US4298505A
Expired / Lapsed
US
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Resistor composition and method of manufacture thereof
Assignee: Corning Glass Works
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Filing: 1979-11-05
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Granted: 1981-11-03
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Expires: 1999-11-05
Abstract
Abstract Disclosed is a range of resistor compositions which exhibit a stability of less than 0.5 percent change in resistance after 2,000 hours at 175° C., and yet which also have a temperature coefficient of resistance less than + or -25 ppm per degree Celsius. These compositions all comprise alloys of nickel, chromium and silicon, within a selected range. Also, disclosed is a method of manufacturing these compositions on a reproducible basis. The method includes the provision of a first silicon target and a second nickel chromium target and the subjecting of these targets to a sputtering gas and electrical potential such that the aforementioned silicon, nickel, chromium alloys are formed.
Inventors
- 👤 William G. Dorfeld
- 👤 Robert J. Settzo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 16:40
CPC Classifications
H; H01; H01C; H01C7/00; H01C7/06; H01C3/00; C; C22; C22C; C22C19/00; C22C19/03; C22C19/05; C22C27/00; C22C27/06; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49082; Y10T29/49099; Y10T29/49101
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
40 words
A resistor having improved stability and temperature coefficient of resistance consisting essentially of nickel, chromium and silicon, the concentration by weight of each being in the ranges specified by the polygon AB, BD, DC, CA as shown in the drawing.
Claim 2
Dependent Claim
40 words
A resistor having improved stability and temperature coefficient of resistance consisting essentially of nickel, chromium and silicon, the concentration by weight of each being in the ranges specified by the polygon AB, BD, DC, CA as shown in the drawing.
Claim 3
Dependent Claim
30 words
The resistor composition of claim 1 wherein the relative proportions of nickel, chromium and silicon consist essentially of 5 percent silicon, 57 percent chromium, and 38 percent nickel by weight.
Claim 4
Dependent Claim
30 words
The resistor composition of claim 1 wherein the relative proportions of nickel, chromium and silicon consist essentially of 7 percent silicon, 56 percent chromium, and 37 percent nickel by weight.
Claim 5
Dependent Claim
30 words
The resistor composition of claim 1 wherein the relative proportions of nickel, chromium and silicon consist essentially of 8 percent silicon, 37 percent chromium, and 55 percent nickel by weight.
Claim 6
Dependent Claim
30 words
The resistor composition of claim 1 wherein the relative proportions of nickel, chromium and silicon consist essentially of 9 percent silicon, 36 percent chromium and 55 percent nickel by weight.
Claim 7
Independent Claim
98 words
A method of manufacturing a resistor comprising the steps of: providing a first target of high purity silicon; providing a second target of chromium, nickel alloy; providing a substrate; subjecting said first target and said second target to a sputtering gas and electrical potential so as to deposit an alloy of nickel, chromium and silicon on said substrate; adjusting the sputtering power applied by said electrical potential such that the concentrations by weight of nickel, chromium and silicon in said alloy are each within ranges specified by the polygon, AB, BD, DC, CA as shown in the drawing.
Claim 8
Independent Claim
98 words
A method of manufacturing a resistor comprising the steps of: providing a first target of high purity silicon; providing a second target of chromium, nickel alloy; providing a substrate; subjecting said first target and said second target to a sputtering gas and electrical potential so as to deposit an alloy of nickel, chromium and silicon on said substrate; adjusting the sputtering power applied by said electrical potential such that the concentrations by weight of nickel, chromium and silicon in said alloy are each within ranges specified by the polygon, AB, BD, DC, CA as shown in the drawing.
Claim 9
Dependent Claim
15 words
A method of claim 6 wherein said sputtering gas comprises 1 percent oxygen in argon.
Claim 10
Dependent Claim
18 words
The method of claim 7 wherein the pressure of said sputtering gas ranges between 0.3 to 0.7 Pa.
Claim 11
Dependent Claim
19 words
The method of claim 8 wherein said sputtering gas has a flow rate of 50 cubic centimeters per minute.
Claim 12
Dependent Claim
18 words
The method of claim 6 further comprising the step of: coating said alloy deposited substrate with silicon monoxide.
Claim 13
Dependent Claim
16 words
The method of claim 10 further comprising the step of: heat treating the coated alloy substrate.
Claim 14
Dependent Claim
25 words
The method of claim 11 wherein said heat treating step comprises subjecting said substrate to a temperature of 350 C. in air for sixteen hours.
Claim 15
Dependent Claim
25 words
The method of claim 11 wherein said heat treating step comprises subjecting said substrate to a temperature of 450° C. in air for four hours.
Claim 16
Dependent Claim
54 words
A resistor having improved stability and temperature coefficient of resistance consisting essentially of nickel in the range which includes from 37 percent to 55 percent by weight, chromium in the range which includes 36 percent to 57 percent by weight, and silicon in the range which includes 5 percent to 9 percent by weight.
Claim 17
Dependent Claim
54 words
A resistor having improved stability and temperature coefficient of resistance consisting essentially of nickel in the range which includes from 37 percent to 55 percent by weight, chromium in the range which includes 36 percent to 57 percent by weight, and silicon in the range which includes 5 percent to 9 percent by weight.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-11-02 | 1985-05-04 | 1985-11-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-11-02 | 1989-05-04 | 1989-11-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-11-02 | 1993-05-04 | 1993-11-03 | $7700.00 | Window Closed / Lapsed |