US4226649A
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Method for epitaxial growth of GaAs films and devices configuration independent of GaAs substrate utilizing molecular beam epitaxy and substrate removal techniques
Assignee: United States Department of the Navy
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Filing: 1979-09-11
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Granted: 1980-10-07
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Expires: 1999-09-11
Abstract
Abstract A method of growing high-quality, super-abrupt, thin-film epitaxial layers independent of a GaAs substrate. An elemental semiconductor of germanium is used to initiate growth of an active material, typically doped n-type. A semi-insulating layer or n+ layer is grown on the n-type active material. Subsequent to growth of the semi-insulating layer, a thin cap of germanium is deposited on the composite. Gold is deposited onto the germanium cap to form an eutectic-alloy layer with the germanium. The alloy is formed and the composite is bonded to a metal, glass, or ceramic substrate and the semiconductor (germanium) is removed by etching and the n-layer is finally etched to provide a clean-up and to tailor the layer to a desired thickness. Subsequent steps are employed to form desired structures such as field-effect transistors or Schottky-barrier devices.
Inventors
- 👤 John E. Davey
- 👤 Aristos Christou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:08
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1914; H10W; H10W72/00; H10W72/30; H10D; H10D62/00; H10D62/80; H10D62/85; H10P14/00; H10P14/20; H10P14/22; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3421; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/36; H10W72/071; H10W72/073; H10W72/07331; H10W72/07336; Y; Y10; Y10S; Y10S438/00; Y10S438/933; Y10S438/977
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
232 words
A method of growing high-quality super-abrupt thin-film epitaxial layers to form a composite comprising: polishing one surface of a high-resistivity, low-dislocation-count, germanium substrate, placing said polished germanium substrate into a vacuum deposition system, evacuating said system to a high vacuum, outgassing said substrate by heating said evacuated system to a temperature greater than a molecular beam epitaxial growth temperature, lowering the temperature of the system to the molecular beam epitaxial growth temperature for GaAs, growing a thin layer of n-doped GaAs onto said polished surface of said germanium substrate from a n-type doping source, abruptly shutting off said n-type doping source, simultaneous with shutting off said n-type doping source, initiating the growth of a semi-insulating layer without interrupting the GaAs growth process to obtain a layer of desired thickness, growing a thin layer of germanium onto said semi-insulating layer, reheating said doped substrate sufficiently to deposit a layer of gold onto said thin germanium layer to form a gold-germanium alloy, removing the layered substrate from said vacuum system and bonding the gold-germanium layer to a carrier substrate, applying a protective coating to the ends and edges of said composite up to said germanium substrate, etching said germanium substrate from the layered substrate, and etching said GaAs layer to tailor said GaAs layer to a desired thickness, whereby said GaAs layer may be photolithographically processed to form desired structures such as GaAs field-effect-transistors.
Claim 2
Independent Claim
232 words
A method of growing high-quality super-abrupt thin-film epitaxial layers to form a composite comprising: polishing one surface of a high-resistivity, low-dislocation-count, germanium substrate, placing said polished germanium substrate into a vacuum deposition system, evacuating said system to a high vacuum, outgassing said substrate by heating said evacuated system to a temperature greater than a molecular beam epitaxial growth temperature, lowering the temperature of the system to the molecular beam epitaxial growth temperature for GaAs, growing a thin layer of n-doped GaAs onto said polished surface of said germanium substrate from a n-type doping source, abruptly shutting off said n-type doping source, simultaneous with shutting off said n-type doping source, initiating the growth of a semi-insulating layer without interrupting the GaAs growth process to obtain a layer of desired thickness, growing a thin layer of germanium onto said semi-insulating layer, reheating said doped substrate sufficiently to deposit a layer of gold onto said thin germanium layer to form a gold-germanium alloy, removing the layered substrate from said vacuum system and bonding the gold-germanium layer to a carrier substrate, applying a protective coating to the ends and edges of said composite up to said germanium substrate, etching said germanium substrate from the layered substrate, and etching said GaAs layer to tailor said GaAs layer to a desired thickness, whereby said GaAs layer may be photolithographically processed to form desired structures such as GaAs field-effect-transistors.
Claim 3
Dependent Claim
27 words
A method as claimed claim 1 wherein: said high temperature vacuum system is heated to a temperature of from about 550°-600° C. to outgass said germanium substrate.
Claim 4
Dependent Claim
34 words
A method as claimed in claim 1 wherein: the concentration of said n-type doped layer is about 10 17 /cm 3 , and the thickness of said n-type doped layer is 3-5×10 3 A.
Claim 5
Dependent Claim
34 words
A method as claimed in claim 2 wherein: the concentration of said n-type doped layer is about 10 17 /cm 3 , and the thickness of said n-type doped layer is 3-5×10 3 A.
Claim 6
Dependent Claim
23 words
A method as claimed in claim 3 wherein: the temperature of said second vacuum system is from about 500° to about 575° C.
Claim 7
Dependent Claim
23 words
A method as claimed in claim 4 wherein: the temperature for reheating said doped substrate is from about 500° to about 575° C.
Claim 8
Dependent Claim
18 words
A method as claimed in claim 5 wherein: the thickness of said semi-insulating layer is from 1-5 μm.
Claim 9
Dependent Claim
18 words
A method as claimed in claim 6 wherein: the thickness of said semi-insulating layer is from 1-5 μm.
Claim 10
Dependent Claim
22 words
A method as claimed in claim 7 wherein: said thin layer of germanium has a thickness of from about 3-5×10 3 A.
Claim 11
Dependent Claim
22 words
A method as claimed in claim 8 wherein: said thin layer of germanium has a thickness of from about 3-5×10 3 A.
Claim 12
Independent Claim
226 words
A method of growing high-quality thin-film epitaxial layers comprising: polishing one surface of a high-resistivity, low-dislocation-count germanium substrate by chemically polishing said one surface, placing said germanium substrate in a vacuum system, evacuating said vacuum system to a high vacuum pressure, heating said vacuum system to a temperature greater than the molecular beam epitaxial growth temperature for GaAs, to outgas said germanium substrate, lowering the temperature of said vacuum system to the molecular beam epitaxial growth temperature for GaAs, growing a thin layer of n-doped GaAs onto said prepared surface of said germanium from a n-type doping source, abruptly changing the concentration of n-dopant to produce a n + layer with a super abrupt interface to the n-layer to form a composite, growing a thin layer of germanium on the n + doped layer of germanium, reheating said vacuum system sufficiently to deposit a layer of gold onto said germanium to form an Au-Ge alloy, removing the composite from said vacuum system and bonding the Au-Ge alloy layer side to a carrier substrate, applying an etchant protective coating to the ends and edges of said composite up to the edge of the germanium substrate, etching said germanium substrate from the composite, etching said GaAs layer to tailor said GaAs layer to a desired thickness and smoothness, and evaporating a Schottky barrier on the layer of GaAs.
Claim 13
Independent Claim
226 words
A method of growing high-quality thin-film epitaxial layers comprising: polishing one surface of a high-resistivity, low-dislocation-count germanium substrate by chemically polishing said one surface, placing said germanium substrate in a vacuum system, evacuating said vacuum system to a high vacuum pressure, heating said vacuum system to a temperature greater than the molecular beam epitaxial growth temperature for GaAs, to outgas said germanium substrate, lowering the temperature of said vacuum system to the molecular beam epitaxial growth temperature for GaAs, growing a thin layer of n-doped GaAs onto said prepared surface of said germanium from a n-type doping source, abruptly changing the concentration of n-dopant to produce a n + layer with a super abrupt interface to the n-layer to form a composite, growing a thin layer of germanium on the n + doped layer of germanium, reheating said vacuum system sufficiently to deposit a layer of gold onto said germanium to form an Au-Ge alloy, removing the composite from said vacuum system and bonding the Au-Ge alloy layer side to a carrier substrate, applying an etchant protective coating to the ends and edges of said composite up to the edge of the germanium substrate, etching said germanium substrate from the composite, etching said GaAs layer to tailor said GaAs layer to a desired thickness and smoothness, and evaporating a Schottky barrier on the layer of GaAs.
Claim 14
Dependent Claim
28 words
A method as claimed in claim 11 wherein: said high temperature vacuum system is heated to a temperature of from about 550°-600° C. to outgas said germanium substrate.
Claim 15
Dependent Claim
22 words
A method as claimed in claim 11 wherein: the concentration of said n-type doped layer is about 10 17 /cm 3 .
Claim 16
Dependent Claim
22 words
A method as claimed in claim 12 wherein: the concentration of said n-type doped layer is about 10 17 /cm 3 .
Claim 17
Dependent Claim
24 words
A method as claimed in claim 13 wherein: the temperature during reheating of said vacuum system is from about 500° to about 575° C.
Claim 18
Dependent Claim
24 words
A method as claimed in claim 14 wherein: the temperature during reheating of said vacuum system is from about 500° to about 575° C.
Claim 19
Dependent Claim
30 words
A method as claimed in claim 15 wherein: the concentration of said n + layer is greater than 10 18 /cm 3 and has a thickness of from 0.5-3 μm.
Claim 20
Dependent Claim
30 words
A method as claimed in claim 16 wherein: the concentration of said n + layer is greater than 10 18 /cm 3 and has a thickness of from 0.5-3 μm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-10-07 | 1984-04-07 | 1984-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-10-07 | 1988-04-07 | 1988-10-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-10-07 | 1992-04-07 | 1992-10-07 | $7700.00 | Window Closed / Lapsed |