Apparatus for manufacturing multi-layered semiconductor elements by means of liquid-phase epitaxy

Claim 2

Apparatus for transfer of liquids between chambers of a reactor comprising: a plurality of interconnected discrete reactor chambers circumferentially spaced on a common horizontal plane, with said chambers defining an annular array disposed about a vertical axis, with said interconnection comprising conduit means extending between the bottom of one of said chambers and the top of a succeeding and adjacent second one of said chambers; and means to rotate said chambers about said axis under sufficient speed to force a liquid to flow under centrifugal force through said conduit means from the bottom of said one chamber means to the top and into said second one of said succeeding chambers.

Claim 3

The apparatus of claim 1 including means to mount a workpiece in said conduit means for flow of said liquid across said workpiece.

Claim 4

The apparatus of claim 2 wherein said workpiece is a semiconductor substrate, and said liquid is an epitaxy source solution.

Claim 5

The apparatus of claim 1 adapted to contain dissimilar liquids in different ones of said chambers.

Claim 6

The apparatus of claim 1 including means to throttle the flow of liquid in said conduit means.

Claim 7

The apparatus of claim 1 including a plurality of said annular arrays of reactor chambers disposed in vertically superposed and coacting relationship to one another for sequentially indexing liquid downwardly through a vertical work zone from one said annular array to an adjacent lower said annular array, an outlet at the bottom of a prespecified last chamber of a one said annular array, an inlet at the top of a prespecified first chamber in a succeeding adjacent lower annular array, and means to register said outlet and said inlet in interconnection with each other to enable drain flow of liquid from said last chamber to said first chamber.

Claim 8

Apparatus for transfer of liquids between chambers of a reactor, comprising: (A) a first plurality of interconnected discrete reactor chambers circumferentially spaced on a first common horizontal plane at a first level and defining a first annular array disposed about a vertical axis; (B) a second plurality of interconnected discrete reactor chambers circumferentially spaced on a second common horizontal plane defining a second annular array of a plurality of discrete chambers disposed (a) radially between said first array and said axis, and (b) at a second level below that of said first array; (C) conduit means sequentially interconnecting in a direction of rotation about the vertical axis (a) the bottom of a first chamber in said second array to the top of an adjacent chamber in said first array, and (b) the bottom of said adjacent chamber of said first array to the top of the next succeeding adjacent chamber in said second array; and (D) means to simultaneously rotate said chambers of said first array and said second array about said axis under sufficient speed to force a liquid to flow under centrifugal force through said conduit means from the bottom of the said first chamber in said second lower level array to the top of the said adjacent chamber in said first level array.

Claim 9

Apparatus for transfer of liquids between chambers of a reactor, comprising: (A) a first plurality of interconnected discrete reactor chambers circumferentially spaced on a first common horizontal plane at a first level and defining a first annular array disposed about a vertical axis; (B) a second plurality of interconnected discrete reactor chambers circumferentially spaced on a second common horizontal plane defining a second annular array of a plurality of discrete chambers disposed (a) radially between said first array and said axis, and (b) at a second level below that of said first array; (C) conduit means sequentially interconnecting in a direction of rotation about the vertical axis (a) the bottom of a first chamber in said second array to the top of an adjacent chamber in said first array, and (b) the bottom of said adjacent chamber of said first array to the top of the next succeeding adjacent chamber in said second array; and (D) means to simultaneously rotate said chambers of said first array and said second array about said axis under sufficient speed to force a liquid to flow under centrifugal force through said conduit means from the bottom of the said first chamber in said second lower level array to the top of the said adjacent chamber in said first level array.

Claim 10

The apparatus of claim 7 including means to mount a workpiece in said conduit means for flow of said liquid across said workpiece.

Claim 11

The apparatus of claim 8 wherein said workpiece is a semiconductor substrate, and said liquid is an epitaxy source solution.

Claim 12

The apparatus of claim 7 adapted to contain dissimilar liquids in different ones of said chambers.

Claim 13

The apparatus of claim 7 including means to throttle the flow of liquid in said conduit means.

Claim 14

The apparatus of claim 7 including means to periodically reduce said rotational speed of said chambers to facilitate gravitational flow of fluid from chambers in said first array to the lower chambers of said second array.