Abstract A system for substantially eliminating undesirable temperature transients and spacial gradients in the laser gas flow through a laser cavity having a large system heat exchanger positioned upstream of the cavity which provides an exit gas temperature T i approximately 5 degrees above the desired cavity inlet temperature wherein the large heat exchanger has a time dependent tolerance of ±5 degrees. A trimmer heat exchanger is positioned between the large heat exchanger and the cavity. A flow of saturated liquid coolant through the trimmer heat exchanger from a tank is provided by a constant displacement pump, with the flow rate of the coolant set to remove a maximum heat load corresponding to a 10 degrees temperature drop in the gas flow through the trimmer heat exchanger. The saturated liquid temperature and pressure of the liquid in the tank is adjusted to the desired level by controlling the pressure in the tank with an absolute pressure regulator.
In a laser system including a laser cavity with means for supplying a flow of laser gas through said cavity; apparatus for providing a substantially uniform laser gas inlet temperature T o , without temperature transients and spacial temperature gradients at the laser inlet nozzle of the flow through the cavity, comprising: a first, large capacity, heat exchanger, upstream of said laser cavity, for providing a heat exchanger exit temperature T i , with a nominal time dependent tolerance; a second, boiling liquid, heat exchanger connected in series with the first heat exchanger and positioned between the first heat exchanger and the laser inlet nozzle; a coolant supply tank with supply and return lines from the second heat exchanger for supplying liquid coolant to said second heat exchanger; a back pressure regulator connected to said tank for maintaining the saturated liquid temperature of the coolant slightly below the desired laser inlet temperature T o ; and means, providing a coolant flow through said second heat exchanger for removing a maximum heat load corresponding to the tolerance of said first heat exchanger while maintaining boiling liquid operation of the second heat exchanger.
Claim 2
Dependent Claim
191 words
In a laser system including a laser cavity with means for supplying a flow of laser gas through said cavity; apparatus for providing a substantially uniform laser gas inlet temperature T o , without temperature transients and spacial temperature gradients at the laser inlet nozzle of the flow through the cavity, comprising: a first, large capacity, heat exchanger, upstream of said laser cavity, for providing a heat exchanger exit temperature T i , with a nominal time dependent tolerance; a second, boiling liquid, heat exchanger connected in series with the first heat exchanger and positioned between the first heat exchanger and the laser inlet nozzle; a coolant supply tank with supply and return lines from the second heat exchanger for supplying liquid coolant to said second heat exchanger; a back pressure regulator connected to said tank for maintaining the saturated liquid temperature of the coolant slightly below the desired laser inlet temperature T o ; and means, providing a coolant flow through said second heat exchanger for removing a maximum heat load corresponding to the tolerance of said first heat exchanger while maintaining boiling liquid operation of the second heat exchanger.
Claim 3
Dependent Claim
19 words
The device recited in claim 1, wherein said means for providing a coolant flow comprises a constant displacement pump.
Claim 4
Dependent Claim
14 words
The device as recited in claim 2 wherein said coolant is saturated liquid ammonia.