US4293755A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of cooling induction-heated vapor deposition apparatus and cooling apparatus therefor
Assignee: Arris Technology Inc
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Filing: 1980-04-14
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Granted: 1981-10-06
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Expires: 2000-04-14
Abstract
Abstract A method of cooling induction-heated vapor deposition apparatus including an electrically grounded deposition enclosure and a RF induction heating coil having essentially electrically uninsulated turns thereof disposed about the deposition enclosure, comprises the step of spraying deionized liquid having a resistivity of at least 14 megohms-om directly onto the apparatus.
Inventors
- 👤 Lawrence Hill
- 👤 Dennis Garbis
- 👤 Robert Heller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 04:50
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/4411; C23C16/46; C30; C30B; C30B25/00; C30B25/02; C30B25/08; H; H05; H05B; H05B6/00; H05B6/02; H05B6/10; H05B6/105; H05B6/108
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
83 words
A method of cooling induction-heated horizontal epitaxy tube vapor deposition apparatus including an electrically grounded deposition enclosure and an RF induction heating coil having essentially electrically uninsulated turns thereof disposed about said deposition enclosure, comprising the step of spraying deionized liquid having a resistivity of at least 14 megohms-centimeter directly onto said deposition enclosure and said coil turns of said apparatus in a pattern such that hotter parts of said deposition enclosure receive greater volumes of said deionized liquid than cooler parts thereof.
Claim 2
Independent Claim
83 words
A method of cooling induction-heated horizontal epitaxy tube vapor deposition apparatus including an electrically grounded deposition enclosure and an RF induction heating coil having essentially electrically uninsulated turns thereof disposed about said deposition enclosure, comprising the step of spraying deionized liquid having a resistivity of at least 14 megohms-centimeter directly onto said deposition enclosure and said coil turns of said apparatus in a pattern such that hotter parts of said deposition enclosure receive greater volumes of said deionized liquid than cooler parts thereof.
Claim 3
Dependent Claim
210 words
In apparatus for cooling induction-heated horizontal epitaxy tube vapor deposition apparatus including an electrically grounded deposition enclosure and an RF induction heating coil having essentially electrically uninsulated turns thereof disposed about said deposition enclosure, the improvement comprising (a) means positioned in a location having access to said enclosure for spraying deionized liquid having a resistivity of at least 14 megohms-centimeter directly onto said enclosure and said coil turns of said apparatus, said spray means being so arranged as to spray said deionized liquid in a pattern such that hotter parts of said deposition enclosure receive greater volumes of said deionized liquid than cooler parts thereof; (b) means for collecting the sprayed liquid, said collecting means comprising a receptacle adapted to receive liquid, and said deposition apparatus being disposed above the bottom of said receptacle with end portions of said coil passing through the bottom of said receptacle, said end portions being grounded and encapsulated in polytetrafluoroethylene to electrically isolate said coil end portions from said receptacle and the liquid contents thereof; (c) means for maintaining within said receptacle a liquid level below the top of said encapsulated coil end portions but above the bottom of said receptacle; and (d) means for independently grounding said spray means and said collecting means.
Claim 4
Dependent Claim
210 words
In apparatus for cooling induction-heated horizontal epitaxy tube vapor deposition apparatus including an electrically grounded deposition enclosure and an RF induction heating coil having essentially electrically uninsulated turns thereof disposed about said deposition enclosure, the improvement comprising (a) means positioned in a location having access to said enclosure for spraying deionized liquid having a resistivity of at least 14 megohms-centimeter directly onto said enclosure and said coil turns of said apparatus, said spray means being so arranged as to spray said deionized liquid in a pattern such that hotter parts of said deposition enclosure receive greater volumes of said deionized liquid than cooler parts thereof; (b) means for collecting the sprayed liquid, said collecting means comprising a receptacle adapted to receive liquid, and said deposition apparatus being disposed above the bottom of said receptacle with end portions of said coil passing through the bottom of said receptacle, said end portions being grounded and encapsulated in polytetrafluoroethylene to electrically isolate said coil end portions from said receptacle and the liquid contents thereof; (c) means for maintaining within said receptacle a liquid level below the top of said encapsulated coil end portions but above the bottom of said receptacle; and (d) means for independently grounding said spray means and said collecting means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-10-05 | 1985-04-06 | 1985-10-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-10-05 | 1989-04-06 | 1989-10-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-10-05 | 1993-04-06 | 1993-10-06 | $7700.00 | Window Closed / Lapsed |