US4331506A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing target of image pickup tube
Assignee: Hitachi Ltd
•
Filing: 1980-12-02
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Granted: 1982-05-25
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Expires: 2000-12-02
Abstract
Abstract A method of manufacturing a target of an image pickup tube comprising the steps of: forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate; forming a first layer on at least a portion constituting an image area of the image pickup tube, said first layer being substantially insoluble in etching liquid used for etching an insulating layer to constitute an intermediate layer insulator in a double layered interconnection structure; forming, after formation of said first layer, an insulating layer to constitute said intermediate-layer insulator; removing a predetermined portion of said insulating layer, removing said first layer together with said insulating layer located thereon; forming bus bars; and forming a photoconductive layer on said plurality of groups of the transparent conductive signal electrodes. This invention provides an excellent method for mass production.
Inventors
- 👤 Akira Sasano
- 👤 Toshio Nakano
- 👤 Ken Tsutsui
- 👤 Chushiro Kusano
- 👤 Tadaaki Hirai
- 👤 Eiichi Maruyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 13:33
CPC Classifications
H; H01; H01J; H01J31/00; H01J31/08; H01J31/26; H01J31/46; H01J9/00; H01J9/20; H01J9/233
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
200 words
A method of manufacturing a target of an image pickup tube comprising the steps of: (a) forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate including the image area thereof, (b) forming a protective layer on substantially said image area of said base plate, said protective layer being substantially unsoluble in an etching liquid by which a portion of an insulating layer constituting an intermediate layer of insulation may be etched away, (c) forming said insulating layer constituting said intermediate layer of insulation on the protective layer and on at least the portion of the signal electrodes serving as connection part between the signal electrodes and a location at which bus bars are to be applied, said layer being selectively removed from said image area by the etching liquid, (d) removing said protective layer, (e) mounting bus bars each electrically connected to corresponding transparent conductive signal electrodes via said connecting part and insulated from the remaining transparent conductive signal electrodes by an interposed intermediate isolation layer formed in said step (c), and (f) forming a photoconductive layer on at least a plurality of groups of transparent conductive signal electrodes in said image area.
Claim 2
Independent Claim
200 words
A method of manufacturing a target of an image pickup tube comprising the steps of: (a) forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate including the image area thereof, (b) forming a protective layer on substantially said image area of said base plate, said protective layer being substantially unsoluble in an etching liquid by which a portion of an insulating layer constituting an intermediate layer of insulation may be etched away, (c) forming said insulating layer constituting said intermediate layer of insulation on the protective layer and on at least the portion of the signal electrodes serving as connection part between the signal electrodes and a location at which bus bars are to be applied, said layer being selectively removed from said image area by the etching liquid, (d) removing said protective layer, (e) mounting bus bars each electrically connected to corresponding transparent conductive signal electrodes via said connecting part and insulated from the remaining transparent conductive signal electrodes by an interposed intermediate isolation layer formed in said step (c), and (f) forming a photoconductive layer on at least a plurality of groups of transparent conductive signal electrodes in said image area.
Claim 3
Dependent Claim
34 words
A method of claim 1, characterized in that after the method step (e) color filters are provided on a face of said transparent insulating base plate which does not have any bus bars thereon.
Claim 4
Dependent Claim
46 words
A method of claim 1, characterized in that subsequent to method step (e) a leak resistive layer is formed over said plurality of groups of the transparent conductive signal electrodes and that in method step (f) the photoconductive layer is produced on said leak resistive layer.
Claim 5
Dependent Claim
68 words
A method of claim 1, characterized in that after the method step (e) color filters are provided on a face of said transparent insulating base plate which does not have any bus bars thereon, and a leak resistive layer is formed over said plurality of groups of the transparent conductive signal electrodes and that in method step (f) the photoconductive layer is produced on said leak resistive layer.
Claim 6
Dependent Claim
26 words
A method according to claim 1, 2, 3 or 4, wherein said layer formed in step (b) consists of a layer of organic high molecular resin.
Claim 7
Dependent Claim
25 words
A method according to claim 1, 2, 3 or 4, wherein said layer formed in step (b) consists of a metal layer deposited by evaporation.
References Cited (Backward Citations)
US4107568A
Cited
US3986069A
Cited
JPS5124671A
Cited
US3997810A
Cited
US4251909A
Cited
US4181755A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-05-24 | 1985-11-23 | 1986-05-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-05-24 | 1989-11-23 | 1990-05-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-05-24 | 1993-11-23 | 1994-05-25 | $7700.00 | Window Closed / Lapsed |