US4240096A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fluorine-doped P type silicon
Assignee: Toshiba Corp
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Filing: 1978-10-19
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Granted: 1980-12-16
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Expires: 1998-10-19
Abstract
Abstract A semiconductor device comprising a fluorine ion implantation region which is selectively formed in a semiconductor region and further activated. The fluorine ion implantation region is adapted for use as a high resistance layer or electrical isolation layer.
Inventors
- 👤 Shunichi Hiraki
- 👤 Kuniaki Kumamaru
- 👤 Masaharu Aoyama
- 👤 Toshio Yonezawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 23:06
CPC Classifications
H; H10; H10P; H10P30/00; H10P30/20; H10P30/202; H10P30/204; H10D; H10D1/00; H10D1/40; H10D1/43; H10D62/00; H10D62/80; H10D62/83; H10D62/834; H10P30/208; H10W; H10W10/00; H10W10/01; H10W10/031; H10W10/30
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
32 words
A semiconductor device comprising a fluorine ion implantation region which is selectively formed in an N type Group IV semiconductor body and further activated, said region thereby constituting a P type region.
Claim 2
Dependent Claim
32 words
A semiconductor device comprising a fluorine ion implantation region which is selectively formed in an N type Group IV semiconductor body and further activated, said region thereby constituting a P type region.
Claim 3
Dependent Claim
16 words
The semiconductor device of claim 1, wherein said region is used as a high resistance layer.
Claim 4
Dependent Claim
16 words
The semiconductor device of claim 1, wherein said region is used as an electrical isolation layer.
Claim 5
Dependent Claim
16 words
The semiconductor device of claim 1, 2, or 3, wherein the Group IV semiconductor is silicon.
References Cited (Backward Citations)
US3440114A
Cited
WO1979000776A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-12-16 | 1984-06-16 | 1984-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-12-16 | 1988-06-16 | 1988-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-12-16 | 1992-06-16 | 1992-12-16 | $7700.00 | Window Closed / Lapsed |