Dry film photosensitive resist

Claim 1

A dry film photosensitive resist comprising a flexible laminated structure consisting of three layers: a first transparent polymer film transmitting UV radiation and having a thickness of 5-100μ; a second light-sensitive layer having a thickness of 5-1,000μ consisting essentially of: (a) a carboxyl-containing polymer thickener consisting essentially of a water insoluble copolymer obtained by the polymerization of at least one carboxyl-containing monomer with at least one water insoluble monomer having a water solubility of less than 3 weight % at 20° C. and a pH of 7, the amount of carboxyl-containing monomer in the polymer ranging from 20 to 50 mol%; (b) a hydroxyl-containing polar oligomer obtained through addition of an organic acid to at least one epoxy resin, said polar oligomer having a chain length of from 300 to 3,000 carbon units, and containing 4 to 8 weight % OH groups and wherein the number of residual epoxy groups in the polar oligomer ranges from zero to 10% of the initial number of epoxy groups; (c) a monomeric substance having a boiling point above 200° C. at 760 mm Hg containing at least one fully substituted ester of a polyatomic alcohol with carboxylic acids, at least two hydroxyl groups of the polyatomic alcohol being substituted by residues of methacrylic and/or acrylic acid; the weight ratio of said polymer-thickener, polar oligomer, and monomeric substance in the light-sensitive layer being 100:15-100:15-100 respectively; a third layer comprising a polymeric film having a thickness of 5-100μ to form a protective layer for the light-sensitive layer and disposed thereon, all of the three layers being adhesively bonded together.

Claim 22

A method for making a dry film photosensitive resist developable with aqueous solutions of weak alkalies without the addition of organic substances to ensure high stability in acid media, which comprises forming a flexible laminated structure consisting of three layers; a first transparent polymer film transmitting UV radiation and having a thickness of 5-100μ; a second light-sensitive layer having a thickness of 5-1,000μ consisting essentially of: (a) a carboxyl-containing polymer thickener consisting essentially of a water insoluble copolymer obtained by the polymerization of at least one carboxyl-containing monomer with at least one water insoluble monomer having a water solubility of less than 3 weight % at 20° C. and a pH of about 7, the amount of carboxylic-containing monomer in the polymer ranging from 20 to 50 mol. %; (b) a hydroxyl-containing polar oligomer obtained through addition of an organic acid to at least one epoxy resin, said polar oligomer haing a chain length of from 300 to 3,000 carbon units, and containing 4 to 8 weight % OH groups and wherein the number of residual epoxy groups in the polar oligomer ranges from zero to 10% of the initial number of epoxy groups; (c) a monomeric substance having a boiling point above 200° C. at 760 mm Hg containing at least one fully substituted ester of a polyatomic alcohol with carboxylic acids, at least two hydroxyl groups of the polyatomic alcohol being substituted by residues of methacrylic and/or acrylic acid; the weight ratio of said polymer-thickener, polar oligomer, and monomeric substance in the light-sensitive layer being 100:15-100:15-100 respectively; a third layer comprising a polymeric film having a thickness of 5-100μ to form a protective layer for the light-sensitive layer and disposed thereon, all the three layers being adhesively bonded together.

Claim 23

A method for making a dry film photosensitive resist developable with aqueous solutions of weak alkalies without the addition of organic substances to ensure high stability in acid media, which comprises forming a flexible laminated structure consisting of three layers; a first transparent polymer film transmitting UV radiation and having a thickness of 5-100μ; a second light-sensitive layer having a thickness of 5-1,000μ consisting essentially of: (a) a carboxyl-containing polymer thickener consisting essentially of a water insoluble copolymer obtained by the polymerization of at least one carboxyl-containing monomer with at least one water insoluble monomer having a water solubility of less than 3 weight % at 20° C. and a pH of about 7, the amount of carboxylic-containing monomer in the polymer ranging from 20 to 50 mol. %; (b) a hydroxyl-containing polar oligomer obtained through addition of an organic acid to at least one epoxy resin, said polar oligomer haing a chain length of from 300 to 3,000 carbon units, and containing 4 to 8 weight % OH groups and wherein the number of residual epoxy groups in the polar oligomer ranges from zero to 10% of the initial number of epoxy groups; (c) a monomeric substance having a boiling point above 200° C. at 760 mm Hg containing at least one fully substituted ester of a polyatomic alcohol with carboxylic acids, at least two hydroxyl groups of the polyatomic alcohol being substituted by residues of methacrylic and/or acrylic acid; the weight ratio of said polymer-thickener, polar oligomer, and monomeric substance in the light-sensitive layer being 100:15-100:15-100 respectively; a third layer comprising a polymeric film having a thickness of 5-100μ to form a protective layer for the light-sensitive layer and disposed thereon, all the three layers being adhesively bonded together.