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US4263576A Expired / Lapsed US ⏱️ 0.0 years remaining

Humidity sensitive device

Assignee: Murata Manufacturing Co Ltd
•
Filing: 1979-06-27
•
Granted: 1981-04-21
•
Expires: 1999-06-27
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Abstract

Abstract A humidity sensitive device, including opposing electrodes formed on an insulating substrate, and a humidity sensitive film formed on the surface of the insulating substrate and at least between the opposing electrodes. The humidity sensitive film is obtained by coating on the surface of the insulating substrate a uniformly dispersed mixture including zirconium oxychloride and epoxy resin and heating the same.

Inventors

  • 👤 Michihiro Murata
  • 👤 Shinsei Okabe

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 11:46
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/12; G01N27/121

Claims Analysis

Total Claims: 38
Claim 1
Independent Claim 107 words
A humidity sensitive device, comprising: an insulating substrate having a major surface; first and second electrodes formed first and second electrodes formed on said major surface of said insulating substrate and spaced from each other; first and second external connection terminals electrically coupled to and for external connection of said first and second electrodes respectively; and a humidity sensitive film formed on said major surface of said insulating substrate and covering at least the position of said major surface located between said electrodes, said humidity sensitive film comprising an inorganic polymer mainly including zirconium, and an organic polymer having compatibility with said inorganic polymer mainly including zirconium.
Claim 2
Dependent Claim 107 words
A humidity sensitive device, comprising: an insulating substrate having a major surface; first and second electrodes formed first and second electrodes formed on said major surface of said insulating substrate and spaced from each other; first and second external connection terminals electrically coupled to and for external connection of said first and second electrodes respectively; and a humidity sensitive film formed on said major surface of said insulating substrate and covering at least the position of said major surface located between said electrodes, said humidity sensitive film comprising an inorganic polymer mainly including zirconium, and an organic polymer having compatibility with said inorganic polymer mainly including zirconium.
Claim 3
Dependent Claim 28 words
A humidity sensitive film in accordance with claim 1, wherein said humidity sensitive film further comprises a component for controlling the electrical resistance of said humidity sensitive film.
Claim 4
Dependent Claim 32 words
A humidity sensitive device in accordance with claim 2, wherein said resistance controlling component is at least one member selected from the group consisting of conductive powder, semiconductive powder and insulating powder.
Claim 5
Dependent Claim 17 words
A humidity sensitive device in accordance with claim 3, wherein said resistance controlling component comprises conductive powder.
Claim 6
Dependent Claim 29 words
A humidity sensitive device in accordance with claim 4, wherein said conductive powder is at least one member selected from the group consisting of carbon powder and palladium powder.
Claim 7
Dependent Claim 17 words
A humidity sensitive device in accordance with claim 3, wherein said resistance controlling component comprises semiconductive powder.
Claim 8
Dependent Claim 50 words
A humidity sensitive device in accordance with claim 6, wherein said semiconductive powder is powder of at least one member selected from the group consisting of CrO 2 , NiO, Fe 3 O 4 , ZnO, SnO 2 , MnO 2 , TiO 2-x (0<x<2), and semiconductor alkaline earths titanates.
Claim 9
Dependent Claim 17 words
A humidity sensitive device in accordance with claim 3, wherein said resistance controlling component comprises insulating powder.
Claim 10
Dependent Claim 41 words
A humidity sensitive device in accordance with claim 8, wherein said insulating powder comprises powder of at least one member selected from the group consisting of TiO 2 , ZrO 2 , SiO 2 , and Al 2 O 3 .
Claim 11
Dependent Claim 119 words
A humidity sensitive device, comprising: an insulating substrate having a major surface; first and second electrodes formed on said major surface of said insulating substrate and spaced from each other; first and second external connection terminals electrically coupled to and for external connection of said first and second electrodes respectively; and a humidity sensitive film formed on said major surface of said insulating substrate and covering at least the portion of said major surface located between said electrodes; said humidity sensitive film comprising a coating disposed on said insulating substrate and covering at least the portion of said major surface located between said electrodes, said coating comprising a uniformly dispersed mixture comprising a zirconium compound and an organic polymer.
Claim 12
Dependent Claim 119 words
A humidity sensitive device, comprising: an insulating substrate having a major surface; first and second electrodes formed on said major surface of said insulating substrate and spaced from each other; first and second external connection terminals electrically coupled to and for external connection of said first and second electrodes respectively; and a humidity sensitive film formed on said major surface of said insulating substrate and covering at least the portion of said major surface located between said electrodes; said humidity sensitive film comprising a coating disposed on said insulating substrate and covering at least the portion of said major surface located between said electrodes, said coating comprising a uniformly dispersed mixture comprising a zirconium compound and an organic polymer.
Claim 13
Dependent Claim 23 words
A humidity sensitive device in accordance with claim 10, wherein said uniformly dispersed mixture further comprises a component for controlling a resistance value.
Claim 14
Dependent Claim 32 words
A humidity sensitive device in accordance with claim 11, wherein said resistance controlling component is at least one member selected from the group consisting of conductive powder, semiconductive powder and insulating powder.
Claim 15
Dependent Claim 17 words
A humidity sensitive device in accordance with claim 12, wherein said resistance controlling component comprises conductive powder.
Claim 16
Dependent Claim 29 words
A humidity sensitive device in accordance with claim 13, wherein said conductive powder is at least one member selected from the group consisting of carbon powder and palladium powder.
Claim 17
Dependent Claim 17 words
A humidity sensitive device in accordance with claim 12, wherein said resistance controlling component comprises semiconductive powder.
Claim 18
Dependent Claim 50 words
A humidity sensitive device in accordance with claim 15, wherein said semiconductive powder is powder of at least one member selected from the group consisting of CrO 2 , NiO, Fe 3 O 4 , ZnO, SnO 2 , MnO 2 , TiO 2-x (0<x<2), and semiconductive alkaline earths titanates.
Claim 19
Dependent Claim 17 words
A humidity sensitive device in accordance with claim 12, wherein said resistance controlling component comprises insulating powder.
Claim 20
Dependent Claim 41 words
A humidity sensitive device in accordance with claim 17, wherein said insulating powder comprises powder of at least one member selected from the group consisting of TiO 2 , ZrO 2 , SiO 2 , and Al 2 O 3 .
Claim 21
Dependent Claim 51 words
A humidity sensitive device in accordance with claim 10, wherein said zirconium compound is at least one member selected from the group consisting of zirconium oxychloride, zirconium acetate, zirconium chloride, zirconium bromide, zirconium hydroxide, zirconium iodide, zirconium nitrate, zirconium oxybromide, zirconium oxyiodide, zirconium sulfate, and those zirconium compounds denatured by hydration.
Claim 22
Dependent Claim 22 words
A humidity sensitive device in accordance with claim 10, wherein said organic polymer is a member having compatibility with said zirconium compound.
Claim 23
Dependent Claim 29 words
A humidity sensitive device in accordance with claim 20, wherein said organic polymer is a member selected from the group consisting of epoxy resin, silicone resin, and fluorine-contained polymers.
Claim 24
Dependent Claim 37 words
A humidity sensitive device in accordance with claim 20, wherein said organic polymer is at least one water soluble polymer selected from the group consisting of ethyl cellulose, methyl cellulose, carboxymethylcellulose, hydroxyigencellulose, polyethylene oxide and polyvinyl alcohol.
Claim 25
Independent Claim 136 words
A method for manufacturing a humidity sensitive device, comprising the steps of: preparing an insulating substrate having a major surface; forming first and second electrodes on said major surface so as to be spaced apart from each other on said major surface; providing first and second external connection terminals electrically coupled to and for external connection of said first and second electrodes, respectively; preparing a uniformly dispersed mixture including a zirconium compound and an organic polymer; coating said uniformly dispersed mixture on at least the portion of major surface of said insulating substrate located between said electrodes; and heating said uniformly dispersed mixture up to a temperature that does not decompose said organic polymer in said uniformly dispersed mixture as coated, whereby a humidity sensitive film is formed on said insulating substrate and between said electrodes.
Claim 26
Independent Claim 136 words
A method for manufacturing a humidity sensitive device, comprising the steps of: preparing an insulating substrate having a major surface; forming first and second electrodes on said major surface so as to be spaced apart from each other on said major surface; providing first and second external connection terminals electrically coupled to and for external connection of said first and second electrodes, respectively; preparing a uniformly dispersed mixture including a zirconium compound and an organic polymer; coating said uniformly dispersed mixture on at least the portion of major surface of said insulating substrate located between said electrodes; and heating said uniformly dispersed mixture up to a temperature that does not decompose said organic polymer in said uniformly dispersed mixture as coated, whereby a humidity sensitive film is formed on said insulating substrate and between said electrodes.
Claim 27
Dependent Claim 46 words
A method for manufacturing a humidity sensitive device in accordance with claim 23, wherein said step of preparing said uniformly dispersed mixture comprises the step of admixing a resistance controlling component into said uniformly dispersed mixture for controlling the electrical resistance of said uniformly dispersed mixture.
Claim 28
Dependent Claim 36 words
A method for manufacturing a humidity sensitive device in accordance with claim 24, wherein said resistance controlling component is at least one member selected from the group consisting of conductive powder, semiconductive powder and insulating powder.
Claim 29
Dependent Claim 21 words
A method for manufacturing a humidity sensitive device in accordance with claim 25, wherein said resistance controlling component comprises conductive powder.
Claim 30
Dependent Claim 33 words
A method for manufacturing a humidity sensitive device in accordance with claim 26, wherein said conductive powder is at least one member selected from the group consisting of carbon powder and palladium powder.
Claim 31
Dependent Claim 21 words
A method for manufacturing a humidity sensitive device in accordance with claim 24, wherein said resistance controlling component comprises semiconductive powder.
Claim 32
Dependent Claim 54 words
A method for manufacturing a humidity sensitive device in accordance with claim 28, wherein said semiconductive powder is powder of at least one member selected from the group consisting of CrO 2 , NiO, Fe 3 O 4 , ZnO, SnO 2 , MnO 2 , TiO 2-x (0<x<2), and semiconductive alkaline earths titanates.
Claim 33
Dependent Claim 21 words
A method for manufacturing a humidity sensitive device in accordance with claim 25, wherein said resistance controlling component comprises insulating powder.
Claim 34
Dependent Claim 45 words
A method for manufacturing a humidity sensitive device in accordance with claim 30, wherein said insulating powder comprises powder of at least one member selected from the group consisting of TiO 2 , ZrO 2 , SiO 2 , and Al 2 O 3 .
Claim 35
Dependent Claim 55 words
A method for manufacturing a humidity sensitive device in accordance with claim 23, wherein said zirconium compound is at least one member selected from the group consisting of zirconium oxychloride, zirconium acetate, zirconium chloride, zirconium bromide, zirconium hydroxide, zirconium iodide, zirconium nitrate, zirconium oxybromide, zirconium oxyiodide, zirconium sulfate, and those zirconium compounds denatured by hydration.
Claim 36
Dependent Claim 26 words
A method for manufacturing a humidity sensitive device in accordance with claim 23, wherein said organic polymer is a member having compatibility with said zirconium compound.
Claim 37
Dependent Claim 33 words
A method for manufacturing a humidity sensitive device in accordance with claim 33, wherein said organic polymer is a member selected from the group consisting of epoxy resin, silicone resin, and fluorine-contained polymers.
Claim 38
Dependent Claim 41 words
A method for manufacturing a humidity sensitive device in accordance with claim 33, wherein said organic polymer is at least one water soluble polymer selected from the group consisting of ethyl cellulose, methyl cellulose, carboxymethylcellulose, hydroxigencellulose, polyethylene oxide and polyvinyl alcohol.

References Cited (Backward Citations)

US4086556A Cited
US4167725A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1984-04-20 1984-10-20 1985-04-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1988-04-20 1988-10-20 1989-04-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1992-04-20 1992-10-20 1993-04-21 $7700.00 Window Closed / Lapsed

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