US4239819A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Deposition method and products
Assignee: Air Products and Chemicals Inc
•
Filing: 1978-12-11
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Granted: 1980-12-16
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Expires: 1998-12-11
Abstract
Abstract A method of depositing a hard, fine grained metal or semi-metal alloy is described wherein a volatile halide of the metal or semi-metal is partially reduced and then deposited as a liquid phase intermediate compound onto a substrate in the presence of an alloying gas. The liquid phase deposited on the substrate is then thermochemically reacted to produce the hard, fine grained alloy. Also described are products which may be produced by the above method.
Inventors
- 👤 Robert A. Holzl
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 06:39
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/50; C04B41/5053; C04B41/80; C04B41/81; C04B41/85; C04B41/87; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/301; C23C16/303; C23C16/32; C23C16/325; C23C16/34; C23C16/345; C23C16/38; C23C16/42; C23C16/44; C23C16/448; C23C16/4481; C23C16/4488; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/60; C30B29/605; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12535; Y10T428/12576; Y10T428/1266; Y10T428/12667; Y10T428/12674; Y10T428/12771; Y10T428/12806; Y10T428/12826; Y10T428/25; Y10T428/256; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
142 words
A method for depositing a hard, fine grained alloy onto a substrate, comprising providing a volatile, gaseous halide of a metal or semi-metal, partially reducing the volatile halide in a first reaction zone by a gaseous reducing agent or particulate metal or semi-metal which is the same as the metal or semi-metal of the volatile halide to be reduced, said first reaction zone having a first pressure and separated from the surface of said substrate, flowing said partially reduced halide into a second reaction zone maintained at a pressure lower than the pressure in said first reaction zone and containing said substrate, providing a gaseous alloying agent in said second reaction zone, and depositing a liquid phase intermediate compound onto a substrate within said second reaction zone, and thermochemically reacting the liquid phase on the substrate to produce the fine grained alloy.
Claim 2
Independent Claim
142 words
A method for depositing a hard, fine grained alloy onto a substrate, comprising providing a volatile, gaseous halide of a metal or semi-metal, partially reducing the volatile halide in a first reaction zone by a gaseous reducing agent or particulate metal or semi-metal which is the same as the metal or semi-metal of the volatile halide to be reduced, said first reaction zone having a first pressure and separated from the surface of said substrate, flowing said partially reduced halide into a second reaction zone maintained at a pressure lower than the pressure in said first reaction zone and containing said substrate, providing a gaseous alloying agent in said second reaction zone, and depositing a liquid phase intermediate compound onto a substrate within said second reaction zone, and thermochemically reacting the liquid phase on the substrate to produce the fine grained alloy.
Claim 3
Dependent Claim
55 words
A method according to claim 1 wherein said metal is selected from the class consisting of aluminum, zirconium, hafnium, vanadium, columbium, tantalum and chromium, said semi-metal is selected from the class consisting of boron and silicon, and said alloying agent furnishes an alloying element selected from the class consisting of nitrogen, boron, carbon and silicon.
Claim 4
Dependent Claim
34 words
A method according to claim 1 or claim 2 wherein said alloying agent furnishes oxygen as an alloying element in addition to at least one of the alloying elements set forth in claim 2.
Claim 5
Dependent Claim
14 words
A method according to claim 1 or claim 2 wherein said metal is aluminum.
Claim 6
Dependent Claim
14 words
A method according to claim 1 or claim 2 wherein said metal is zirconium.
Claim 7
Dependent Claim
14 words
A method according to claim 1 or claim 2 wherein said metal is hafnium.
Claim 8
Dependent Claim
14 words
A method according to claim 1 or claim 2 wherein said metal is vanadium.
Claim 9
Dependent Claim
14 words
A method according to claim 1 or claim 2 wherein said metal is columbium.
Claim 10
Dependent Claim
14 words
A method according to claim 1 or claim 2 wherein said metal is tantalum.
Claim 11
Dependent Claim
14 words
A method according to claim 1 or claim 2 wherein said metal is chromium.
Claim 12
Dependent Claim
16 words
A method according to claim 1 or claim 2 wherein silicon is acting as said metal.
Claim 13
Dependent Claim
16 words
A method according to claim 1 or claim 2 wherein boron is acting as said metal.
Claim 14
Dependent Claim
15 words
A method according to claim 1 or claim 2 wherein said alloying element is boron.
Claim 15
Dependent Claim
15 words
A method according to claim 1 or claim 2 wherein said alloying element is carbon.
Claim 16
Dependent Claim
15 words
A method according to claim 1 or claim 2 wherein said alloying element is silicon.
Claim 17
Dependent Claim
15 words
A method according to claim 1 or claim 2 wherein said alloying element is nitrogen.
Claim 18
Dependent Claim
19 words
A method according to claim 1 or claim 2 wherein said hard alloy is comprised of silicon and carbon.
Claim 19
Dependent Claim
19 words
A method according to claim 1 or claim 2 wherein said hard alloy is comprised of silicon and nitrogen.
Claim 20
Dependent Claim
20 words
A method according to claim 1 or claim 2 wherein said hard alloy is comprised of silicon, nitrogen and oxygen.
Claim 21
Dependent Claim
19 words
A method according to claim 1 or claim 2 wherein said hard alloy is comprised of aluminum and nitrogen.
Claim 22
Dependent Claim
21 words
A method according to claim 1 or claim 2 wherein said hard alloy is comprised of silicon, aluminum, nitrogen and oxygen.
Claim 23
Dependent Claim
19 words
A method according to claim 1 or claim 2 wherein said hard alloy is comprised of zirconium and boron.
Claim 24
Independent Claim
213 words
A method for producing a hard, fine grained alloy on a substrate, comprising placing the substrate in a chemical vapor deposition reactor and heating the substrate to a temperature of between about 650° and about 950° C., providing a flow in the reactor of a gaseous volatile halide of a metal selected from the class consisting of aluminum zirconium, hafnium, vanadium, columbium, tantalum, and chromium, partially reducing the volatile halide to a lower halide in a first reaction zone by a gaseous reducing agent or a particulate metal which is the same as the metal of the volatile halide to be reduced, said first reaction zone having a first pressure and separated from said substrate, flowing said lower halide into a second reaction zone maintained at a pressure lower than the pressure in said first reaction zone, providing in said second reaction zone a gaseous alloying agent which furnishes an alloying element selected from the class consisting of nitrogen, boron, carbon and silicon, and controlling the substrate temperature, the reactor pressure and the relative amounts of said metal and said alloying agent to cause the deposition on the substrate of a compound of said metal which is in a liquid phase, and thermochemically reacting said liquid phase to said hard, fine grained alloy.
Claim 25
Independent Claim
213 words
A method for producing a hard, fine grained alloy on a substrate, comprising placing the substrate in a chemical vapor deposition reactor and heating the substrate to a temperature of between about 650° and about 950° C., providing a flow in the reactor of a gaseous volatile halide of a metal selected from the class consisting of aluminum zirconium, hafnium, vanadium, columbium, tantalum, and chromium, partially reducing the volatile halide to a lower halide in a first reaction zone by a gaseous reducing agent or a particulate metal which is the same as the metal of the volatile halide to be reduced, said first reaction zone having a first pressure and separated from said substrate, flowing said lower halide into a second reaction zone maintained at a pressure lower than the pressure in said first reaction zone, providing in said second reaction zone a gaseous alloying agent which furnishes an alloying element selected from the class consisting of nitrogen, boron, carbon and silicon, and controlling the substrate temperature, the reactor pressure and the relative amounts of said metal and said alloying agent to cause the deposition on the substrate of a compound of said metal which is in a liquid phase, and thermochemically reacting said liquid phase to said hard, fine grained alloy.
Claim 26
Independent Claim
203 words
A method for providing a hard fine grained alloy on a substrate, comprising placing the substrate in a chemical vapor deposition reactor and heating the substrate to a temperature of between about 1000° C. and about 1600° C., providing a flow in the reactor of a gaseous volatile halide of a semi-metal selected from the class consisting of silicon and boron, partially reducing the volatile halide to a lower halide in a first reaction zone by a gaseous reducing agent or a particlate semi-metal which is the same as the semi-metal of the volatile halide to be reduced, said first reaction zone having a first pressure and separated from said substrate, flowing said lower halide into a second reaction zone maintained at a pressure lower than the pressure in said first reaction zone, providing in said second reaction zone a gaseous alloying agent which furnishes an alloying element selected from the class consisting of nitrogen, boron, carbon and silicon, and controlling the substrate temperature, the reactor pressure and the relative amount of said semi-metal and said alloying agent to cause the deposition on the substrate of a liquid phase intermediate compound, and thermochemically reacting said liquid phase to a hard fine grained alloy.
Claim 27
Independent Claim
203 words
A method for providing a hard fine grained alloy on a substrate, comprising placing the substrate in a chemical vapor deposition reactor and heating the substrate to a temperature of between about 1000° C. and about 1600° C., providing a flow in the reactor of a gaseous volatile halide of a semi-metal selected from the class consisting of silicon and boron, partially reducing the volatile halide to a lower halide in a first reaction zone by a gaseous reducing agent or a particlate semi-metal which is the same as the semi-metal of the volatile halide to be reduced, said first reaction zone having a first pressure and separated from said substrate, flowing said lower halide into a second reaction zone maintained at a pressure lower than the pressure in said first reaction zone, providing in said second reaction zone a gaseous alloying agent which furnishes an alloying element selected from the class consisting of nitrogen, boron, carbon and silicon, and controlling the substrate temperature, the reactor pressure and the relative amount of said semi-metal and said alloying agent to cause the deposition on the substrate of a liquid phase intermediate compound, and thermochemically reacting said liquid phase to a hard fine grained alloy.
Claim 28
Dependent Claim
31 words
A method according to claim 24 wherein said alloying agent furnishes oxygen as an alloying element in addition to at least one of the alloying elements set forth in claims 24.
Claim 29
Independent Claim
117 words
A method for depositing a hard fine grained alloy of titanium and nitrogen onto a substrate comprising, providing a volatile gaseous halide of titanium, partially reducing said halide to form a lower halide of titanium in a first reaction zone by a gaseous reducing agent or particulate titanium, said first reaction zone having a first pressure and separated from said substrate, flowing said lower halide into a second reaction zone maintained at a pressure lower than the pressure in said first reaction zone, providing in said second reaction zone a gaseous alloying agent containing nitrogen, depositing a liquid phase intermediate compound on said substrate and thermochemically reacting said liquid phase to produce said hard, fine grained alloy.
Claim 30
Independent Claim
117 words
A method for depositing a hard fine grained alloy of titanium and nitrogen onto a substrate comprising, providing a volatile gaseous halide of titanium, partially reducing said halide to form a lower halide of titanium in a first reaction zone by a gaseous reducing agent or particulate titanium, said first reaction zone having a first pressure and separated from said substrate, flowing said lower halide into a second reaction zone maintained at a pressure lower than the pressure in said first reaction zone, providing in said second reaction zone a gaseous alloying agent containing nitrogen, depositing a liquid phase intermediate compound on said substrate and thermochemically reacting said liquid phase to produce said hard, fine grained alloy.
Claim 31
Dependent Claim
94 words
A hard metal alloy produced from a volatile halide of a metal partially reduced to form a liquid compound containing said alloy which is deposited onto a substrate and thermochemically reacted to produce said alloy, said alloy comprised of a metal selected from the class consisting of aluminum, hafnium, columbium, zirconium and tantalum, and an alloying element selected from the class consisting of nitrogen, boron, carbon and silicon, said alloy being free of columnar crystals and having a crystal structure consisting of fine and substantially equiaxial grains less than about 1 micron in diameter.
Claim 32
Dependent Claim
94 words
A hard metal alloy produced from a volatile halide of a metal partially reduced to form a liquid compound containing said alloy which is deposited onto a substrate and thermochemically reacted to produce said alloy, said alloy comprised of a metal selected from the class consisting of aluminum, hafnium, columbium, zirconium and tantalum, and an alloying element selected from the class consisting of nitrogen, boron, carbon and silicon, said alloy being free of columnar crystals and having a crystal structure consisting of fine and substantially equiaxial grains less than about 1 micron in diameter.
Claim 33
Dependent Claim
80 words
A hard silicon alloy produced from a volatile halide of a silicon partially reduced to form a liquid compound containing silicon deposited onto a substrate and thermochemically reacted to produce said alloy, said alloy comprised of silicon and an alloying element selected from the group consisting of nitrogen, boron and carbon, said alloy being free of columnar crystals and having a crystal structure consisting of fine and substantially equiaxial grains having an average diameter of less than about 0.25 micron.
Claim 34
Dependent Claim
80 words
A hard silicon alloy produced from a volatile halide of a silicon partially reduced to form a liquid compound containing silicon deposited onto a substrate and thermochemically reacted to produce said alloy, said alloy comprised of silicon and an alloying element selected from the group consisting of nitrogen, boron and carbon, said alloy being free of columnar crystals and having a crystal structure consisting of fine and substantially equiaxial grains having an average diameter of less than about 0.25 micron.
Claim 35
Dependent Claim
79 words
A hard boron alloy produced from a volatile halide of boron partially reduced to form a liquid compound containing boron deposited onto a substrate and thermochemically reacted to produce said alloy, said alloy comprised of boron and an alloying agent selected from the group consisting of nitrogen, silicon and carbon, said alloy being free of columnar crystals and having a crystal structure consisting of fine and substantially equiaxial grains having an average diameter of less than about 0.25 micron.
Claim 36
Dependent Claim
79 words
A hard boron alloy produced from a volatile halide of boron partially reduced to form a liquid compound containing boron deposited onto a substrate and thermochemically reacted to produce said alloy, said alloy comprised of boron and an alloying agent selected from the group consisting of nitrogen, silicon and carbon, said alloy being free of columnar crystals and having a crystal structure consisting of fine and substantially equiaxial grains having an average diameter of less than about 0.25 micron.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-12-16 | 1984-06-16 | 1984-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-12-16 | 1988-06-16 | 1988-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-12-16 | 1992-06-16 | 1992-12-16 | $7700.00 | Window Closed / Lapsed |