Infrared interference type film thickness measuring method and instrument therefor

Claim 2

An infrared interference type film thickness measuring method in which infrared light is irradiated to a polymer film having a thickness of less than 30μ, the infrared light before or after irradiation is spectroscopically scanned within a wavelength range of substantially small absorption by the film, an infrared interference fringe spectrum based on the polymer film is formed, at least the extreme points of the infrared interference fringe are detected by processing, thereby to measure the thickness of the polymer film.

Claim 3

An infrared interference type film thickness measuring method according to claim 1, wherein non-chromatic infrared light is irradiated to the polymer film and the infrared light after irradiation is spectroscopically separated into monochromatic infrared lights with time, thereby to obtain the interference fringe spectrum.

Claim 4

An infrared interference type film thickness measuring method according to claim 1, wherein the infrared light is spectroscopically separated with time and irradiated to the polymer film to obtain the interference fringe from the infrared light after irradiation.

Claim 5

An infrared interference type film thickness measuring method according to claim 1, wherein the infrared light is transmitted through the polymer film at the same portion a plurality of times.

Claim 6

An infrared interference type film thickness measuring method according to claim 1, wherein at least two infrared wavelengths representing maximums or minimums and a difference in the interference order between the maximums or minimums are detected by processing to thereby calculate the film thickness.

Claim 7

An infrared interference type film thickness measuring method according to claim 1, wherein the number representing the maximums and/or minimums of the interference fringe spectrum is detected by processing to thereby calculate the film thickness.

Claim 8

An infrared interference type film thickness measuring method according to claim 1, wherein the infrared light is selected within a wavelength range of 0.8 to 2.2μ.

Claim 9

An infrared interference type film thickness measuring instrument comprising; an infrared radiation source for irradiating a polymer film having a thickness of less than 30μ with infrared light; an infrared light separating means for spectroscopically separating, with time, the infrared light before or after irradiation in a wavelength range of essentially small absorption by the film to obtain an interference fringe spectrum from the infrared light after irradiation; an infrared radiation detector receiving the interference fringe spectrum to detect it as an electrical interference waveform signal; and a processing unit for detecting at least the extreme points of the interference waveform signal from the infrared radiation detector to calculate the film thickness.

Claim 10

An infrared interference type film thickness measuring instrument comprising; an infrared radiation source for irradiating a polymer film having a thickness of less than 30μ with infrared light; an infrared light separating means for spectroscopically separating, with time, the infrared light before or after irradiation in a wavelength range of essentially small absorption by the film to obtain an interference fringe spectrum from the infrared light after irradiation; an infrared radiation detector receiving the interference fringe spectrum to detect it as an electrical interference waveform signal; and a processing unit for detecting at least the extreme points of the interference waveform signal from the infrared radiation detector to calculate the film thickness.

Claim 11

An infrared interference type film thickness measuring instrument according to claim 8, wherein means is provided for transmitting the infrared light through the polymer film at the same portion a plurality of times.

Claim 12

An infrared interference type film thickness measuring instrument according to claim 9, wherein the means for transmitting the infrared light through the polymer film a plurality of times is reflector means disposed in opposing relation to the infrared radiation source across the polymer film for reflecting the incident infrared light back in the direction of incidence.

Claim 13

An infrared interference type film thickness measuring instrument according to claim 10, wherein the reflector means is a corner cube.

Claim 14

An infrared interference type film thickness measuring instrument according to claim 8, wherein an A-D converter is provided for converting the interference waveform signal from the infrared radiation detector into a digital signal, and wherein the processing unit is a digital processor supplied with the output from the A-D converter.

Claim 15

An infrared interference type film thickness measuring instrument according to claim 12, wherein the processing unit detects, by processing, at least two infrared wavelengths representing maximums or minimums of the interference waveform signal and a difference in the interference degree between the maximums of minimums and calculates therefrom the film thickness.

Claim 16

An infrared interference type film thickness measuring instrument according to claim 12, wherein the processing unit calculates the wavelengths for maximums or minimums of the output from the infrared radiation detector on the basis of variations, with time, in the interference fringe spectrum of a polymer film of known thickness and wavelengths representing maximums or minimums of the interference fringe spectrum.

Claim 17

An infrared interference type film thickness measuring instrument according to claim 14, wherein addresses of a memory for storing the output from the A-D converter are coordinated with infrared wavelengths.

Claim 18

An infrared interference type film thickness measuring instrument according to claim 15, wherein the start of calculation by the processing is synchronized with the infrared light separating means.

Claim 19

An infrared interference type film thickness measuring instrument according to claim 15, wherein the memory has stored therein information representing the variations, with time, in the interference fringe spectrum of the polymer film of known thickness.