US4306351A
Expired / Lapsed
US
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Method for producing a semiconductor laser element
Assignee: Fujitsu Ltd
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Filing: 1980-09-10
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Granted: 1981-12-22
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Expires: 2000-09-10
Abstract
Abstract A method for producing semiconductor laser elements from a wafer wherein the wafer is prepared having light emitting regions and then the wafer is scribed and cracked in order to form the semiconductor elements. The scribing is executed on a major surface of the wafer in such a way that scratches are formed along a separation line only on the surface of a crystal substrate of the wafer but not on the substrate over the formed light emitting regions. The cleaved surface developed by the cracking step is very flat in an area where the light emitting region is exposed to provide a mirror surface that forms a laser resonator. Desirably, the major surface of the wafer is covered with a protective film on at least the part of the surface over the light emitting region, prior to performing the scribe step. More desirably, this protective film consists of an electrode metal, such as Au or a resin, such as a photoresist material. The scribing is executed wherein scratches are not formed on the crystal substrate surface under the region that is covered with the protection film. This method effectively realizes the cleavage process and results in excellent reproducibility of the physical dimensions of the laser element, while obtaining highly satisfactory characteristics of a laser resonator.
Inventors
- 👤 Sigeo Ohsaka
- 👤 Kanji Fujiwara
- 👤 Takao Fujiwara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 14:57
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/8215; H01; H01S; H01S5/00; H01S5/02; H01S5/0201; H10H20/01; H10H20/011; H10H20/013; H10P; H10P52/00; H10P54/00
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
115 words
A method for producing a semiconductor laser element comprising a crystalline semiconductor body, a light emitting region in said semiconductor body and a pair of mirror surfaces of said body for forming a laser resonator, the method comprising the steps of: preparing a semiconductor wafer from which a plurality of said laser elements are to be produced, the wafer having a plurality of said light emitting regions, forming scratches on a surface of said wafer along a plurality of lines where the wafer is to be separated except on a region of the wafer surface located above the light emitting regions, and cracking said wafer along said scratches to separate the wafer along said lines.
Claim 2
Independent Claim
115 words
A method for producing a semiconductor laser element comprising a crystalline semiconductor body, a light emitting region in said semiconductor body and a pair of mirror surfaces of said body for forming a laser resonator, the method comprising the steps of: preparing a semiconductor wafer from which a plurality of said laser elements are to be produced, the wafer having a plurality of said light emitting regions, forming scratches on a surface of said wafer along a plurality of lines where the wafer is to be separated except on a region of the wafer surface located above the light emitting regions, and cracking said wafer along said scratches to separate the wafer along said lines.
Claim 3
Independent Claim
132 words
A method for producing a semiconductor laser element comprising a semiconductor body, a light emitting region in said semiconductor body and a mirror surface of said body for forming a laser resonator, the method comprising the steps of: preparing a semiconductor wafer from which said semiconductor laser element is to be produced, the wafer having said light emitting region therein, providing on said wafer a protective film covering a surface of said wafer at a region above said light emitting region and exposing a part of the surface of said wafer, scribing on said wafer to form scratches on said exposed part of the surface of said wafer along a line where the wafer is to be separated, and cracking said wafer along said scratches to separate the wafer along said line.
Claim 4
Independent Claim
132 words
A method for producing a semiconductor laser element comprising a semiconductor body, a light emitting region in said semiconductor body and a mirror surface of said body for forming a laser resonator, the method comprising the steps of: preparing a semiconductor wafer from which said semiconductor laser element is to be produced, the wafer having said light emitting region therein, providing on said wafer a protective film covering a surface of said wafer at a region above said light emitting region and exposing a part of the surface of said wafer, scribing on said wafer to form scratches on said exposed part of the surface of said wafer along a line where the wafer is to be separated, and cracking said wafer along said scratches to separate the wafer along said line.
Claim 5
Dependent Claim
14 words
The method as defined in claim 2, wherein said protective film comprises a metal.
Claim 6
Dependent Claim
13 words
The method as defined in claim 3, wherein said protective film comprises gold.
Claim 7
Dependent Claim
14 words
The method as defined in claim 2, wherein said protective film comprises a resin.
Claim 8
Dependent Claim
14 words
The method as defined in claim 5, wherein said protective film comprises a photoresist.
Claim 9
Independent Claim
158 words
A method for producing semiconductor laser elements, each element comprising a crystalline semiconductor body, a light emitting region having a stripe shape defined in said semiconductor body and a pair of mirror surfaces of said semiconductor body for forming a laser resonator for the element, the method comprising the steps of: preparing a semiconductor wafer from which a plurality of said laser elements are to be formed, the wafer having at least one stripe region for forming said light emitting region, providing on a major surface of said wafer a protective film covering said stripe region and exposing the remaining region of the surface of said wafer, scribing on the major surface of said wafer to form scratches on the remaining region of the surface of said wafer along at least one line across said stripe region, and cracking said wafer along said scratches to separate the wafer along said line thereby to form said semiconductor laser elements.
Claim 10
Independent Claim
158 words
A method for producing semiconductor laser elements, each element comprising a crystalline semiconductor body, a light emitting region having a stripe shape defined in said semiconductor body and a pair of mirror surfaces of said semiconductor body for forming a laser resonator for the element, the method comprising the steps of: preparing a semiconductor wafer from which a plurality of said laser elements are to be formed, the wafer having at least one stripe region for forming said light emitting region, providing on a major surface of said wafer a protective film covering said stripe region and exposing the remaining region of the surface of said wafer, scribing on the major surface of said wafer to form scratches on the remaining region of the surface of said wafer along at least one line across said stripe region, and cracking said wafer along said scratches to separate the wafer along said line thereby to form said semiconductor laser elements.
Claim 11
Dependent Claim
14 words
The method as defined in claim 7, wherein said protective film comprises a metal.
Claim 12
Dependent Claim
13 words
The method as defined in claim 8, wherein said protective film comprises gold.
Claim 13
Dependent Claim
43 words
The method as defined in claim 7, wherein said protective film has a gap along said at least one line, the gap having a width narrow enough to prevent the scratches from being formed on the surface of the wafer under the gap.
Claim 14
Independent Claim
210 words
A method for producing semiconductor laser elements, each element comprising a crystalline semiconductor body, a light emitting region having a stripe shape defined in said body and a pair of mirror surfaces of said semiconductor body for forming a laser resonator for the element, the method comprising the steps of: preparing a semiconductor wafer from which a plurality of said laser elements are to be formed, the wafer having a plurality of stripe regions for forming said light emitting regions, each of said stripe regions being disposed in parallel with each other on a major surface of said wafer, providing on the major surface of said wafer a protective film having a pattern to cover said stripe regions and expose the remaining region of the major surface of said wafer, scribing on said major surface of said wafer to form scratches on both the remaining region of said major surface of said wafer and on said protective film along a plurality of lines across said stripe regions, and cracking said wafer along said scratches to cleave and separate the wafer along each of said lines to form along said lines a plurality of cleaved surfaces for providing said mirror surfaces thereby to obtain a plurality of the semiconductor laser elements.
Claim 15
Independent Claim
210 words
A method for producing semiconductor laser elements, each element comprising a crystalline semiconductor body, a light emitting region having a stripe shape defined in said body and a pair of mirror surfaces of said semiconductor body for forming a laser resonator for the element, the method comprising the steps of: preparing a semiconductor wafer from which a plurality of said laser elements are to be formed, the wafer having a plurality of stripe regions for forming said light emitting regions, each of said stripe regions being disposed in parallel with each other on a major surface of said wafer, providing on the major surface of said wafer a protective film having a pattern to cover said stripe regions and expose the remaining region of the major surface of said wafer, scribing on said major surface of said wafer to form scratches on both the remaining region of said major surface of said wafer and on said protective film along a plurality of lines across said stripe regions, and cracking said wafer along said scratches to cleave and separate the wafer along each of said lines to form along said lines a plurality of cleaved surfaces for providing said mirror surfaces thereby to obtain a plurality of the semiconductor laser elements.
Claim 16
Dependent Claim
46 words
The method as defined in claim 11, wherein said protective film has a plurality of gaps along said lines, each of said gaps having a width narrow enough to prevent the scratches from being formed on the surface of the wafer in each of the gaps.
Claim 17
Dependent Claim
25 words
The method as defined in claim 11 or 12, wherein the protective film comprises a metal film serving as an electrode for the laser element.
Claim 18
Dependent Claim
13 words
The method as defined in claim 13, wherein the protective film comprises gold.
Claim 19
Dependent Claim
16 words
The method as defined in claim 7 or 11 wherein said protective film comprises a resin.
Claim 20
Dependent Claim
14 words
The method as defined in claim 15 wherein said protective film comprises a photoresist.
Claim 21
Dependent Claim
16 words
The method as defined in claim 16 comprising the subsequent step of removing the protective film.
Claim 22
Dependent Claim
18 words
The method as defined in claim 5 or 6 comprising the subsequent step of removing the protective film.
Claim 23
Dependent Claim
28 words
The method as defined in claim 3, 4, 8, or 9, wherein the metal protective film provided on said wafer surface forms an electrode for the laser element.
Claim 24
Dependent Claim
64 words
The method as defined in claim 7 or 11, wherein the mirror surfaces of said semiconductor body for providing a laser resonator of the laser element are formed along the cleaved surfaces under the protective film developed by the cracking step of said wafer, said cleaved surfaces being substantially orthogonal to the longitudinal axis of said light emitting stripe region of said laser elements.
Claim 25
Dependent Claim
47 words
The method as defined in claim 11 comprising, subsequent to the step of cracking, the further step of dividing the semiconductor elements in an intermediate position between the plurality of light emitting stripe regions in a direction substantially parallel to the longitudinal direction of said stripe regions.
Claim 26
Dependent Claim
47 words
The method as defined in claim 20 comprising, subsequent to the step of cracking, the further step of dividing the semiconductor elements in an intermediate position between the plurality of light emitting stripe regions in a direction substantially parallel to the longitudinal direction of said stripe regions.
Claim 27
Dependent Claim
27 words
The method as defined in claim 20, wherein the mirror surfaces developed by the step of cracking are formed as opposite ends of said semiconductor laser element.
Claim 28
Dependent Claim
51 words
The method as defined in claim 2, 7, or 11, wherein the thickness of the protective film and the scribing pressure are predetermined so that scratches are formed on the exposed region of the wafer surface but are not formed on the region of the wafer surface under the protective film.
Claim 29
Dependent Claim
37 words
The method as defined in claim 24, wherein the protective film is gold, the thickness of the protective film is approximately from 3 to 6 μm, and the scribing pressure is approximately from 20 to 40 g.
Claim 30
Dependent Claim
31 words
The method as defined in claim 24, wherein the protective film is gold, the thickness of the protective film is approximately 1.4 μm, and the scribing pressure is approximately 3 g.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-12-21 | 1985-06-22 | 1985-12-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-12-21 | 1989-06-22 | 1989-12-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-12-21 | 1993-06-22 | 1993-12-22 | $7700.00 | Window Closed / Lapsed |