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US4217783A Expired / Lapsed US ⏱️ 0.0 years remaining

Magnetoresistive pressure-sensing device for automotive electronic engine control systems

Assignee: NEC Corp
•
Filing: 1979-02-15
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Granted: 1980-08-19
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Expires: 1999-02-15
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Abstract

Abstract A pressure sensor comprises essentially magnetoresistive elements formed on a diaphragm serving as a stress magnifier. The diaphragm may be made, for example, of glass in a thickness of 0.5 millimeter, and the magnetoresistive elements can be formed thereon in any desired pattern of thin stripes by ordinary thin-film techniques. Such sensor elements can be mass produced, e.g., by vapor deposition and etching on a large sheet of diaphragm material and cutting into chips of desired shape and size.

Inventors

  • 👤 Susumu Ito
  • 👤 Morimasa Nagao
  • 👤 Toshio Yamagata
  • 👤 Nobuyuki Hayama

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 11:40
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/16; G01L9/0041; G01L9/0051

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 134 words
A magnetoresistive pressure-sensing device for use in an automotive electronic engine control system comprising: a casing having an interior space divided into two chambers by a partition plate having a central aperture; a diaphragm held fixed over said aperture and on said partition plate; means for introducing into one of said chambers a fluid having a pressure which is to be measured; means for introducing a fluid under a reference pressure into the other of said chambers; said diaphragm being deflectible under the pressure differential of said fluids introduced into the two casing chambers; at least one magnetoresistive element mounted on said diaphragm for producing an electric resistance change depending on the deflection of said diaphragm; and a detector for detecting the variation in electric resistance of said magnetoresistive element responsive to said deflection.
Claim 2
Dependent Claim 134 words
A magnetoresistive pressure-sensing device for use in an automotive electronic engine control system comprising: a casing having an interior space divided into two chambers by a partition plate having a central aperture; a diaphragm held fixed over said aperture and on said partition plate; means for introducing into one of said chambers a fluid having a pressure which is to be measured; means for introducing a fluid under a reference pressure into the other of said chambers; said diaphragm being deflectible under the pressure differential of said fluids introduced into the two casing chambers; at least one magnetoresistive element mounted on said diaphragm for producing an electric resistance change depending on the deflection of said diaphragm; and a detector for detecting the variation in electric resistance of said magnetoresistive element responsive to said deflection.
Claim 3
Dependent Claim 30 words
A magnetoresistive pressure-sensing device as claimed in claim 1, in which said at least one magnetoresistive element is mounted on said diaphragm at the central or the peripheral region thereof.
Claim 4
Dependent Claim 39 words
A magnetoresistive pressure-sensing device as claimed in claim 1, which includes at least two magnetoresistive elements, one being formed of a material having a positive magnetoresistive constant and the other formed of a material having a negative magnetoresistive constant.
Claim 5
Dependent Claim 21 words
A magnetoresistive pressure-sensing device as claimed in claim 1, in which the reference pressure in said other chamber is a vacuum.
Claim 6
Dependent Claim 22 words
A magnetoresistive pressure-sensing device as claimed in claim 1, in which said other chamber in said casing is filled with inert gas.
Claim 7
Dependent Claim 21 words
A magnetoresistive pressure-sensing device as claimed in claim 1 in which said magnetoresistive element is in the shape of a bar.
Claim 8
Dependent Claim 17 words
A magnetoresistive device as claimed in claim 1 in which said magnetoresistive element is in a U-shape.
Claim 9
Dependent Claim 17 words
A magnetoresistive device as claimed in claim 1 in which said magnetoresistive element is a radial shape.
Claim 10
Dependent Claim 17 words
A magnetoresistive device as claimed in claim 1 in which said magnetoresistive element is a spiral shape.
Claim 11
Dependent Claim 15 words
A magnetoresistive device as claimed in claim 1 in which said magnetoresistive element is arcuate.
Claim 12
Dependent Claim 104 words
A pressure sensor comprising a pair of chambers separated by a deflectible diaphragm which is deformed responsive to the differential of pressures in said two chambers, a thin film magnetoresistive element formed on said diaphragm to produce a variation in an electrical current in said element responsive to said deflection of said diaphragm, electrical bridge means having said magnetoresistive element in at least one arm thereof whereby the balance of said bridge means varies as a function of the electrical current in said element, and difference amplifier means connected across said bridge to detect and signal the changes in the balance of said bridge.
Claim 13
Dependent Claim 104 words
A pressure sensor comprising a pair of chambers separated by a deflectible diaphragm which is deformed responsive to the differential of pressures in said two chambers, a thin film magnetoresistive element formed on said diaphragm to produce a variation in an electrical current in said element responsive to said deflection of said diaphragm, electrical bridge means having said magnetoresistive element in at least one arm thereof whereby the balance of said bridge means varies as a function of the electrical current in said element, and difference amplifier means connected across said bridge to detect and signal the changes in the balance of said bridge.
Claim 14
Dependent Claim 37 words
The sensor of claim 11 wherein there are a plurality of said bridges, each with an individually associated difference amplifier means, and a common differential amplifier means connected to the outputs of said individually associated amplifier means.
Claim 15
Dependent Claim 48 words
The sensor of claim 11 wherein said chambers are separated by a partition having a circular aperture therein with a radius a, said diaphragm covering said aperture, said magnetoresistive element having a positive magnetorestriction constant and being mounted on said diaphragm within a radius approximately equal to 2/3a.
Claim 16
Dependent Claim 79 words
The sensor of claim 11 wherein said chambers are separated by a partition having a circular aperture therein with a radius a, said diaphragm covering said aperture, said magnetoresistive element having a positive magnetorestriction constant and being mounted on said diaphragm within a radius approximately equal to 2/3a, and a magnetoresistive element having a negative magnetorestriction constant and being mounted on said diaphragm in the area between the radius approximately equal to 2/3a and a radius equal to a.
Claim 17
Dependent Claim 58 words
The sensor of claim 11 wherein said chambers are separated by a partition having a circular aperture therein with a radius a, said diaphragm covering said aperture, and a magnetoresistive element having a negative magnetoresistive constant and being mounted on said diaphragm in the area between the radius approximately equal to 2/3a and a radius equal to a.
Claim 18
Dependent Claim 44 words
The sensor of claim 11 wherein said pair of chambers are formed in a casing of stainless steel having an outside diameter in the order of 30 mm, and the diaphragm is mounted over an aperture having a diameter approximately equal to 10 mm.
Claim 19
Dependent Claim 27 words
The sensor of claim 16 wherein said diaphragm is made of glass and has a thickness of about 0.5 mm and a diameter of about 20 mm.

References Cited (Backward Citations)

US3418163A Cited
US3807223A Cited
US3838595A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-08-19 1984-02-18 1984-08-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-08-19 1988-02-18 1988-08-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-08-19 1992-02-18 1992-08-19 $7700.00 Window Closed / Lapsed

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