Mass flow sensor

Claim 1

A mass flow sensor comprising a Karman flow detector arranged in a fluid flow path, said flow detector including a vortex generator and a vortex detector generating a detector signal in response to detected periods of generated vortices, and an air density detector including temperature and pressure responsive means for generating a signal proportional to pressures and temperatures of said fluid, said temperature and pressure responsive means comprising an elastic member defining a reference pressure chamber enclosing a standard gas and a comparison pressure chamber into which is introduced said fluid in said fluid flow path, and a rod connected to said elastic member and movable in response to movements of said elastic member, means responsive to a position of said rod to produce an output voltage proportional to said movement of said elastic member, and means responsive to said output voltage for compensating said vortex detector signal to obtain a fluid density dependent mass flow signal, wherein said fluid density detector and said flow detector have a common width and are aligned with each other on a common longitudinal axis in said fluid flow path, said detector being spaced apart from each other by a distance that is an integral multiple of a distance between successive Karman vortices.