US4249106A
Expired / Lapsed
US
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Radiation sensitive screen
Assignee: Hitachi Ltd
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Filing: 1979-11-07
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Granted: 1981-02-03
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Expires: 1999-11-07
Abstract
Abstract A radiation sensitive screen comprising a crystalline silicon substrate which is located on a side of incidence of radiation, and an amorphous silicon film which contains hydrogen and which is located on the opposite side of the substrate to the side of the incidence of the radiation. The radiation sensitive screen of this invention can be manufactured by a simple method, and can achieve a high resolution. It is useful for the target of an image pickup tube, the electron bombardment target of an X-ray fluorescence multiplier tube, etc.
Inventors
- 👤 Eiichi Maruyama
- 👤 Saburo Ataka
- 👤 Kiyohisa Inao
- 👤 Yoshinori Imamura
- 👤 Toshihisa Tsukada
- 👤 Yukio Takasaki
- 👤 Tadaaki Hirai
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 06:03
CPC Classifications
H; H01; H01J; H01J29/00; H01J29/02; H01J29/10; H01J29/36; H01J29/39; H01J29/45; H01J9/00; H01J9/20; H01J9/233
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
48 words
A radiation sensitive screen comprising a crystalline silicon substrate which is located on a side of incidence of radiation, and an amorphous silicon film which contains hydrogen therein and which is located on a side of said substrate opposite to said side of the incidence of the radiation.
Claim 2
Dependent Claim
48 words
A radiation sensitive screen comprising a crystalline silicon substrate which is located on a side of incidence of radiation, and an amorphous silicon film which contains hydrogen therein and which is located on a side of said substrate opposite to said side of the incidence of the radiation.
Claim 3
Dependent Claim
26 words
A radiation sensitive screen according to claim 1, wherein a hydrogen content of said amorphous silicon film containing hydrogen therein is 5 atomic-% to 40 atomic-%.
Claim 4
Dependent Claim
23 words
A radiation sensitive screen according to claim 2, wherein 10% to 50% of silicon in said amorphous silicon film is substituted by germanium.
Claim 5
Dependent Claim
27 words
A radiation sensitive screen according to claims 1 to 3, wherein a thickness of said amorphous silicon film containing hydrogen therein is 1 μm to 10 μm.
Claim 6
Dependent Claim
28 words
A radiation sensitive screen according to claims 1 to 3, wherein a thickness of a sensitive portion of said crystalline silicon substrate is 5 μm to 30 μm.
Claim 7
Dependent Claim
28 words
A radiation sensitive screen according to claims 1 to 3, wherein a thickness of a sensitive portion of said crystalline silicon substrate is 30 μm to 100 μm.
Claim 8
Dependent Claim
22 words
A radiation sensitive screen according to claims 1 to 3, wherein a beam landing layer is disposed on said amorphous silicon film.
References Cited (Backward Citations)
US3890524A
Cited
US3890525A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-02-03 | 1984-08-04 | 1985-02-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-02-03 | 1988-08-04 | 1989-02-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-02-03 | 1992-08-04 | 1993-02-03 | $7700.00 | Window Closed / Lapsed |