US4247359A
Expired / Lapsed
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Preparation of epitaxial rare earth thin films
Assignee: Honeywell Inc
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Filing: 1978-10-30
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Granted: 1981-01-27
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Expires: 1998-10-30
Abstract
Abstract A method of preparing epitaxial thin films of metallic rare earth garnets by chemical vapor deposition utilizes organometallic ligand compounds of rare earth metals including scandium, yttrium, lanthanum and the lanthanides (Z=58 through 71) with organic compounds including acetylacetone, benzoylacetone, thenoyl trifluoroacetone, fluorinated benzoylacetone, tri-n-butylphosphate, tri-n-octylphosphine oxide and sodium cyclopentadienide and 2,2,6,6-tetramethyl 3,5-heptanedione.
Inventors
- 👤 Hanumanthiya V. Venkatasetty
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 08:48
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B29/28
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
86 words
In a method of preparing epitaxial thin films of metallic rare earth garnets by chemical vapor deposition in an inert atmosphere, the improvement comprising the step of depositing said rare earth metals in an epitaxial layer on a substrate from organic ligand compound forms which include at least one element from the group consisting of scandium, yttrium, lanthanum, and the lanthanide series combined with the compound selected from the group consisting of acetylacetone, thenoyl trifluoroacetone, benzoylacetone, fluorinated benzoylacetone, sodium cyclopentadienide, tri-n-butylphosphate, tri-n-octylphosphine oxide, and 2,2,6,6-tetramathyl 3,5-heptanedione.
Claim 2
Dependent Claim
86 words
In a method of preparing epitaxial thin films of metallic rare earth garnets by chemical vapor deposition in an inert atmosphere, the improvement comprising the step of depositing said rare earth metals in an epitaxial layer on a substrate from organic ligand compound forms which include at least one element from the group consisting of scandium, yttrium, lanthanum, and the lanthanide series combined with the compound selected from the group consisting of acetylacetone, thenoyl trifluoroacetone, benzoylacetone, fluorinated benzoylacetone, sodium cyclopentadienide, tri-n-butylphosphate, tri-n-octylphosphine oxide, and 2,2,6,6-tetramathyl 3,5-heptanedione.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein said lanthanide metal is selected from the group consisting of yttrium and gadolinium.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-01-27 | 1984-07-28 | 1985-01-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-01-27 | 1988-07-28 | 1989-01-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-01-27 | 1992-07-28 | 1993-01-27 | $7700.00 | Window Closed / Lapsed |