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US4283632A Expired / Lapsed US ⏱️ 0.0 years remaining

Electron beam aperture device

Assignee: Jeol Ltd
•
Filing: 1979-10-18
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Granted: 1981-08-11
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Expires: 1999-10-18
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Abstract

Abstract A 10 to 50 microns thick apertured foil is coated on at least one of its sides with a material having a thickness of about 10 to 100 microns. The atomic number of the coating material is such that characteristic X-rays generated are effectively absorbed.

Inventors

  • 👤 Seiichi Nakagawa
  • 👤 Takayoshi Ikeda

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 09:00
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/04; H01J37/09; G; G21; G21K; G21K1/00; G21K1/02

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 99 words
In an X-ray microanalyzer, an apertured baffle comprising an apertured foil selected from the group molybdenum, tantalum, tungsten and platinum, said foil being characterized by the application of thin layers of coating material on both sides of said foil in the vicinity of the aperture, the atomic number of the coating material on one side of the foil being larger than that of the material from which the foil is constituted, and the atomic number of the coating material on the other side of the foil being smaller than that of the material from which the foil is constituted.
Claim 2
Dependent Claim 99 words
In an X-ray microanalyzer, an apertured baffle comprising an apertured foil selected from the group molybdenum, tantalum, tungsten and platinum, said foil being characterized by the application of thin layers of coating material on both sides of said foil in the vicinity of the aperture, the atomic number of the coating material on one side of the foil being larger than that of the material from which the foil is constituted, and the atomic number of the coating material on the other side of the foil being smaller than that of the material from which the foil is constituted.
Claim 3
Dependent Claim 102 words
In an X-ray microanalyzer, an apertured baffle for an electron beam, said microanalyzer having an electron beam source, said baffle comprising a strip-shaped apertured foil selected from the group molybdenum, tantalum, tungsten and platinum and a power source for passing an electrical current through said foil, said strip-shaped foil having a layer of coating material on one side of the foil and in the vicinity of the aperture, the atomic number of said coating material being smaller than that of the foil if facing the electron beam source and larger than that of the foil if not facing the electron beam source.
Claim 4
Dependent Claim 102 words
In an X-ray microanalyzer, an apertured baffle for an electron beam, said microanalyzer having an electron beam source, said baffle comprising a strip-shaped apertured foil selected from the group molybdenum, tantalum, tungsten and platinum and a power source for passing an electrical current through said foil, said strip-shaped foil having a layer of coating material on one side of the foil and in the vicinity of the aperture, the atomic number of said coating material being smaller than that of the foil if facing the electron beam source and larger than that of the foil if not facing the electron beam source.
Claim 5
Dependent Claim 93 words
In a X-ray microanalyzer, an apertured baffle for use in an electron optical system having an electron source, said baffle comprising a foil having an aperture therein, said foil being between about 10 and 50 microns thick and having a coating on at least one side and in the vicinity of the aperture between about 10 and 100 microns thick, the coating material having an atomic number smaller than that of the foil if facing the electron beam source and larger than that of the foil if not facing the electron beam source.
Claim 6
Dependent Claim 93 words
In a X-ray microanalyzer, an apertured baffle for use in an electron optical system having an electron source, said baffle comprising a foil having an aperture therein, said foil being between about 10 and 50 microns thick and having a coating on at least one side and in the vicinity of the aperture between about 10 and 100 microns thick, the coating material having an atomic number smaller than that of the foil if facing the electron beam source and larger than that of the foil if not facing the electron beam source.
Claim 7
Dependent Claim 89 words
In an X-ray microanalyzer, an apertured baffle for an electron beam, said microanalyzer having an electron beam source, said baffle comprising a foil being between about 10 and 50 microns thick and having an aperture therein, said foil selected from the group molybdenum, tantalum, tungsten and platinum, said foil having a thin coating between about 10 and 100 microns thick on the side not facing the electron beam source in the vicinity of the aperture, the atomic number of the coating material being larger than that of the foil.
Claim 8
Dependent Claim 89 words
In an X-ray microanalyzer, an apertured baffle for an electron beam, said microanalyzer having an electron beam source, said baffle comprising a foil being between about 10 and 50 microns thick and having an aperture therein, said foil selected from the group molybdenum, tantalum, tungsten and platinum, said foil having a thin coating between about 10 and 100 microns thick on the side not facing the electron beam source in the vicinity of the aperture, the atomic number of the coating material being larger than that of the foil.
Claim 9
Dependent Claim 89 words
In an X-ray microanalyzer, an apertured baffle for an electron beam, said microanalyzer having an electron beam source, said baffle comprising a foil being between about 10 and 50 microns thick and having an aperture therein, said foil selected from the group molybdenum, tantalum, tungsten, platinum or gold, said foil having a thin coating between about 10 and 100 microns thick on its side facing the electron beam source in the vicinity of the aperture, the atomic number of the coating material being smaller than that of the foil.
Claim 10
Dependent Claim 89 words
In an X-ray microanalyzer, an apertured baffle for an electron beam, said microanalyzer having an electron beam source, said baffle comprising a foil being between about 10 and 50 microns thick and having an aperture therein, said foil selected from the group molybdenum, tantalum, tungsten, platinum or gold, said foil having a thin coating between about 10 and 100 microns thick on its side facing the electron beam source in the vicinity of the aperture, the atomic number of the coating material being smaller than that of the foil.
Claim 11
Dependent Claim 115 words
In an X-ray microanalyzer, an apertured baffle comprising an apertured foil being between about 10 and 50 microns thick and selected from the group molybdenum, tantalum, tungsten and platinum, said foil being characterized by the application of thin layers between about 10 and 100 microns thick of coating material on both sides of said foil in the vicinity of the aperture, the atomic number of the coating material on one side of the foil being larger than that of the material from which the foil is constituted, and the atomic number of the coating material on the other side of the foil being smaller than that of the material from which the foil is constituted.
Claim 12
Dependent Claim 115 words
In an X-ray microanalyzer, an apertured baffle comprising an apertured foil being between about 10 and 50 microns thick and selected from the group molybdenum, tantalum, tungsten and platinum, said foil being characterized by the application of thin layers between about 10 and 100 microns thick of coating material on both sides of said foil in the vicinity of the aperture, the atomic number of the coating material on one side of the foil being larger than that of the material from which the foil is constituted, and the atomic number of the coating material on the other side of the foil being smaller than that of the material from which the foil is constituted.
Claim 13
Dependent Claim 102 words
In an X-ray microanalyzer, an apertured baffle for an electron beam, said microanalyzer having an electron beam source, said baffle comprising a strip-shaped apertured foil selected from the group molybdenum, tantalum, tungsten and platinum and a power source for passing an electrical current through said foil, said strip-shaped foil having a layer of coating material on one side of the foil and in the vicinity of the aperture, the atomic number of said coating material being smaller than that of the foil if facing the electron beam source and larger than that of the foil if not facing the electron beam source.
Claim 14
Dependent Claim 102 words
In an X-ray microanalyzer, an apertured baffle for an electron beam, said microanalyzer having an electron beam source, said baffle comprising a strip-shaped apertured foil selected from the group molybdenum, tantalum, tungsten and platinum and a power source for passing an electrical current through said foil, said strip-shaped foil having a layer of coating material on one side of the foil and in the vicinity of the aperture, the atomic number of said coating material being smaller than that of the foil if facing the electron beam source and larger than that of the foil if not facing the electron beam source.

References Cited (Backward Citations)

US3227880A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1984-08-10 1985-02-09 1985-08-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1988-08-10 1989-02-09 1989-08-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1992-08-10 1993-02-09 1993-08-11 $7700.00 Window Closed / Lapsed

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