US4244012A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Lamp holder for projection aligner
Assignee: Applied Materials Inc
•
Filing: 1978-06-29
•
Granted: 1981-01-06
•
Expires: 1998-06-29
Abstract
Abstract A lamp holder that compensates for thermally induced expansion of an arcuate lamp is disclosed. Each end of the arcuate lamp is secured to a relatively flexable lamp support. In the preferred embodiment the lamp support at one end is moveable generally in a plane containing the arcuate lamp, while the lamp support at the other end is moveable generally in a plane that intersects the plane of the lamp. The resulting horizontal and vertical freedom of movement compensates for thermal expansion of the lamp during lamp operation. Both lamp supports are mounted on a lamp holder base, having a plurality of locator pin apertures therein that are cooperatively operative with locator pins positioned on the base of a lamp holder housing. The locator pins and locator pin apertures accurately position the arcuate lamp with respect to an optical system. Forced fluid cooling of the lamp is provided through the lamp holder housing.
Inventors
- 👤 Magnus B. Hansen
- 👤 Walter T. Novak
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 23:02
CPC Classifications
F; F21; F21V; F21V29/00; F21V29/50; F21V29/56; F21V15/00; F21V15/04; F21V19/00; F21V19/0075; F21V29/70; F21V29/80; G; G03; G03B; G03B27/00; G03B27/32; G03B27/52; G03B27/54; F21Y; F21Y2103/00; F21Y2103/30
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
170 words
A lamp holder for a capillary, gas discharge arcuate lamp having electrical contacts at each end thereof, said lamp holder comprising: a generally planar base means capable of being fixed in position relative to an optical system; a first electrically conductive, current carrying lamp support adapted to secure one end of the arcuate lamp with respect to said base means, said first electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive, current carrying lamp support adapted to secure the other end of the arcuate lamp with respect to said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally parallel to the plane of said base means, whereby the arcuate lamp is free to distort relative to the base means during operation.
Claim 2
Dependent Claim
170 words
A lamp holder for a capillary, gas discharge arcuate lamp having electrical contacts at each end thereof, said lamp holder comprising: a generally planar base means capable of being fixed in position relative to an optical system; a first electrically conductive, current carrying lamp support adapted to secure one end of the arcuate lamp with respect to said base means, said first electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive, current carrying lamp support adapted to secure the other end of the arcuate lamp with respect to said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally parallel to the plane of said base means, whereby the arcuate lamp is free to distort relative to the base means during operation.
Claim 3
Dependent Claim
175 words
A lamp holder assembly comprising: (a) a capillary, gas discharge arcuate lamp having electrically conductive contacts at each end thereof; and, (b) a lamp holder comprising a generally planar base means capable of being fixed in position relative to an optical system; a first electrically conductive, current carrying lamp support adapted to secure one end of the arcuate lamp with respect to said base means, said first electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive, current carrying lamp support adapted to secure the other end of said arcuate lamp with respect to said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally parallel to the plane of said base means, whereby the arcuate lamp is free to distort relative to the base means during operation.
Claim 4
Dependent Claim
175 words
A lamp holder assembly comprising: (a) a capillary, gas discharge arcuate lamp having electrically conductive contacts at each end thereof; and, (b) a lamp holder comprising a generally planar base means capable of being fixed in position relative to an optical system; a first electrically conductive, current carrying lamp support adapted to secure one end of the arcuate lamp with respect to said base means, said first electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive, current carrying lamp support adapted to secure the other end of said arcuate lamp with respect to said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally parallel to the plane of said base means, whereby the arcuate lamp is free to distort relative to the base means during operation.
Claim 5
Dependent Claim
180 words
A lamp holder assembly and housing comprising, in combination: 1. a lamp holder assembly having (a) a capillary gas discharge arcuate lamp having electrically conductive contacts at each end thereof; (b) a lamp holder comprising a generally planar base means; a first electrically conductive, current carrying lamp support adapted to secure one end of the arcuate lamp with respect to said base means, said first electrically conductive current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive current carrying lamp adapted to secure the other end of the arcuate lamp with respect to said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally parallel to the plane of said base means, whereby the arcuate lamp is free to distort relative to the base means during operation; and, positional registration means in said base means;
Claim 6
Dependent Claim
180 words
A lamp holder assembly and housing comprising, in combination: 1. a lamp holder assembly having (a) a capillary gas discharge arcuate lamp having electrically conductive contacts at each end thereof; (b) a lamp holder comprising a generally planar base means; a first electrically conductive, current carrying lamp support adapted to secure one end of the arcuate lamp with respect to said base means, said first electrically conductive current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive current carrying lamp adapted to secure the other end of the arcuate lamp with respect to said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible portion that lies in a plane generally parallel to the plane of said base means, whereby the arcuate lamp is free to distort relative to the base means during operation; and, positional registration means in said base means;
Claim 7
Dependent Claim
57 words
a lamp holder assembly housing having a base means unit with means cooperatively operative with said lamp holder positional registration means for accurately and repeatedly positioning the lamp holder and arcuate lamp with respect to said base unit; and a cover means for covering the lamp holder and lamp when they are positioned on said base unit.
Claim 8
Dependent Claim
57 words
a lamp holder assembly housing having a base means unit with means cooperatively operative with said lamp holder positional registration means for accurately and repeatedly positioning the lamp holder and arcuate lamp with respect to said base unit; and a cover means for covering the lamp holder and lamp when they are positioned on said base unit.
Claim 9
Dependent Claim
32 words
The combination of claim 3 further comprising said base unit having means defining an arcuate coolant channel for said arcuate lamp and inlet and outlet means fluidly coupled to said coolant channel.
Claim 10
Dependent Claim
187 words
A lamp holder for an arcuate lamp having first and second electrical contacts that are spaced apart along the arc of the arcuate lamp, said lamp holder comprising: a generally planar base means capable of being fixed in position relative to an optical system; a first electrically conductive, current carrying lamp support mounted on said base means and adapted to secure the arcuate lamp first electrical contact with respect to said base means, said first lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive, current carrying lamp support mounted on said base means in spaced relation to said first electrically conductive, current carrying lamp support and adapted to secure the arcuate lamp second electrical contact with respect to said base means, said second electrically conductive, current carrying lamp support having a generally planar, relativelyflexible lamp contacting portion that lies in a plane generally parallel to the plane of said base means whereby the arcuate lamp is free to distort relative to the base means during operation.
Claim 11
Dependent Claim
187 words
A lamp holder for an arcuate lamp having first and second electrical contacts that are spaced apart along the arc of the arcuate lamp, said lamp holder comprising: a generally planar base means capable of being fixed in position relative to an optical system; a first electrically conductive, current carrying lamp support mounted on said base means and adapted to secure the arcuate lamp first electrical contact with respect to said base means, said first lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive, current carrying lamp support mounted on said base means in spaced relation to said first electrically conductive, current carrying lamp support and adapted to secure the arcuate lamp second electrical contact with respect to said base means, said second electrically conductive, current carrying lamp support having a generally planar, relativelyflexible lamp contacting portion that lies in a plane generally parallel to the plane of said base means whereby the arcuate lamp is free to distort relative to the base means during operation.
Claim 12
Dependent Claim
172 words
A lamp holder assembly comprising: (a) a lamp holder comprising a generally planar base means capable to being fixed in position relative to an optical system; a first electrically conductive current carrying lamp support mounted on said base means, said first electrically conductive, current carrying lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive, current carrying lamp support mounted on said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally parallel to the plane of said base means; (b) an arcuate lamp having first and second, electrically conductive terminals that are spaced along the arc of the arcuate lamp; and, (c) means for securing said first and second electrically conductive lamp terminals to said first and second electrically conductive, current carrying lamp supports.
Claim 13
Dependent Claim
172 words
A lamp holder assembly comprising: (a) a lamp holder comprising a generally planar base means capable to being fixed in position relative to an optical system; a first electrically conductive current carrying lamp support mounted on said base means, said first electrically conductive, current carrying lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally perpendicular to the plane of said base means; and, a second electrically conductive, current carrying lamp support mounted on said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally parallel to the plane of said base means; (b) an arcuate lamp having first and second, electrically conductive terminals that are spaced along the arc of the arcuate lamp; and, (c) means for securing said first and second electrically conductive lamp terminals to said first and second electrically conductive, current carrying lamp supports.
Claim 14
Dependent Claim
232 words
A lamp holder assembly and housing comprising, in combination: 1. a lamp holder assembly having (a) a lamp holder comprising a generally planar base means; a first electrically conductive, current carrying lamp support mounted on said base means, said first electrically conductive, current carrying lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally perpendicular to the plane of said base means; a second electrically conductive, current carrying lamp support mounted on said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally parallel to the plane of said base means; and, positional registration means in said base means, (b) an arcuate lamp having first and second electrically conductive terminals that are spaced along the arc of the arcuate lamp; (c) means for securing said first and second electrically conductive lamp terminals to said first and second electrically conductive, current carrying lamp supports; 2. a lamp holder assembly housing having a base unit with means cooperatively operative with said lamp holder registration means for accurately and repeatedly positioning the lamp holder and lamp with respect to said base unit; and a cover means for covering the lamp holder and lamp when they are positioned on said base unit.
Claim 15
Dependent Claim
232 words
A lamp holder assembly and housing comprising, in combination: 1. a lamp holder assembly having (a) a lamp holder comprising a generally planar base means; a first electrically conductive, current carrying lamp support mounted on said base means, said first electrically conductive, current carrying lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally perpendicular to the plane of said base means; a second electrically conductive, current carrying lamp support mounted on said base means in spaced relation to said first electrically conductive, current carrying lamp support, said second electrically conductive, current carrying lamp support having a generally planar, relatively flexible lamp contacting portion that lies in a plane generally parallel to the plane of said base means; and, positional registration means in said base means, (b) an arcuate lamp having first and second electrically conductive terminals that are spaced along the arc of the arcuate lamp; (c) means for securing said first and second electrically conductive lamp terminals to said first and second electrically conductive, current carrying lamp supports; 2. a lamp holder assembly housing having a base unit with means cooperatively operative with said lamp holder registration means for accurately and repeatedly positioning the lamp holder and lamp with respect to said base unit; and a cover means for covering the lamp holder and lamp when they are positioned on said base unit.
Claim 16
Dependent Claim
31 words
The combination of claim 7 further comprising said base unit having means defining a coolant channel for said arcuate lamp and inlet and outlet means fluidly coupled to said coolant channel.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-01-06 | 1984-07-07 | 1985-01-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-01-06 | 1988-07-07 | 1989-01-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-01-06 | 1992-07-07 | 1993-01-06 | $7700.00 | Window Closed / Lapsed |