US4253931A
Expired / Lapsed
US
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Electrode sputtering process for exhaust gas oxygen sensor
Assignee: Motors Liquidation Co
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Filing: 1979-11-30
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Granted: 1981-03-03
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Expires: 1999-11-30
Abstract
Abstract A method of sputtering platinum onto a vitrified zirconia thimble to form an exhaust electrode for an electrochemical-type exhaust gas oxygen sensor. The electrode is sputtered under an atmosphere consisting essentially of more than about 50% oxygen and/or nitrogen by volume. Sensors having low symmetrical transition times are produced.
Inventors
- 👤 Terry J. Gold
- 👤 Kurt D. Humphrey
- 👤 Keith A. Penney
- 👤 Robert J. Smith
- 👤 Randy L. Voto
- 👤 Ralph V. Wilhelm, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 17:23
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/26; G01N27/403; G01N27/406; G01N27/407; C; C03; C03C; C03C17/00; C03C17/06; C03C17/09; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/18; C23C14/185; H; H01; H01M; H01M4/00; H01M4/86; H01M4/90; H01M4/9041; H01M4/905; H01M4/9058; Y; Y02; Y02E; Y02E60/00; Y02E60/30; Y02E60/50
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
89 words
In a method of sputtering platinum onto a solid electrolyte body to form an exhaust gas electrode for an electrochemical-type exhaust gas oxygen sensor, the improvement wherein the platinum is sputtered under an atmosphere consisting essentially of more than about 50% by volume of at least one member selected from the group consisting of nitrogen and oxygen and less than about 50% of an inert gas, in proportion effective to provide low sensor rich-to-lean and lean-to-rich switching response times of less than 600 milliseconds with the electrode as deposited.
Claim 2
Dependent Claim
89 words
In a method of sputtering platinum onto a solid electrolyte body to form an exhaust gas electrode for an electrochemical-type exhaust gas oxygen sensor, the improvement wherein the platinum is sputtered under an atmosphere consisting essentially of more than about 50% by volume of at least one member selected from the group consisting of nitrogen and oxygen and less than about 50% of an inert gas, in proportion effective to provide low sensor rich-to-lean and lean-to-rich switching response times of less than 600 milliseconds with the electrode as deposited.
Claim 3
Dependent Claim
80 words
In a method of sputtering platinum onto a vitrified zirconia body to form an exhaust gas electrode for an electrochemical-type exhaust gas oxygen sensor, the improvement wherein the sputtering is performed using an argon atmosphere that contains at least 65% by volume of one member selected from the group consisting of nitrogen and oxygen, whereby low sensor rich-to-lean switching response times of less than 600 milliseconds are obtained that are generally equal to lean-to-rich switching response times, without post-electroding treatments.
Claim 4
Dependent Claim
80 words
In a method of sputtering platinum onto a vitrified zirconia body to form an exhaust gas electrode for an electrochemical-type exhaust gas oxygen sensor, the improvement wherein the sputtering is performed using an argon atmosphere that contains at least 65% by volume of one member selected from the group consisting of nitrogen and oxygen, whereby low sensor rich-to-lean switching response times of less than 600 milliseconds are obtained that are generally equal to lean-to-rich switching response times, without post-electroding treatments.
Claim 5
Dependent Claim
85 words
In a method of sputtering platinum onto a solid electrolyte body to form an exhaust gas electrode for a zirconia, solid-electrolyte exhaust gas oxygen sensor, the improvement wherein the platinum is sputtered under an atmosphere consisting predominantly of nitrogen, the remainder being an inert gas and a target spacing, deposition rate and chamber pressure sufficient to provide a highly porous platinum deposit and a partially blackened zirconia surface under the platinum deposit, whereby sensor switching response time is reduced to below 250 milliseconds as deposited.
Claim 6
Dependent Claim
85 words
In a method of sputtering platinum onto a solid electrolyte body to form an exhaust gas electrode for a zirconia, solid-electrolyte exhaust gas oxygen sensor, the improvement wherein the platinum is sputtered under an atmosphere consisting predominantly of nitrogen, the remainder being an inert gas and a target spacing, deposition rate and chamber pressure sufficient to provide a highly porous platinum deposit and a partially blackened zirconia surface under the platinum deposit, whereby sensor switching response time is reduced to below 250 milliseconds as deposited.
Claim 7
Dependent Claim
135 words
In a method of sputtering a porous platinum exhaust gas electrode onto a vitrified zirconia thimble for an electrochemical-type exhaust gas oxygen sensor wherein a generally planar platinum target is oriented normal to the axis of a zirconia thimble, the target is spaced at least about 3.0 cm from a closed end on the thimble, and the target is sputtered under an argon atmosphere at a pressure of about 10-20 millitorr and a power of about 13-22 watts/cm 2 of target area, the improvement wherein the atmosphere contains more than about 65% by volume of at least one member selected from the group consisting of nitrogen and oxygen and the total pressure is about 10-20 millitorr, effective to increase sensor controllability and to reproducibly obtain sensor rich-to-lean and lean-to-rich switching response times below 250 milliseconds.
Claim 8
Dependent Claim
135 words
In a method of sputtering a porous platinum exhaust gas electrode onto a vitrified zirconia thimble for an electrochemical-type exhaust gas oxygen sensor wherein a generally planar platinum target is oriented normal to the axis of a zirconia thimble, the target is spaced at least about 3.0 cm from a closed end on the thimble, and the target is sputtered under an argon atmosphere at a pressure of about 10-20 millitorr and a power of about 13-22 watts/cm 2 of target area, the improvement wherein the atmosphere contains more than about 65% by volume of at least one member selected from the group consisting of nitrogen and oxygen and the total pressure is about 10-20 millitorr, effective to increase sensor controllability and to reproducibly obtain sensor rich-to-lean and lean-to-rich switching response times below 250 milliseconds.
Claim 9
Dependent Claim
151 words
In a method of sputtering a porous platinum exhaust gas electrode onto a vitrified zirconia thimble for an electrochemical-type exhaust gas oxygen sensor wherein a generally planar platinum target is oriented normal to the axis of a zirconia thimble, the target is spaced about 3.0-5.0 cm from a closed end on the thimble, a thickness of at least about 0.65 micrometer is applied to the thimble end and the target is sputtered under argon at a pressure of about 10-20 millitorr and a DC power of about 13-22 watts/cm 2 of target area, the improvement wherein the platinum is sputtered in an atmosphere consisting essentially of about 65-75% by volume nitrogen and the balance argon at a total pressure of about 10-20 millitorr, effective to increase sensor controllability and to reproducibly obtain low and symmetrical sensor rich-to-lean and lean-to-rich switching response times below 250 milliseconds without post-electroding electrolytic or heat treatments.
Claim 10
Dependent Claim
151 words
In a method of sputtering a porous platinum exhaust gas electrode onto a vitrified zirconia thimble for an electrochemical-type exhaust gas oxygen sensor wherein a generally planar platinum target is oriented normal to the axis of a zirconia thimble, the target is spaced about 3.0-5.0 cm from a closed end on the thimble, a thickness of at least about 0.65 micrometer is applied to the thimble end and the target is sputtered under argon at a pressure of about 10-20 millitorr and a DC power of about 13-22 watts/cm 2 of target area, the improvement wherein the platinum is sputtered in an atmosphere consisting essentially of about 65-75% by volume nitrogen and the balance argon at a total pressure of about 10-20 millitorr, effective to increase sensor controllability and to reproducibly obtain low and symmetrical sensor rich-to-lean and lean-to-rich switching response times below 250 milliseconds without post-electroding electrolytic or heat treatments.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-03-02 | 1984-09-01 | 1985-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-03-02 | 1988-09-01 | 1989-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-03-02 | 1992-09-01 | 1993-03-03 | $7700.00 | Window Closed / Lapsed |