US4239788A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for the production of semiconductor devices using electron beam delineation
Assignee: Lockheed Martin Corp
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Filing: 1979-06-15
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Granted: 1980-12-16
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Expires: 1999-06-15
Abstract
Abstract A process for forming a delineated vapor deposition film of a deposition material on a substrate. The delineation is accomplished by exposing selected areas of the substrate to an electron beam before depositing the deposition material whereby the sticking coefficients of the selected areas are sufficiently reduced so as to prevent any significant deposition in those areas. Furthermore, irradiated areas of the substrate can be restored to their original surface characteristics by exposure to a second electron beam while the substrate is at an elevated temperature. Thus, areas of the substrate can be negatively delineated to prevent deposition, and such negatively delineated surfaces can then be positively delineated to permit deposition.
Inventors
- 👤 William A. Beck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 14:50
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/048; B; B82; B82Y; B82Y30/00; C30; C30B; C30B23/00; C30B23/02; C30B23/04; H; H10; H10P; H10P14/00; H10P14/20; H10P14/22; H10P14/27; H10P14/271; H10P14/29; H10P14/2901; H10P14/2921; H10P14/34; H10P14/3402; H10P14/3436
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
131 words
A process for forming a delineated vapor deposition grown film of a deposition material on a substrate wherein the film is grown by exposing the substrate to the vapor of the deposition material comprising the steps of: irradiating preselected areas of the substrate, in the presence of a carbon containing gas, with a first electron beam which is capable of altering the surface properties of said preselected areas, heating said substrate to a temperature at which carbon deposits on the irradiated areas, allowing carbon to deposit on said preselected areas, and then exposing the substrate to the vapor of the deposition material, whereby little or no deposition material will deposit on said preselected areas but will deposit on the areas of the substrate which were not exposed to the electron beam.
Claim 2
Dependent Claim
131 words
A process for forming a delineated vapor deposition grown film of a deposition material on a substrate wherein the film is grown by exposing the substrate to the vapor of the deposition material comprising the steps of: irradiating preselected areas of the substrate, in the presence of a carbon containing gas, with a first electron beam which is capable of altering the surface properties of said preselected areas, heating said substrate to a temperature at which carbon deposits on the irradiated areas, allowing carbon to deposit on said preselected areas, and then exposing the substrate to the vapor of the deposition material, whereby little or no deposition material will deposit on said preselected areas but will deposit on the areas of the substrate which were not exposed to the electron beam.
Claim 3
Dependent Claim
45 words
The process of claim 1 wherein the substrate consists essentially of a crystalline barium halide and the deposition material consists essentially of a group IV-VI material comprising a compound of one or more group IV elements in combination with one or more group VI elements.
Claim 4
Dependent Claim
29 words
The process of claim 2 wherein the substrate consists essentially of barium fluoride and the deposition material consists essentially of a lead-tin telluride of the general formula (Pb, Sn)Te.
Claim 5
Dependent Claim
22 words
The process of claim 2 wherein the substrate consists essentially of barium fluoride and the deposition material consists essentially of lead telluride.
Claim 6
Dependent Claim
23 words
The process of claim 1, 2, 3 or 4 wherein the energy level of the first electron beam is at least 100 eV.
Claim 7
Dependent Claim
74 words
The process of claim 1, 2, 3 or 4 further comprising the step of: irradiating a portion of the preselected areas, which were irradiated by the first electron beam, with a second electron beam after the carbon has deposited on the preselected areas, for the purposes of removing the deposited carbon and increasing the sticking coefficients of these twice-irradiated portions of the substrate to a level sufficient to induce the deposition of the film.
Claim 8
Dependent Claim
33 words
The process of claim 5 wherein the energy level of the first electron beam is at least 100 eV and the energy level of the second electron beam is at least 500 eV.
Claim 9
Dependent Claim
143 words
An improved process for forming a delineated pattern of an epitaxially grown film of lead-tin telluride on a barium fluoride substrate wherein lead-tin telluride is deposited on the substrate by placing the substrate in a vacuum chamber, evacuating the chamber to high vacuum, heating the substrate to a pre-determined deposition temperature, and exposing the substrate to a beam of lead-tin telluride vapor, the improvement comprising: lowering the sticking coefficient of preselected areas of the substrate by irradiating said preselected areas, in the presence of a residual carbon containing gas, with a first electron beam after the chamber has been evacuated but before the substrate has been heated to the deposition temperature, whereby the lead-tin telluride will be inhibited from growing on said preselected areas, and said preselected areas will have little or no lead-tin telluride on them after the deposition process is completed.
Claim 10
Dependent Claim
143 words
An improved process for forming a delineated pattern of an epitaxially grown film of lead-tin telluride on a barium fluoride substrate wherein lead-tin telluride is deposited on the substrate by placing the substrate in a vacuum chamber, evacuating the chamber to high vacuum, heating the substrate to a pre-determined deposition temperature, and exposing the substrate to a beam of lead-tin telluride vapor, the improvement comprising: lowering the sticking coefficient of preselected areas of the substrate by irradiating said preselected areas, in the presence of a residual carbon containing gas, with a first electron beam after the chamber has been evacuated but before the substrate has been heated to the deposition temperature, whereby the lead-tin telluride will be inhibited from growing on said preselected areas, and said preselected areas will have little or no lead-tin telluride on them after the deposition process is completed.
Claim 11
Dependent Claim
66 words
The process of claim 8 wherein the improvement further comprises: irradiating a portion of said preselected areas, which were irradiated by the said first electron beam, while the substrate is at or near the deposition temperature, with a second electron beam to increase the sticking coefficients of these twice-irradiated portions of the substrate to a level sufficient to induce the deposition of the epitaxially grown film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-12-16 | 1984-06-16 | 1984-12-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-12-16 | 1988-06-16 | 1988-12-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-12-16 | 1992-06-16 | 1992-12-16 | $7700.00 | Window Closed / Lapsed |