US4336114A
Expired / Lapsed
US
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Electrodeposition of bright copper
Assignee: Occidental Chemical Corp
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Filing: 1981-03-26
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Granted: 1982-06-22
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Expires: 2001-03-26
Abstract
Abstract A composition and method for electrodepositing ductile, bright, level copper deposits from an aqueous acidic copper plating electrolyte particularly suited for plating electronic circuit boards containing a brightening and leveling amount of a brightening and leveling system comprising (a) a bath soluble substituted phthalocyanine radical, (b) a bath soluble adduct of a tertiary alkyl amine with polyepichlorohydrin, (c) a bath soluble organic divalent sulfur compound, and (d) a bath soluble reaction product of polyethyleneimine and an alkylating agent which will alkylate the nitrogen on the polyethyleneimine to produce a quaternary nitrogen. The electrolyte optionally also contains bath soluble polyether compounds as a supplemental brightening agent.
Inventors
- 👤 Linda J. Mayer
- 👤 Stephen C. Barbieri
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 21:29
CPC Classifications
C; C25; C25D; C25D3/00; C25D3/02; C25D3/38
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
132 words
In an aqueous acidic electrolyte containing copper in an amount sufficient to electrodeposit copper on a substrate, the improvement comprising incorporating in the electrolyte a brightening and leveling system in an amount sufficient to produce a bright and level copper deposit comprising a mixture of: (a) A bath soluble substituted phthalocyanine radical, (b) A bath soluble adduct of a tertiary alkyl amine with polyepichlorohydrin, (c) a bath soluble organic divalent sulfur compound, and (d) a bath soluble reaction product of polyethyleneimine and an alkylating agent which will alkylate the nitrogen on the polyethyleneimine to produce a quaternary nitrogen and wherein said alkylating agent is selected from the group consisting of benzyl chloride, allyl bromide, propane sultone, dimethyl sulfate and wherein the reaction temperature ranges from about room temperature to about 120° C.
Claim 2
Dependent Claim
132 words
In an aqueous acidic electrolyte containing copper in an amount sufficient to electrodeposit copper on a substrate, the improvement comprising incorporating in the electrolyte a brightening and leveling system in an amount sufficient to produce a bright and level copper deposit comprising a mixture of: (a) A bath soluble substituted phthalocyanine radical, (b) A bath soluble adduct of a tertiary alkyl amine with polyepichlorohydrin, (c) a bath soluble organic divalent sulfur compound, and (d) a bath soluble reaction product of polyethyleneimine and an alkylating agent which will alkylate the nitrogen on the polyethyleneimine to produce a quaternary nitrogen and wherein said alkylating agent is selected from the group consisting of benzyl chloride, allyl bromide, propane sultone, dimethyl sulfate and wherein the reaction temperature ranges from about room temperature to about 120° C.
Claim 3
Dependent Claim
26 words
The electrolyte as defined in claim 1 in which said brightening and leveling system further includes: (e) a bath soluble polyether compound as a supplemental brightener.
Claim 4
Dependent Claim
20 words
The electrolyte as defined in claim 2 in which (e) is present in an amount up to about 5 g/l.
Claim 5
Dependent Claim
22 words
The electrolyte as defined in claim 2 in which (e) is present in an amount of about 10 to about 40 mg/l.
Claim 6
Dependent Claim
149 words
The electrolyte as defined in claim 1 in which (a) corresponds to the structural formula: Pc--(X).sub.n Wherein: Pc is a phthalocyanine radical; X is --SO 2 NR 2 , --SO 3 M, --CH 2 SC(NR 2 ) 2 + Y - ; R is H, alkyl containing 1-6 carbon atoms, aryl containing 6 carbon atoms, aralkyl containing 6 carbon atoms in the aryl portion and 1 to 6 carbon atoms in the alkyl portion, heterocyclic containing 2 to 5 carbon atoms and at least 1 nitrogen, oxygen, sulfur or phosphorus atom, and alkyl, aryl, aralkyl and heterocyclic, as defined above, containing 1 to 5 amino, hyroxy, sulfonic or phosphonic groups; n is 1-6; Y is halogen or alkyl sulfate containing 1 to 4 carbon atoms in the alkyl portion; and M is H, Li, Na, K or Mg; said compound having a bath solubility of at least 0.1 mg/l.
Claim 7
Dependent Claim
14 words
The electrolyte as defined in claim 1 in which (a) is a metal-free radical.
Claim 8
Dependent Claim
16 words
The electrolyte as defined in claim 1 in which (a) is a stable metal-containing phthalocyanine radical.
Claim 9
Dependent Claim
30 words
The electrolyte as defined in claim 7 in which (a) contains a divalent or trivalent metal selected from the group consisting of cobalt, nickel, chromium, iron, copper and mixtures thereof,
Claim 10
Dependent Claim
14 words
The electrolyte as defined in claim 7 in which (a) contains the metal copper.
Claim 11
Dependent Claim
23 words
The electrolyte as defined in claim 1 in which (a) is present in an amount of about 0.1 mg/l to about 10 g/l.
Claim 12
Dependent Claim
22 words
The electrolyte as defined in claim 1 in which (a) is present in an amount of about 2 to about 60 mg/l.
Claim 13
Dependent Claim
51 words
The electrolyte as defined in claim 1 in which (b) corresponds to the structural formula: ##STR7## Wherein: R is the same or different and is methyl or ethyl, A and B are integers whose sum is an integer of from 4 to about 500, and A:B is at least about 1:5.
Claim 14
Dependent Claim
22 words
The electrolyte as defined in claim 1 in which (b) is present in an amount of about 0.6 to about 1000 mg/l.
Claim 15
Dependent Claim
22 words
The electrolyte as defined in claim 1 in which (b) is present in an amount of about 3 to about 12 mg/l.
Claim 16
Dependent Claim
15 words
The electrolyte as defined in claim 1 in which (c) is an organic polysulfide compound.
Claim 17
Dependent Claim
65 words
The electrolyte as defined in claim 15 in which (c) corresponds to the structural formula: XR.sub.1 --(S).sub.n R.sub.2 SO.sub.3 H, or XR.sub.1 (S).sub.n R.sub.2 PO.sub.3 H Wherein: R 1 and R 2 are the same or different alkylene group containing from 1 to 6 carbon atoms, X is H, SO 3 H or PO 3 H, and n is an integer from 2 to 5.
Claim 18
Dependent Claim
22 words
The electrolyte as defined in claim 1 in which (c) is present in an amount of about 0.0005 to about 1 g/l.
Claim 19
Dependent Claim
22 words
The electrolyte as defined in claim 1 in which (c) is present in an amount of about 15 to about 60 mg/l.
Claim 20
Dependent Claim
12 words
The electrolyte as defined in claim 1 in which (d) is polybenzylethyleneimine.
Claim 21
Dependent Claim
22 words
The electrolyte as defined in claim 1 in which (d) is present in an amount of about 0.1 to about 50 mg/l.
Claim 22
Dependent Claim
22 words
The electrolyte as defined in claim 1 in which (d) is present in an amount of about 0.75 to about 3 mg/l.
Claim 23
Dependent Claim
62 words
A method for electrodepositing a bright copper plating on a substrate which comprises the steps of electrodepositing copper from an aqueous acidic electrolyte at a temperature of about 15° to about 50° C. of a composition as defined in claim 1, 2, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 3 or 4.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-06-21 | 1985-12-21 | 1986-06-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-06-21 | 1989-12-21 | 1990-06-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-06-21 | 1993-12-21 | 1994-06-22 | $7700.00 | Window Closed / Lapsed |