Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
178 words
A shield-type coaxial vacuum feedthrough comprising a pin of metal round bar, a first ceramic cylinder enclosing the metal pin, a first metal cylinder enclosing the first ceramic cylinder, a second ceramic cylinder enclosing the first metal cylinder, and a second metal cylinder enclosing the second ceramic cylinder, the first ceramic cylinder air-tightly fixing to the metal pin at a first fixing point and to the first metal cylinder at a second fixing point axially departing from the first fixing point, the second ceramic cylinder airtightly fixing to the first metal cylinder at a third fixing point axially departing from the first and second fixing points and to the second metal cylinder at a fourth fixing point axially departing from the first, second and third fixing points, wherein the first ceramic cylinder has a larger-diameter part fixing to the first metal cylinder and the metal pin has a smaller-diameter part in a position corresponding thereto so that the characteristic impedance of the area corresponding to the larger-diameter part is matched with the characteristic impedance of the adjacent area.
Claim 2
Dependent Claim
178 words
A shield-type coaxial vacuum feedthrough comprising a pin of metal round bar, a first ceramic cylinder enclosing the metal pin, a first metal cylinder enclosing the first ceramic cylinder, a second ceramic cylinder enclosing the first metal cylinder, and a second metal cylinder enclosing the second ceramic cylinder, the first ceramic cylinder air-tightly fixing to the metal pin at a first fixing point and to the first metal cylinder at a second fixing point axially departing from the first fixing point, the second ceramic cylinder airtightly fixing to the first metal cylinder at a third fixing point axially departing from the first and second fixing points and to the second metal cylinder at a fourth fixing point axially departing from the first, second and third fixing points, wherein the first ceramic cylinder has a larger-diameter part fixing to the first metal cylinder and the metal pin has a smaller-diameter part in a position corresponding thereto so that the characteristic impedance of the area corresponding to the larger-diameter part is matched with the characteristic impedance of the adjacent area.
Claim 3
Dependent Claim
52 words
A shield-type coaxial vacuum feedthrough according to claim 1, wherein the second ceramic cylinder has a peripheral surface that is exposed to the atmosphere adjacent to the fourth fixing point and the second metal cylinder has an end protruding beyond the second ceramic cylinder toward a vacuum vessel and airtightly fixing thereto.
Claim 4
Dependent Claim
232 words
A shielded coaxial vacuum feedthrough, comprising: a round metallic pin; a first ceramic cylinder coaxial with and surrounding a side surface portion of said metal pin; a first metallic cylinder coaxial with and surrounding a side surface portion of said first ceramic cylinder; a second ceramic cylinder coaxial with and surrounding a side surface portion of said first metallic cylinder; and a second metallic cylinder coaxial with and surrounding a side surface portion of said second ceramic cylinder; said first ceramic cylinder hermetically sealed to said metallic pin at a first position and hermetically sealed to said first metallic cylinder at a second position axially spaced from said first position; said second ceramic cylinder hermetically sealed to said first metallic cylinder at a third position axially spaced from said first and second positions and hermetically sealed to said second metallic cylinder at a fourth position axially spaced from said first, second and third positions; said first ceramic cylinder having a large-diameter portion equal to an inner diameter of said first metallic cylinder for fixing said first ceramic cylinder within said first metallic cylinder; and said metallic pin having a small-diameter portion at the same axial position as said large diameter portion of said first ceramic cylinder for matching a characteristic impedance of the portion of the feedthrough at said large-diameter portion of said first ceramic cylinder with adjacent portions of the feedthrough.
Claim 5
Dependent Claim
232 words
A shielded coaxial vacuum feedthrough, comprising: a round metallic pin; a first ceramic cylinder coaxial with and surrounding a side surface portion of said metal pin; a first metallic cylinder coaxial with and surrounding a side surface portion of said first ceramic cylinder; a second ceramic cylinder coaxial with and surrounding a side surface portion of said first metallic cylinder; and a second metallic cylinder coaxial with and surrounding a side surface portion of said second ceramic cylinder; said first ceramic cylinder hermetically sealed to said metallic pin at a first position and hermetically sealed to said first metallic cylinder at a second position axially spaced from said first position; said second ceramic cylinder hermetically sealed to said first metallic cylinder at a third position axially spaced from said first and second positions and hermetically sealed to said second metallic cylinder at a fourth position axially spaced from said first, second and third positions; said first ceramic cylinder having a large-diameter portion equal to an inner diameter of said first metallic cylinder for fixing said first ceramic cylinder within said first metallic cylinder; and said metallic pin having a small-diameter portion at the same axial position as said large diameter portion of said first ceramic cylinder for matching a characteristic impedance of the portion of the feedthrough at said large-diameter portion of said first ceramic cylinder with adjacent portions of the feedthrough.
Claim 6
Dependent Claim
52 words
A shielded coaxial vacuum feedthrough according to claim 3, wherein a portion of said second ceramic cylinder extends beyond said second metallic cylinder in one axial direction of the feedthrough, and a portion of said second metallic cylinder extends beyond said second ceramic cylinder in the opposite axial direction of the feedthrough.