US4223088A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming defined conductive patterns in a thin gold film
Assignee: Xerox Corp
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Filing: 1979-01-26
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Granted: 1980-09-16
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Expires: 1999-01-26
Abstract
Abstract A method of forming a defined conductive pattern in a laminar film comprising a thin gold layer interposed between an insulating substrate and a ceramic overlay is disclosed. A base etchant is employed to remove the thin ceramic layer but itself will not etch or remove the gold film layer. Upon removal of the ceramic layer, the exposed gold layer may be removed without any chemical treatment or assistance. Such removal may, for example, be accomplished by fluid agitation or exposure to a fluid stream or by swabbing. A pretreatment of the film surface prior to etching enhances the adhesion of the photoresist subsequently applied to the film surface.
Inventors
- 👤 David D. Thornburg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 09:14
CPC Classifications
G; G03; G03F; G03F7/00
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
164 words
A method of forming a defined conductive pattern in a laminar film, said film comprising a thin gold layer interposed between an insulating substrate and a thin ceramic overlayer, comprising the steps of: (a) forming an etch resistant pattern corresponding to said defined conductive pattern on said ceramic layer, (b) immersing the film in a base etchant both comprising potassium hydroxide for removing said ceramic layer in nonpattern areas while exposing said gold layer, the exposure of the gold layer permitting removal thereof chemically unassisted by said etchant, and (c) forceably applying a medium to said exposed gold layer causing the mechanical removal thereof in said nonpattern areas, wherein the step of applying a medium comprises either (A) agitating the film while immersed in the base etchant bath, (B) directing a fluid stream of a non-etchant for gold against the surface of the film, (C) swabbing the surface of the film with a non-etchant for gold, or, (D) a combination of such medium applications.
Claim 2
Independent Claim
164 words
A method of forming a defined conductive pattern in a laminar film, said film comprising a thin gold layer interposed between an insulating substrate and a thin ceramic overlayer, comprising the steps of: (a) forming an etch resistant pattern corresponding to said defined conductive pattern on said ceramic layer, (b) immersing the film in a base etchant both comprising potassium hydroxide for removing said ceramic layer in nonpattern areas while exposing said gold layer, the exposure of the gold layer permitting removal thereof chemically unassisted by said etchant, and (c) forceably applying a medium to said exposed gold layer causing the mechanical removal thereof in said nonpattern areas, wherein the step of applying a medium comprises either (A) agitating the film while immersed in the base etchant bath, (B) directing a fluid stream of a non-etchant for gold against the surface of the film, (C) swabbing the surface of the film with a non-etchant for gold, or, (D) a combination of such medium applications.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein said solution comprises 10% by weight of potassium hydroxide in water.
Claim 4
Dependent Claim
43 words
The method of claim 1 wherein said ceramic layer is coated with a photoresist, said photoresist coating being exposed to light through a masking pattern, said light being incident on said photoresist coating to form a pattern corresponding to said defined conductive pattern.
Claim 5
Dependent Claim
29 words
The method of claim 1 wherein there is included the step of pretreating the surface of the film with a solution of hexamethyldisilazane prior to etch resistant pattern formation.
Claim 6
Dependent Claim
31 words
The method of claim 1 wherein the step of immersion is preferably carried out with the temperature of the etchant being in a temperature range from 35° C. to 50° C.
Claim 7
Dependent Claim
25 words
The method of claim 5 wherein the time range of immersion is from 15 seconds to 100 seconds depending upon the temperature of the etchant.
Claim 8
Independent Claim
180 words
A method of forming a defined conductive pattern in a laminar film, said film comprising a thin gold layer interposed between an insulating substrate and a thin ceramic overlayer, comprising the steps of: (a) forming an etch resistant pattern corresponding to said defined conductive pattern on said ceramic layer, (b) providing a base etchant bath comprising potassium hydroxide, (c) maintaining the temperature of the etchant in a temperature range from 35° C. to 50° C., (d) chemically removing the ceramic layer in nonpattern areas by immersing the film in the base etchant bath thereby exposing the gold layer in said nonpattern areas, (e) mechanically removing the gold layer in said nonpattern areas by applying a medium to the surface of said exposed gold layer, wherein the step of applying a medium comprises either (A) agitating the film while immersed in the base etchant bath, (B) directing a fluid stream of a non-etchant for gold against the surface of the film, (C) swabbing the surface of the film with a non-etchant for gold, or, (D) a combination of such medium applications.
Claim 9
Independent Claim
180 words
A method of forming a defined conductive pattern in a laminar film, said film comprising a thin gold layer interposed between an insulating substrate and a thin ceramic overlayer, comprising the steps of: (a) forming an etch resistant pattern corresponding to said defined conductive pattern on said ceramic layer, (b) providing a base etchant bath comprising potassium hydroxide, (c) maintaining the temperature of the etchant in a temperature range from 35° C. to 50° C., (d) chemically removing the ceramic layer in nonpattern areas by immersing the film in the base etchant bath thereby exposing the gold layer in said nonpattern areas, (e) mechanically removing the gold layer in said nonpattern areas by applying a medium to the surface of said exposed gold layer, wherein the step of applying a medium comprises either (A) agitating the film while immersed in the base etchant bath, (B) directing a fluid stream of a non-etchant for gold against the surface of the film, (C) swabbing the surface of the film with a non-etchant for gold, or, (D) a combination of such medium applications.
Claim 10
Dependent Claim
35 words
The method of claim 7 wherein the time of immersion of the film in the base etchant bath is from 15 seconds to 100 seconds depending on the selected temperature of the base etchant bath.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-09-16 | 1984-03-17 | 1984-09-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-09-16 | 1988-03-17 | 1988-09-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-09-16 | 1992-03-17 | 1992-09-16 | $7700.00 | Window Closed / Lapsed |