US4320936A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Far ultraviolet dielectric multilayer film
Assignee: Canon Inc
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Filing: 1979-09-26
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Granted: 1982-03-23
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Expires: 1999-09-26
Abstract
Abstract A far ultraviolet dielectric multilayer film is disclosed which is composed of a first group of films on a substrate and a second group of films overlaid on the first group of films. The first group of films comprises alternate layers of a high refractive index dielectric which absorbs rays in the ultraviolet region and a low refractive index dielectric. The second group of films comprises alternate layers of an intermediate refractive index dielectric which does not absorb rays in ultraviolet region and a low refractive index dielectric.
Inventors
- 👤 Mitsuharu Sawamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 01:42
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70575; G02; G02B; G02B5/00; G02B5/08; G02B5/0816; G02B5/0825; G02B5/0833; G02B5/0891; G02B5/20; G02B5/28; G02B5/283; G03F7/20; G03F7/2002; G03F7/2008
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
124 words
An ultraviolet multilayer film which reflects beams of light in the far ultraviolet region but transmits beams of light in other wavelength regions, said ultraviolet multilayer film comprising: a substrate; a first group of thin films provided on said substrate and comprising alternate layers of high refractive dielectric having a refractive index not less than 1.9 and low refractive dielectric having a refractive index not more than 1.5; and a second group of thin films provided on said first group of thin films and comprising alternate layers of intermediate refractive dielectric having a refractive index between 1.5 and 1.9 and low refractive dielectric having a refractive index not more than 1.5; said refractive indices being determined in the wave length region of 200-300 nm.
Claim 2
Dependent Claim
124 words
An ultraviolet multilayer film which reflects beams of light in the far ultraviolet region but transmits beams of light in other wavelength regions, said ultraviolet multilayer film comprising: a substrate; a first group of thin films provided on said substrate and comprising alternate layers of high refractive dielectric having a refractive index not less than 1.9 and low refractive dielectric having a refractive index not more than 1.5; and a second group of thin films provided on said first group of thin films and comprising alternate layers of intermediate refractive dielectric having a refractive index between 1.5 and 1.9 and low refractive dielectric having a refractive index not more than 1.5; said refractive indices being determined in the wave length region of 200-300 nm.
Claim 3
Dependent Claim
66 words
An ultraviolet multilayer film according to claim 1, wherein the layer in said first group of thin films which is in contact with said substrate is one of said high refractive dielectric layers, the number of layers of said first group is even, and the layer in said second group which is in contact with said first group is one of said intermediate refractive dielectric layers.
Claim 4
Dependent Claim
24 words
An ultraviolet multilayer film according to claim 2, wherein the endmost layer in said second group is one of said intermediate refractive dielectric layers.
Claim 5
Dependent Claim
67 words
An ultraviolet multilayer film according to claim 1, wherein the layer in said first group of thin films which is in contact with said substrate is one of said high refractive dielectric layers, wherein the number of layers of said first group is odd, and the layer in said second group which is in contact with said first group is one of said low refractive dielectric layers.
Claim 6
Dependent Claim
67 words
An ultraviolet multilayer film according to claim 1, wherein the layer in said first group of thin films which is in contact with said substrate is one of said high refractive dielectric layers, wherein the number of layers of said first group is odd, and the layer in said second group which is in contact with said first group is one of said intermediate refractive dielectric layers.
References Cited (Backward Citations)
US3247392A
Cited
US3853386A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-03-22 | 1985-09-21 | 1986-03-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-03-22 | 1989-09-21 | 1990-03-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-03-22 | 1993-09-21 | 1994-03-23 | $7700.00 | Window Closed / Lapsed |