US4289598A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma reactor and method therefor
Assignee: Technics Inc
•
Filing: 1980-05-03
•
Granted: 1981-09-15
•
Expires: 2000-05-03
Abstract
Abstract A plasma reactor includes a series of parallel disposed electrodes carried in a vacuum vessel chamber. The series of electrodes is adapted to have alternate polarities. Supporting brackets are provided for positioning workpieces, such as multilayer printed circuit boards, parallel to and between electrodes of alternate polarities. The supporting brackets are electrically isolated from the electrodes. Furthermore, a uniform gas flow is directed across the surfaces of the workpieces upon their being subjected to a gas discharge plasma, by providing the plasma reactor with a parabolically-shaped door defining a parabolic surface within the vacuum vessel chamber, as well as vertically disposed baffle plates and at least three radial gas inlets located equidistantly about said chamber. The radial gas inlets have discharge ends directed at the parabolic surface of the door and are located between the baffle plates and the parabolic door surface. Parallel arrangement of electrodes, as well as the elements utilized in directing a uniform gas flow, provide uniform conditioning of workpieces positioned within the gas discharge plasma of the plasma reactor.
Inventors
- 👤 Frank W. Engle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:51
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C16/00; C23C16/44; C23C16/50; C23C16/505; C23C16/509; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32431; H01J37/3244; H01J37/32532; H01J37/32577; H01J37/32623; H01J37/3266; H01J37/32688; H05; H05K; H05K3/00; H05K3/0011; H05K3/0055; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/335; H01J2237/3355; H05K2203/00; H05K2203/09; H05K2203/095
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
76 words
A plasma reactor suitable for conditioning workpieces in a gas discharge plasma, comprising: a vacuum vessel having a chamber therein; a series of parallel disposed electrodes supported in said vacuum vessel chamber, said series of electrodes adapted to have alternate polarities; and means for supporting workpieces to be conditioned in said plasma reactor between adjacent electrodes of said series of electrodes, said supporting means disposed in said vacuum vessel chamber and electrically isolated from said electrodes.
Claim 2
Dependent Claim
76 words
A plasma reactor suitable for conditioning workpieces in a gas discharge plasma, comprising: a vacuum vessel having a chamber therein; a series of parallel disposed electrodes supported in said vacuum vessel chamber, said series of electrodes adapted to have alternate polarities; and means for supporting workpieces to be conditioned in said plasma reactor between adjacent electrodes of said series of electrodes, said supporting means disposed in said vacuum vessel chamber and electrically isolated from said electrodes.
Claim 3
Dependent Claim
14 words
The plasma reactor according to claim 1 wherein said electrodes are planar in configuration.
Claim 4
Dependent Claim
14 words
The planar reactor according to claims 1 or 2 wherein said electrodes are perforated.
Claim 5
Dependent Claim
14 words
The planar reactor according to claims 1 or 2 wherein said electrodes are imperforate.
Claim 6
Dependent Claim
21 words
The plasma reactor according to claims 1 or 2 wherein said alternate polarities are ground potential and a predetermined R.F. potential.
Claim 7
Dependent Claim
31 words
The plasma reactor according to claim 1, further including: means for supporting said electrodes, said electrode supporting means adapted to accommodate expansion or contraction of said electrodes, thereby inhibiting electrode warping.
Claim 8
Dependent Claim
36 words
The plasma reactor according to claim 6 further comprising: cage frame means supported in said vacuum vessel and electrically insulated therefrom, said cage frame means carrying said series of electrodes and said means for supporting workpieces.
Claim 9
Dependent Claim
22 words
The plasma reactor according to claim 7 further comprising: means for electrically isolating said series of electrodes from said cage frame means.
Claim 10
Dependent Claim
36 words
The plasma reactor according to claim 7 wherein said electrode supporting means comprises at least two oppositely disposed channel brackets for supporting each of said electrodes, said channel brackets being secured to said cage frame means.
Claim 11
Dependent Claim
53 words
The plasma reactor according to claim 1 wherein said workpiece supporting means for supporting each workpiece comprises: a slotted bracket having a support member carried therein and extending through a slot of said bracket, and means engaging and extending from said support member for holding a workpiece between and parallel to adjacent electrodes.
Claim 12
Dependent Claim
14 words
The plasma reactor according to claim 10 wherein said support member is a T-rail.
Claim 13
Dependent Claim
29 words
The plasma reactor according to claim 10 further comprising: cage frame means supported in said vacuum vessel and electrically insulated therefrom, said slotted bracket fixed to said cage frame.
Claim 14
Dependent Claim
31 words
The plasma reactor according to claim 1 further comprising: means for directing a uniform flow of gas across the workpiece when the workpiece is being conditioned in a gas discharge plasma.
Claim 15
Dependent Claim
75 words
The plasma reactor according to claim 13 wherein said means for directing a uniform gas flow comprises: said vacuum vessel having a door defining a parabolic surface in said chamber; vertically disposed baffle plates positioned within said chamber; and a plurality of radial gas inlets disposed equidistantly about said chamber, said radial gas inlets having discharge ends directed at the parabolic surface of said door and located between said baffle plates and said parabolic surface.
Claim 16
Dependent Claim
14 words
The plasma reactor according to claim 14 having at least three radial gas inlets.
Claim 17
Dependent Claim
14 words
The plasma reactor according to claim 14 wherein said vacuum vessel door is parabolically-shaped.
Claim 18
Dependent Claim
115 words
A plasma reactor system suitable for conditioning workpieces in a gas discharge plasma, comprising: a vacuum vessel having a chamber therein; a series of parallel disposed electrodes supported in said vacuum vessel chamber, said series of electrodes adapted to have alternate polarities; and means for supporting workpieces to be conditioned in said plasma reactor between adjacent electrodes of said series of electrodes, said supporting means disposed in said vacuum vessel chamber and electrically isolated from said electrodes; a vacuum pump means in communication with said vacuum vessel chamber for evacuating said chamber; a gas source means in communication with said vacuum vessel chamber; and an R.F. generator means in electrical contact with alternately positioned electrodes.
Claim 19
Dependent Claim
115 words
A plasma reactor system suitable for conditioning workpieces in a gas discharge plasma, comprising: a vacuum vessel having a chamber therein; a series of parallel disposed electrodes supported in said vacuum vessel chamber, said series of electrodes adapted to have alternate polarities; and means for supporting workpieces to be conditioned in said plasma reactor between adjacent electrodes of said series of electrodes, said supporting means disposed in said vacuum vessel chamber and electrically isolated from said electrodes; a vacuum pump means in communication with said vacuum vessel chamber for evacuating said chamber; a gas source means in communication with said vacuum vessel chamber; and an R.F. generator means in electrical contact with alternately positioned electrodes.
Claim 20
Dependent Claim
74 words
In the method of conditioning workpieces in a gas discharge plasma utilizing a plasma reactor having a vacuum vessel with a chamber therein and a series of parallel disposed electrodes supported in said chamber, the steps comprising: disposing each workpiece between a pair of adjacent electrodes of said series of electrodes and electrically isolated therefrom; causing said series of electrodes to be of alternate polarities; and generating a gas discharge plasma in said chamber.
Claim 21
Dependent Claim
74 words
In the method of conditioning workpieces in a gas discharge plasma utilizing a plasma reactor having a vacuum vessel with a chamber therein and a series of parallel disposed electrodes supported in said chamber, the steps comprising: disposing each workpiece between a pair of adjacent electrodes of said series of electrodes and electrically isolated therefrom; causing said series of electrodes to be of alternate polarities; and generating a gas discharge plasma in said chamber.
Claim 22
Dependent Claim
24 words
The method according to claim 18 comprising the further step of: causing a plasma gas to flow uniformly across the surfaces of said workpieces.
References Cited (Backward Citations)
US3414503A
Cited
DE2116190A1
Cited
GB1522059A
Cited
US4178877A
Cited
JPS54108579A
Cited
US4223048A
Cited
US4230553A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-09-14 | 1985-03-16 | 1985-09-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-09-14 | 1989-03-16 | 1989-09-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-09-14 | 1993-03-16 | 1993-09-15 | $7700.00 | Window Closed / Lapsed |