Dark field surface inspection illumination technique

Claim 1

A surface inspection method for finding defects contained in or on an optical sample comprising the steps of: coating one side of a prism whose index of refraction is similar to said optical sample with an index matching fluid; placing said optical sample on said fluid coated side; establishing an observation point above said optical sample to view the surface at a normal angle; directing a beam of monochromatic polarized light into said prism such that said beam reflects off of the upper surface of said optical sample at the critical angle beneath said observation point so as to create a standing wave pattern which scatters light off of imperfections smaller than the wavelength of said standing waves except when said imperfections are located at null points of said standing waves; varying the standing wave pattern so that the null points of said standing waves occur at different depths within the optical sample, the imperfections appear and disappear as null points pass through it; comparing the possible depths at which the imperfections appear for a plurality of different standing wave patterns to uniquely identify the depth in the sample of each imperfection; and moving said optical sample so that all areas of said optical sample are viewed from said observation point to observe said scattered light which has been scattered toward said upper surface at less than the critical angle.

Claim 5

An apparatus for locating defects in or on an optical sample comprising: a source of monochromatic light for emitting a beam of polarized light, said polarization capable of being changed, along an optical path; a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample; a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfacing with itself after reflection so as to create a standing wave pattern which scatters light off of imperfections smaller than the wavelength of said standing waves except when said imperfections are located at null points of said standing waves; and means for observing the surface of said optical sample above the area where total internal reflection occurs to observe said scattered light which has been scattered toward said upper surface at less than the critical angle said observation means observing light emitted normal to said optical sample.

Claim 6

An apparatus for locating defects in or on an optical sample comprising: a source of monochromatic light for emitting a beam of polarized light, said polarization capable of being changed, along an optical path; a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample; a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfacing with itself after reflection so as to create a standing wave pattern which scatters light off of imperfections smaller than the wavelength of said standing waves except when said imperfections are located at null points of said standing waves; and means for observing the surface of said optical sample above the area where total internal reflection occurs to observe said scattered light which has been scattered toward said upper surface at less than the critical angle said observation means observing light emitted normal to said optical sample.

Claim 9

An apparatus for locating defects in or on an optical sample as described in any of claims 4, 5, or 6 further comprising means for altering the path of said beam in said optical sample such that it is reflected at angles greater than the critical angle.

Claim 10

An apparatus for locating defects in or on an optical sample comprising: a tunable laser for emitting a beam of polarized light along a predetermined path; a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample; a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfacing with itself after reflection so as to create a standing wave pattern; a microscope for observing the surface of said optical sample above the area where total internal reflection occurs; a coating on the surface of said optical sample to remove surface irregularities so that only imbedded imperfections are observed; and means for altering the path of said beam in said optical sample such that it is reflected at angles greater than the critical angle.

Claim 11

An apparatus for locating defects in or on an optical sample comprising: a tunable laser for emitting a beam of polarized light along a predetermined path; a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample; a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfacing with itself after reflection so as to create a standing wave pattern; a microscope for observing the surface of said optical sample above the area where total internal reflection occurs; a coating on the surface of said optical sample to remove surface irregularities so that only imbedded imperfections are observed; and means for altering the path of said beam in said optical sample such that it is reflected at angles greater than the critical angle.

Claim 12

An apparatus for locating microbes in a coating on an optical sample where the coating and optical sample have matching indexes of refraction comprising: a tunable laser for emitting a beam of polarized monochromatic light along a predetermined path, said polarization capable of being changed; a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample; a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfaces with itself after reflection so as to create a standing wave pattern which scatters light off of imperfections smaller than the wavelength of said standing waves except when said imperfections are located at null points of said standing waves; a microscope for observing the coating on said optical sample where total internal reflection occurs said microscope placed to observe light emitted normal to said optical sample; and means for altering the path of said beam in said optical sample such that it is reflected at angles greater than the critical angle except for scattered light which has been scattered off of imperfections toward said upper surface at less than the critical angle.

Claim 13

An apparatus for locating microbes in a coating on an optical sample where the coating and optical sample have matching indexes of refraction comprising: a tunable laser for emitting a beam of polarized monochromatic light along a predetermined path, said polarization capable of being changed; a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample; a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfaces with itself after reflection so as to create a standing wave pattern which scatters light off of imperfections smaller than the wavelength of said standing waves except when said imperfections are located at null points of said standing waves; a microscope for observing the coating on said optical sample where total internal reflection occurs said microscope placed to observe light emitted normal to said optical sample; and means for altering the path of said beam in said optical sample such that it is reflected at angles greater than the critical angle except for scattered light which has been scattered off of imperfections toward said upper surface at less than the critical angle.

Claim 20

An apparatus for locating defects in or on an optical sample comprising: a source of polarized light for emitting a beam of light along an optical path; a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample; a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfacing with itself after reflection so as to create a standing wave pattern; a coating on the surface of said optical sample to remove surface irregularities so that only imbedded imperfections are observed; and means for observing the surface of said optical sample above the area where total internal reflection occurs.

Claim 21

An apparatus for locating defects in or on an optical sample comprising: a source of polarized light for emitting a beam of light along an optical path; a prism placed in the path of said beam at an angle which permits transmittance of said beam through said prism, said prism having an index of refraction similar to said optical sample; a layer of index matching fluid on said prism such that while said beam is being transmitted through said prism it encounters said layer and continues on without internal reflection at the boundary of said prism and fluid layer, said optical sample is placed on said fluid layer such that said beam is transmitted into said optical sample without reflection at the boundary of said optical sample and fluid layer and is incident on the opposite side of said optical sample at the critical angle for total internal reflection, said beam interfacing with itself after reflection so as to create a standing wave pattern; a coating on the surface of said optical sample to remove surface irregularities so that only imbedded imperfections are observed; and means for observing the surface of said optical sample above the area where total internal reflection occurs.