US4231657A
Expired / Lapsed
US
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Light-reflection type pattern forming system
Assignee: Hitachi Ltd
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Filing: 1979-03-22
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Granted: 1980-11-04
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Expires: 1999-03-22
Abstract
Abstract A light-reflection type pattern forming system used in the process for producing semiconductor devices. The system comprises a light source, a light-reflection type mask having a highly reflective region with a desired pattern on its surface, and an object to be exposed by the light reflected from said highly reflective region. The reflected light contains the information about the desired pattern and the desired pattern is copied on the object. Since this constitution uses reflected light instead of transmitted light, the absorption of light can be prevented and also the restriction on the range of wavelengths of the light from the source can be removed. The part of the incident light cast on the region other than the highly reflective region is absorbed, irregularly reflected or diverted so as not to expose the object.
Inventors
- 👤 Seiichi Iwamatsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 09:00
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70283; G03F7/20; G03F7/2002
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
172 words
A light-reflection type pattern forming system comprising: a light source producing light along a predetermined path; a light-reflection substrate having a main surface facing said light source, said substrate including a highly-reflective pattern region made of a material of high light reflection formed in a selected portion of the main surface thereof, and a poorly-reflective pattern region made of a material of poor light reflection formed in the remainder of the main surface of said substrate to form a predetermined pattern on said substrate, said highly-reflective and poorly-reflective pattern regions being exposed on said main surface and having their surfaces on the same plane, said substrate being disposed on the path of said light source whereby the highly-reflective and poorly-reflective pattern regions are exposed to the light from said light source with a predetermined angle of incidence; and an object to be exposed, disposed at a distance from the path of said light source and positioned to receive light reflected from said highly-reflective pattern region on the main surface of said substrate.
Claim 2
Dependent Claim
172 words
A light-reflection type pattern forming system comprising: a light source producing light along a predetermined path; a light-reflection substrate having a main surface facing said light source, said substrate including a highly-reflective pattern region made of a material of high light reflection formed in a selected portion of the main surface thereof, and a poorly-reflective pattern region made of a material of poor light reflection formed in the remainder of the main surface of said substrate to form a predetermined pattern on said substrate, said highly-reflective and poorly-reflective pattern regions being exposed on said main surface and having their surfaces on the same plane, said substrate being disposed on the path of said light source whereby the highly-reflective and poorly-reflective pattern regions are exposed to the light from said light source with a predetermined angle of incidence; and an object to be exposed, disposed at a distance from the path of said light source and positioned to receive light reflected from said highly-reflective pattern region on the main surface of said substrate.
Claim 3
Dependent Claim
56 words
A light-reflection type pattern forming system as claimed in claim 1, wherein said poorly-reflective pattern region, comprises a layer of transparent material in which said highly-reflective pattern region is embedded and said substrate further has a layer of light-absorptive material provided on the surface of said substrate opposite to said main surface facing said light source.
Claim 4
Dependent Claim
139 words
A light-reflection type pattern forming system, comprising: a light source producing light along a predetermined path; a light-reflection substrate having a main surface, said substrate being transparent and having a highly-reflective pattern region made of a material of high light reflection disposed on a selected portion of the main surface thereof, said substrate being disposed on the path of said light source whereby the highly-reflective pattern region is exposed to the light from said light source; an object to be exposed, disposed at a distance from the path of said light source and positioned to receive light reflected from said highly-reflective pattern region on the main surface of said substrate; and means disposed on the opposite side of said substrate from said main surface for reflecting light which passes through said substrate in a direction away from said object.
Claim 5
Dependent Claim
139 words
A light-reflection type pattern forming system, comprising: a light source producing light along a predetermined path; a light-reflection substrate having a main surface, said substrate being transparent and having a highly-reflective pattern region made of a material of high light reflection disposed on a selected portion of the main surface thereof, said substrate being disposed on the path of said light source whereby the highly-reflective pattern region is exposed to the light from said light source; an object to be exposed, disposed at a distance from the path of said light source and positioned to receive light reflected from said highly-reflective pattern region on the main surface of said substrate; and means disposed on the opposite side of said substrate from said main surface for reflecting light which passes through said substrate in a direction away from said object.
Claim 6
Dependent Claim
65 words
A system as claimed in claim 3, wherein said system incorporates therein a supporting means having a layer of a light-absorptive material on at least one of the surfaces thereof, said substrate being placed on said supporting means in such a manner that the surface of said substrate opposite to said main surface thereof facing said light source, faces said layer of said light-absorptive material.
Claim 7
Dependent Claim
57 words
A system as claimed in claim 3 wherein a second surface of said substrate is disposed at an angle to said main surface and said reflecting means comprises a layer of reflective material provided on said second surface for reflecting the light having passed through said substrate in a direction other than a direction toward said object.
Claim 8
Dependent Claim
56 words
A system as claimed in claim 3 or claim 4, wherein said system incorporates therein a reflector disposed separately from and on the side of said substrate opposite to said main surface thereof facing said light source, for reflecting the light having passed through said substrate in a direction other than a direction toward said object.
Claim 9
Dependent Claim
21 words
A system as claimed in claim 1, wherein said poorly reflective region is formed of a compound composed mainly of carbon.
Claim 10
Dependent Claim
38 words
A system as claimed in claim 1, wherein said poorly-reflective region of said substrate facing said light source is formed by a surface configuration in said region having a configuration to cause irregular reflection of light impinging thereon.
Claim 11
Dependent Claim
17 words
A system as claimed in claim 1, wherein said highly-reflective region is provided with a mirror surface.
Claim 12
Dependent Claim
13 words
A system as claimed in claim 9, wherein said highly-reflective region is aluminum.
Claim 13
Dependent Claim
34 words
A system as claimed in claim 1, wherein said main surface of said substrate facing said light source is concave so that said desired pattern is copied on said object on a reduced scale.
Claim 14
Dependent Claim
34 words
A system as claimed in claim 1, wherein said main surface of said substrate facing said light source is convex so that said desired pattern is copied on said object on a magnified scale.
Claim 15
Dependent Claim
36 words
A system as claimed in claim 1, further comprising a reflector positioned to change the path of the reflected light from said highly reflective region, the light reflected from said reflector being cast on said object.
Claim 16
Dependent Claim
15 words
A system as claimed in claim 1, wherein said light source emits deep ultra-violet light.
Claim 17
Independent Claim
119 words
A method of producing a graphic pattern from a reflection type pattern mask comprising the steps of: preparing a reflection type pattern mask including a region of material of high reflectivity and a region of material of poor reflectivity which are exposed on one surface of said mask, whereby a predetermined reflection type pattern is formed by both the regions, both the regions having their respective exposed surfaces which are on the same plane; irradiating said one surface of said reflection type pattern mask with light from a light source at a predetermined incident angle; and receiving at an exposure object position light reflected at a certain reflection angle from said one surface of said reflection type pattern mask.
Claim 18
Independent Claim
119 words
A method of producing a graphic pattern from a reflection type pattern mask comprising the steps of: preparing a reflection type pattern mask including a region of material of high reflectivity and a region of material of poor reflectivity which are exposed on one surface of said mask, whereby a predetermined reflection type pattern is formed by both the regions, both the regions having their respective exposed surfaces which are on the same plane; irradiating said one surface of said reflection type pattern mask with light from a light source at a predetermined incident angle; and receiving at an exposure object position light reflected at a certain reflection angle from said one surface of said reflection type pattern mask.
References Cited (Backward Citations)
US3579338A
Cited
US4115003A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-11-04 | 1984-05-05 | 1984-11-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-11-04 | 1988-05-05 | 1988-11-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-11-04 | 1992-05-05 | 1992-11-04 | $7700.00 | Window Closed / Lapsed |