schad
- 👤 Yaffa Tomkiewicz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 07:03
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0045; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
84 words
An electron sensitive resist comprising a uniform sublimed solid film of a conducting organic charge transfer material selected from the group consisting of neutral halogen salts of each of the following donors; tetrathiafulvalene and its alkyl derivatives, tetraselenafulvalene and its alkyl derivatives, tetraheterotetracenes having the general structural formula: ##STR9## where X is S and/or Se; tetraheteronaphthalenes having the general structural formula: ##STR10## where X is S and/or Se; perylene, tetramethylphenylenediamines, phthalocyanines and porphyrins and wherein said halogen is selected from chlorine, bromine and iodine.
Claim 2
Dependent Claim
84 words
An electron sensitive resist comprising a uniform sublimed solid film of a conducting organic charge transfer material selected from the group consisting of neutral halogen salts of each of the following donors; tetrathiafulvalene and its alkyl derivatives, tetraselenafulvalene and its alkyl derivatives, tetraheterotetracenes having the general structural formula: ##STR9## where X is S and/or Se; tetraheteronaphthalenes having the general structural formula: ##STR10## where X is S and/or Se; perylene, tetramethylphenylenediamines, phthalocyanines and porphyrins and wherein said halogen is selected from chlorine, bromine and iodine.
Claim 3
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetrathiafulvalene.
Claim 4
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetraselenafulvalene.
Claim 5
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetrathiatetracene.
Claim 6
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of diselenadithiafulvalene.
Claim 7
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of dimethyltetrathiafulvalene.
Claim 8
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of dimethyltetraselenafulvalene.
Claim 9
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of dimethyldiselenadithiafulvalene.
Claim 10
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetramethyltetrathiafulvalene.
Claim 11
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetramethyltetraselenafulvalene.
Claim 12
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetramethyldiselenadithiafulvalene.
Claim 13
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of hexamethylenetetrathiafulvalene.
Claim 14
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of hexamethylenetetraselenafulvalene.
Claim 15
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of hexamethylenediselenadithiafulvalene.
Claim 16
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetrathianaphthalene.
Claim 17
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetraselenanaphthalene.
Claim 18
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetrathiatetracene.
Claim 19
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetraselenatetracene.
Claim 20
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of perylene.
Claim 21
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of tetramethylphenylenediamine.
Claim 22
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of phthalocyanine.
Claim 23
Dependent Claim
22 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of nickel phthalocyanine.
Claim 24
Dependent Claim
22 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of copper phthalocyanine.
Claim 25
Dependent Claim
22 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of cobalt phathalocyanine.
Claim 26
Dependent Claim
22 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of iron phthalocyanine.
Claim 27
Dependent Claim
21 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of octamethyltetrabenzporphyrins.
Claim 28
Dependent Claim
22 words
An electron sensitive resist according to claim 1 wherein said conducting organic charge transfer material is a halogen salt of nickel octamethyltetrabenzporphyrins.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-07-05 | 1986-01-04 | 1986-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-07-05 | 1990-01-04 | 1990-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-07-05 | 1994-01-04 | 1994-07-06 | $7700.00 | Window Closed / Lapsed |