US4267633A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method to make an integrated circuit with severable conductive strip
Assignee: Robert Bosch GmbH
•
Filing: 1979-01-04
•
Granted: 1981-05-19
•
Expires: 1999-01-04
Abstract
Abstract To render severing of electrical conductors on integrated circuit (IC) chips more reliable, the region of insulating material, typically silicon oxide, beneath the zone which is to be severed, is increased in thickness; the increase in thickness is, preferably, in stepped form, so that the heat capacity at the point of severing of the conductor is less than the heat dissipation at other regions of the conductor, and especially at the point of application of the current probes. Preferably, the contact points at which the current probes are applied are located directly on the semiconductor surface without any intervening insulating oxide layer.
Inventors
- 👤 Hartmut Seiler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 13:31
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/493; Y; Y10; Y10S; Y10S438/00; Y10S438/981
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
257 words
Method to make an integrated circuit by planar technology having a metallic strip (1) adapted to be severed at a predetermined location (9) on the surface area of the chip by application of electrical current to said strip. comprising the steps of providing a silicon substrate chip (3, 4, 5); forming a zone of lesser heat dissipation capacity than surrounding areas at said predetermined location beneath the metallic strip to provide a burn-out point at said predetermined location including forming a layer (11) of silicon oxide on said substrate chip of increased thickness with respect to surrounding areas at said predetermined location by utilizing a masking pattern having two windows adjacent said predetermined location (9) while leaving a bridge at said location between said two windows, and diffusing doping material into said chip into the zones of said windows to form diffusion zones (8a, 8b) in said chip adjacent to and beneath said predetermined location (9) and forming a covering silicon oxide layer (11) at said diffusion zones (8a, 8b) and over said bridge of silicon oxide whereby the silicon oxide bridge will have a thickened portion (10) with respect to the adjacent areas of the silicon oxide layer (11); and applying a metallic conductive layer (1) in strip form over the silicon oxide layer located over said diffusion zones (8a, 8b) and over said thickened portion (10), to provide said zone of lesser heat dissipation capacity at said location (9) than the heat dissipation capacity of the oxide layer (11) in areas surrounding said predetermined location.
Claim 2
Dependent Claim
257 words
Method to make an integrated circuit by planar technology having a metallic strip (1) adapted to be severed at a predetermined location (9) on the surface area of the chip by application of electrical current to said strip. comprising the steps of providing a silicon substrate chip (3, 4, 5); forming a zone of lesser heat dissipation capacity than surrounding areas at said predetermined location beneath the metallic strip to provide a burn-out point at said predetermined location including forming a layer (11) of silicon oxide on said substrate chip of increased thickness with respect to surrounding areas at said predetermined location by utilizing a masking pattern having two windows adjacent said predetermined location (9) while leaving a bridge at said location between said two windows, and diffusing doping material into said chip into the zones of said windows to form diffusion zones (8a, 8b) in said chip adjacent to and beneath said predetermined location (9) and forming a covering silicon oxide layer (11) at said diffusion zones (8a, 8b) and over said bridge of silicon oxide whereby the silicon oxide bridge will have a thickened portion (10) with respect to the adjacent areas of the silicon oxide layer (11); and applying a metallic conductive layer (1) in strip form over the silicon oxide layer located over said diffusion zones (8a, 8b) and over said thickened portion (10), to provide said zone of lesser heat dissipation capacity at said location (9) than the heat dissipation capacity of the oxide layer (11) in areas surrounding said predetermined location.
Claim 3
Dependent Claim
148 words
Method according to claim 1, further including the step of forming good heat conductive connecting regions for application of electrical current to the metallic conductive layer (1), comprising the steps of forming two non-surface oxidized additional diffusion zones (2a, 2b) of conductivity opposite to that of the substrate chip positioned remote from said diffusion zones (8a, 8b) adjacent to and beneath said predetermined location (9); and the step of applying said conductive metallic material includes the step of extending the conductive strip-like material over said additional diffusion zones (2a, 2b) of said opposite conductivity type to permit application of said metallic conductive layer (1) directly to the silicon of the chip on said additional diffusions zones (2a, 2b) formed on the substrate while effectively electrically isolating the metallic conductive layer (1) from the substrate and said diffusion zones (8a, 8b) adjacent to and beneath said predetermined location (9).
References Cited (Backward Citations)
US3484341A
Cited
US3553830A
Cited
US3564354A
Cited
US3699395A
Cited
US3792319A
Cited
US3778886A
Cited
US3930304A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-05-18 | 1984-11-17 | 1985-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-05-18 | 1988-11-17 | 1989-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-05-18 | 1992-11-17 | 1993-05-19 | $7700.00 | Window Closed / Lapsed |