US4251570A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cold substrate growth technique for silicon-on-ceramic
Assignee: Honeywell Inc
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Filing: 1979-11-19
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Granted: 1981-02-17
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Expires: 1999-11-19
Abstract
Abstract The present invention is an improvement to the method of growing silicon films on a substrate by bringing the substrate in contact with molten silicon. The improved growth technique may be classified as an asymmetric mode of growth of silicon on the substrate and is characterized by the substrate being maintained at a lower temperature than the solidification of silicon in the area of the substrate where the silicon layer growth is taking place, that is in the area of the liquid-solid interface. The lower temperature of the substrate, say 5°-10° C. below the freezing temperature of silicon, causes the liquid-solid interface to be tilted to be nearly parallel to the substrate surface but inclined at a reentrant angle, so that the leading edge of the crystallization front is on the substrate. This provides an advantage of increased growth speed.
Inventors
- 👤 J. David Zook
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 06:06
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/50; C04B41/80; C04B41/81; C04B41/85; C30; C30B; C30B15/00; C30B15/007; C30B29/00; C30B29/60; C30B29/605; H; H10; H10F; H10F71/00; H10F71/121; H10F71/1221; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/546; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
112 words
An improved method for growing a layer of polycrystalline silicon on a substrate from a source of molten silicon comprising the steps of: providing a source of molten silicon; providing a substrate to grow a silicon layer on; transporting the substrate with respect to and proximate the molten silicon whereby contact is made between the molten silicon and the substrate surface causing a silicon layer to grow on said surface; and tilting the solid-liquid interface of the growing silicon layer to be substantially parallel with the substrate by the step of cooling the substrate from the non-coated side to provide a unidirectional heat flow from the silicon layer to the cooled substrate.
Claim 2
Dependent Claim
112 words
An improved method for growing a layer of polycrystalline silicon on a substrate from a source of molten silicon comprising the steps of: providing a source of molten silicon; providing a substrate to grow a silicon layer on; transporting the substrate with respect to and proximate the molten silicon whereby contact is made between the molten silicon and the substrate surface causing a silicon layer to grow on said surface; and tilting the solid-liquid interface of the growing silicon layer to be substantially parallel with the substrate by the step of cooling the substrate from the non-coated side to provide a unidirectional heat flow from the silicon layer to the cooled substrate.
Claim 3
Dependent Claim
39 words
The method according to claim 1 in which the substrate to grow the silicon layer on is a ceramic and in which the ceramic substrate has a surface thereof carbon-coated where it is desired that the silicon layer grow.
Claim 4
Dependent Claim
57 words
The method according to claim 2 and wherein the step of transporting the substrate further comprises: immersing the substrate in molten silicon; removing the substrate from the melt in a non vertical position with the carbon coated surface of the substrate facing downwardly; thereby growing a silicon layer on the emerging carbon coated surface of the substrate.
Claim 5
Dependent Claim
114 words
The method according to claim 2 wherein the step of providing a source of molten silicon further comprises: providing an elongated crucible for containing the molten silicon; maintaining the level in the crucible such that the silicon surface rises up from the crucible surface in a convex meniscus; and wherein the step of transporting further comprises: supporting the substrate with the carbon coated surface facing downwardly; and traversing the downwardly facing surface of the substrate over and across the surface of the molten silicon meniscus with the surface making contact with the silicon meniscus as the substrate traverses to grow a silicon layer as the carbonized surface emerges from contact with the silicon meniscus.
Claim 6
Dependent Claim
114 words
The method according to claim 1 wherein the step of providing a source of molten silicon further comprises: providing an elongated crucible for containing the molten silicon; maintaining the level in the crucible such that the silicon surface rises up from the crucible surface in a convex meniscus; and wherein the step of transporting further comprises: supporting the substrate with the surface to be coated facing downwardly; and traversing the downwardly facing surface of the substrate over and across the surface of the molten silicon meniscus with the surface making contact with the silicon meniscus as the substrate traverses to grow a silicon layer as the surface emerges from contact with the silicon meniscus.
Claim 7
Dependent Claim
152 words
An improved method for growing a layer of polycrystalline silicon on a substrate from a source of molten silicon comprising the steps of: providing a source of molten silicon; providing a substrate to grow a silicon layer on said substrate having a surface area thereof of carbon where it is desired that the silicon layer grow; transporting the substrate with respect to and proximate the molten silicon whereby contact is made between the molten silicon and the carbon surface of the substrate causing a silicon layer to grow on said surface; and cooling to a temperature lower than the freezing point of silicon an area of the substrate in the region of silicon solidification from the non-coated side to provide unidirectional heat flow from the silicon layer to the cooled substrate whereby because of the unidirectional heat flow pattern, solidification of the silicon layer commences at the substrate surface and progresses outwardly.
Claim 8
Dependent Claim
152 words
An improved method for growing a layer of polycrystalline silicon on a substrate from a source of molten silicon comprising the steps of: providing a source of molten silicon; providing a substrate to grow a silicon layer on said substrate having a surface area thereof of carbon where it is desired that the silicon layer grow; transporting the substrate with respect to and proximate the molten silicon whereby contact is made between the molten silicon and the carbon surface of the substrate causing a silicon layer to grow on said surface; and cooling to a temperature lower than the freezing point of silicon an area of the substrate in the region of silicon solidification from the non-coated side to provide unidirectional heat flow from the silicon layer to the cooled substrate whereby because of the unidirectional heat flow pattern, solidification of the silicon layer commences at the substrate surface and progresses outwardly.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-02-17 | 1984-08-18 | 1985-02-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-02-17 | 1988-08-18 | 1989-02-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-02-17 | 1992-08-18 | 1993-02-17 | $7700.00 | Window Closed / Lapsed |