US4239810A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making silicon photovoltaic cells
Assignee: International Business Machines Corp
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Filing: 1978-11-13
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Granted: 1980-12-16
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Expires: 1998-11-13
Abstract
Abstract A method of making silicon solar cells and other silicon photovoltaic cells. The method includes the steps of forming a silicon element having a metallic electrode coating on one surface of the element, applying to the other surface of the element a coating containing aluminum and silicon and heating the coated element at a temperature below the eutectic temperature of aluminum-silicon to form an antireflective coating of a fine matrix of silicon pyramids doped with aluminum. The matrix formed on the surface of the silicon has an overlying aluminum coating. A portion of the aluminum coating is removed to expose the matrix for use as a photovoltaic cell.
Inventors
- 👤 Oussama Alameddine
- 👤 Marian Briska
- 👤 Klaus P. Thiel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:53
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/20; H10F77/206; H10F77/211; H10F77/70; H10F77/703; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S148/00; Y10S148/033; Y10S438/00; Y10S438/964
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
99 words
A method of making silicon solar cells and other silicon photovoltaic cells and comprising the steps of forming a silicon element having a metallic electrode coating on one surface of said element, applying to the other surface of said element a coating comprising aluminum and silicon, heating said coated element at a temperature below the eutectic temperature of aluminum-silicon to form an antireflective coating of a fine matrix of silicon pyramids doped with aluminum, said matrix having an overlying aluminum coating, and removing a portion of said aluminum coating to expose said matrix for use as a photovoltaic cell.
Claim 2
Independent Claim
99 words
A method of making silicon solar cells and other silicon photovoltaic cells and comprising the steps of forming a silicon element having a metallic electrode coating on one surface of said element, applying to the other surface of said element a coating comprising aluminum and silicon, heating said coated element at a temperature below the eutectic temperature of aluminum-silicon to form an antireflective coating of a fine matrix of silicon pyramids doped with aluminum, said matrix having an overlying aluminum coating, and removing a portion of said aluminum coating to expose said matrix for use as a photovoltaic cell.
Claim 3
Dependent Claim
18 words
A method as recited in claim 1 and comprising the step of doping the silicon element with arsenic.
Claim 4
Dependent Claim
18 words
A method as recited in claim 1 and comprising the step of doping the silicon element with phosphorous.
Claim 5
Dependent Claim
29 words
A method as recited in claim 2, wherein the doping step is performed up to an impurity atom concentration of at most 10 19 atoms per cm 3 .
Claim 6
Independent Claim
44 words
A method as recited in claims 1, 2, 3 or 4, characterized in that the coating of aluminum and silicon is applied to the silicon element by means of cathode sputtering at a target consisting of an aluminum alloy with a high silicon content.
Claim 7
Independent Claim
32 words
A method as recited in claims 1, 2, 3 or 4, characterized in that the coating of aluminum and silicon is applied to the silicon element by means of vacuum vapor deposition.
Claim 8
Dependent Claim
30 words
A method as recited in claim 6, characterized in that a 4000 A thick aluminum layer, and then a 2000 A thick silicon layer are deposited on the silicon element.
Claim 9
Dependent Claim
30 words
A method as recited in claim 7, characterized in that said heating is at a temperature of more than 500° C. with a heating time of 4 to 5 hours.
Claim 10
Dependent Claim
18 words
A method as recited in claim 8, characterized in that the silicon element is formed of nonmonocrystalline silicon.
Claim 11
Dependent Claim
40 words
A method as recited in claim 1, characterized in that a steel substrate is coated with an amorphous N-doped silicon layer of aobut 10 μm thickness and constituting said silicon element, and that subsequently aluminum and silicon are deposited thereon.
Claim 12
Dependent Claim
50 words
A method as recited in claim 1 characterized in that said antireflective coating is formed in a double layer laminate comprising a silicon layer and an aluminum layer, and that subsequently this laminate is tempered in an argon atmosphere for about 2 hours at a temperature of about 450° C.
Claim 13
Dependent Claim
39 words
A method as recited in claim 1 characterized in that said matrix is exposed by applying a wax layer in the form of a comb-shaped electrode to said aluminum coating, and that exposed aluminum areas are thereafter etched off.
Claim 14
Dependent Claim
13 words
A method as recited in claim 12 wherein said wax layer comprises picein.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-12-16 | 1984-06-16 | 1984-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-12-16 | 1988-06-16 | 1988-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-12-16 | 1992-06-16 | 1992-12-16 | $7700.00 | Window Closed / Lapsed |