US4252838A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Glow discharge fabrication of transparent conductive coatings
Assignee: Honeywell Inc
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Filing: 1978-09-11
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Granted: 1981-02-24
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Expires: 1998-09-11
Abstract
Abstract Optically transparent, conducting metal oxide films are produced on plastic or suitable ceramic substrates by placing the substrate to be coated in a partially evacuated chamber containing a mixture of a suitable organo-metallic compound vapor and oxygen and utilizing a glow discharge sustained by a DC, AC or RF electromagnetic field.
Inventors
- 👤 Warren T. Boord
- 👤 Anthony R. Lefkow
- 👤 Henry Y. B. Mar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:41
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C08; C08J; C08J7/00; C08J7/04; C08J7/044; C08J7/06; C23C16/22; C23C16/30; C23C16/40; C23C16/407
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
150 words
A method of depositing an optically transparent, electrically conductive thin film metal oxide coating on an unheated substrate comprising the steps of: positioning said substrates on a grounded support within a glow discharge chamber; partially evacuating said chamber; establishing an atmosphere in said chamber said atmosphere comprising an organo-metallic compound and oxygen, wherein said organo-metallic compound is one selected from the group M-R, wherein M is a metal selected from the group consisting of tin, indium, cadmium, and rhenium and R is an alkyl group having 1-4 carbon atoms; establishing a glow discharge in said chamber by the use of an AC, DC or RF source; controlling the power of said glow discharge such that the temperature of the substrate remains at a point below that at which it is affected by temperature; and maintaining said glow discharge until the film thereby deposited on said substrate reaches the desired thickness.
Claim 2
Independent Claim
150 words
A method of depositing an optically transparent, electrically conductive thin film metal oxide coating on an unheated substrate comprising the steps of: positioning said substrates on a grounded support within a glow discharge chamber; partially evacuating said chamber; establishing an atmosphere in said chamber said atmosphere comprising an organo-metallic compound and oxygen, wherein said organo-metallic compound is one selected from the group M-R, wherein M is a metal selected from the group consisting of tin, indium, cadmium, and rhenium and R is an alkyl group having 1-4 carbon atoms; establishing a glow discharge in said chamber by the use of an AC, DC or RF source; controlling the power of said glow discharge such that the temperature of the substrate remains at a point below that at which it is affected by temperature; and maintaining said glow discharge until the film thereby deposited on said substrate reaches the desired thickness.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein said organo-metallic compound contains a methoxy group.
Claim 4
Dependent Claim
12 words
The method of claim 1 wherein said substrate is a plastic material.
Claim 5
Dependent Claim
16 words
The method of claim 3 wherein said substrate comprises an optically transparent polycarbonate or polyimide polymer.
Claim 6
Dependent Claim
20 words
The method of claim 1 wherein said organo-metallic compound is one selected from the group consisting of tetramethyltin and tetraethyltin.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-02-24 | 1984-08-25 | 1985-02-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-02-24 | 1988-08-25 | 1989-02-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-02-24 | 1992-08-25 | 1993-02-24 | $7700.00 | Window Closed / Lapsed |