US4297676A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mark signal amplifier
Assignee: Hitachi Ltd
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Filing: 1979-12-26
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Granted: 1981-10-27
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Expires: 1999-12-26
Abstract
Abstract In electron-beam lithography, and similar operations, to achieve good drawing accuracy on a sample, it is necessary to detect the position of a mark on the sample with high accuracy. To accomplish this, a mark signal amplifier is provided including a first circuit for taking maximum and minimum values out of a mark signal detected by causing an electron beam to scan a mark area provided on a sample. A second circuit determines a peak-to-peak value of an amplitude of the detected mark signal in accordance with the maximum and minimum values, and a third circuit produces an output signal of a constant amplitude level as an input to a binary-coding circuit in accordance with the peak-to-peak value. The output signal of the third circuit remains constant in spite of fluctuations of the detected mark signal, so that a higher accuracy is obtained in detecting the mark for positioning. An alternative arrangement adds the maximum and minimum values, and establishes a mean value of the maximum and minimum values from the resultant sum.
Inventors
- 👤 Shigeru Moriya
- 👤 Nobuo Hamamto
- 👤 Kazuo Ichino
- 👤 Kanji Ozawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 22:06
CPC Classifications
G; G06; G06K; G06K7/00; G06K7/10; G06K7/10544; G06K7/10821; G06K7/10851; H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3045
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
192 words
A mark signal amplifier comprising: first means for obtaining the maximum and minimum values of a mark signal from a detector as detected by scanning an electron beam over a mark area formed on a sample; second means for obtaining a peak-to-peak value of an amplitude of the detected mark signal from said maximum and minimum values; and third means for supplying an output signal of a constant amplitude in accordance with said peak-to-peak value of said amplitude independently of fluctuations in said detected mark signal, wherein said first means comprises means for amplifying said detected mark signal, an analog-to-digital converter for converting said detected mark signal to a digital signal, comparators for comparing the output digital signals from said analog-to-digital converter with the contents of a maximum value register for storing the maximum value of said detected mark signal and with the contents of a minimum value register for storing the minimum value of said detected mark signal, and means to renew the respective contents of the maximum and minimum value registers in accordance with the comparators outputs, whereby said maximum and minimum values of said detected mark signal are obtained.
Claim 2
Dependent Claim
192 words
A mark signal amplifier comprising: first means for obtaining the maximum and minimum values of a mark signal from a detector as detected by scanning an electron beam over a mark area formed on a sample; second means for obtaining a peak-to-peak value of an amplitude of the detected mark signal from said maximum and minimum values; and third means for supplying an output signal of a constant amplitude in accordance with said peak-to-peak value of said amplitude independently of fluctuations in said detected mark signal, wherein said first means comprises means for amplifying said detected mark signal, an analog-to-digital converter for converting said detected mark signal to a digital signal, comparators for comparing the output digital signals from said analog-to-digital converter with the contents of a maximum value register for storing the maximum value of said detected mark signal and with the contents of a minimum value register for storing the minimum value of said detected mark signal, and means to renew the respective contents of the maximum and minimum value registers in accordance with the comparators outputs, whereby said maximum and minimum values of said detected mark signal are obtained.
Claim 3
Dependent Claim
98 words
A mark signal amplifier as defined in claim 1, wherein said means for renewing operates such that each time the content of said analog-to-digital converter is greater than the content of said maximum value register, said content of said maximum value register is rewritten to renew a peak value in a positive direction, and each time the content of said analog-to-digital converter is less than the content of said minimum value register, said content of said minimum value register is rewritten to renew a peak value in a negative direction, whereby said maximum and minimum values are obtained.
Claim 4
Dependent Claim
16 words
A mark signal amplifier as defined in claim 2, wherein said second means comprises a subtracter.
Claim 5
Dependent Claim
72 words
A mark signal amplifier as defined in claim 1 or 3, wherein said third means comprises a read only memory in which preset reference values are stored in correspondence with the peak-to-peak values of said amplitude, and a multiplying digital-to-analog converter which multiplies a digital output of said read only memory and said detected mark signal as amplified in said first means, to supply said output signal of said constant amplitude level.
Claim 6
Dependent Claim
54 words
A mark signal amplifier as defined in claim 4, further including means for subjecting the content of said minimum value register to digital-to-analog conversion and thereafter subjecting the analog signal to subtraction with respect to said detected mark signal amplified in said first means, to apply the difference signal to said multiplying digital-to-analog converter.
Claim 7
Dependent Claim
182 words
A mark signal amplifier comprising: first means for obtaining the maximum and minimum values of a mark signal from a detector as detected by scanning an electron beam over a mark area on a sample; second means for adding the maximum and minimum values of the mark signal; and third means for obtaining the means value of the maximum and minimum values of the mark signal and providing this mean value as the amplifier output signal, wherein said first means comprises means for amplifying said detected mark signal, an analog-to-digital converter for converting said detected mark signal to a digital signal, comparators for comparing the output digital signals from said analog-to-digital converter with the contents of a maximum value register for storing the maximum value of said detected mark signal and with the contents of a minimum value register for storing the minimum value of said detected mark signal, and means to renew the respective contents of the maximum and minimum value registers in accordance with the comparators outputs, whereby said maximum and minimum values of said detected mark signal are obtained.
Claim 8
Dependent Claim
182 words
A mark signal amplifier comprising: first means for obtaining the maximum and minimum values of a mark signal from a detector as detected by scanning an electron beam over a mark area on a sample; second means for adding the maximum and minimum values of the mark signal; and third means for obtaining the means value of the maximum and minimum values of the mark signal and providing this mean value as the amplifier output signal, wherein said first means comprises means for amplifying said detected mark signal, an analog-to-digital converter for converting said detected mark signal to a digital signal, comparators for comparing the output digital signals from said analog-to-digital converter with the contents of a maximum value register for storing the maximum value of said detected mark signal and with the contents of a minimum value register for storing the minimum value of said detected mark signal, and means to renew the respective contents of the maximum and minimum value registers in accordance with the comparators outputs, whereby said maximum and minimum values of said detected mark signal are obtained.
Claim 9
Dependent Claim
41 words
A mark signal amplifier as defined in claim 6, wherein the third means includes a bit shifter for shifting the output of the second means for adding by one bit to obtain the mean value of the maximum and minimum values.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-10-26 | 1985-04-27 | 1985-10-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-10-26 | 1989-04-27 | 1989-10-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-10-26 | 1993-04-27 | 1993-10-27 | $7700.00 | Window Closed / Lapsed |